Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

D side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) 3 m 2-5-11 Base Mounted Series VQ4000 Kit (D-sub connector kit) F Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) 70 38 2-Rc 1/8 (Pilot EXH port) 18 18 17.5 PE 30 42 R2 R1 P 1 3 5 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port SMC 6-Rc 1/2 Rc 1/4: Rc 1/4 thread 1(P), 5(R1), 3(R2) port

New

Q F D Q F z 300 z300 R E C C R E Water For Air For Medium A 2 x P Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E E 2 x P Port

A

Model A B C D E F G H J NAR425 80 141 37 67 71 (72) 3 50 48 80 B24 NAR625 98 152 40 78 76.5 (77.5) 7 87 52 90 B25 NAR825 126 217 75 110 92.5 (93.5) 5 NAR925 160 242 89 140 107.5 (108.5) 10 H O W T O O R D E R P I L O T O P E R AT E D P R E S S U R E R E G U L AT O R 25 (N)AR Japanese N North American O P T I O N S B O D Y S I Z E B Bracket G Gauge 4 1/2 6 1 8 1 1/2 9 2 P O R T S I Z E 25

MGG

Hs 11 Auto switch D-B7, B8 D-G7, K7 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-G5, K5 D-G5W D-K59W D-G5NTL D-B5, B6 D-B59W D-G5BAL D-G59F D-B7, B8 D-B73C D-B80C D-G7, K7 D-K79C D-H7C D-B7, B8 D-B73C D-B80C D-G7, K7 D-K79C D-B5, B6 D-G5W D-K59W D-G5BAL D-G59F D-C7, C8 D-C73C D-C80C D-C7, C8 D-C73C D-C80C D-H7W D-H7F D-H7BAL D-G5 D-K5 D-G5NTL D-H7

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

60-U> D 5 60-U> D 5 Individual SUP block assembly Individual EXH block assembly U side D side U side D side B A B A B A B A B A B A B A B A P P R R P R [When supplying different pressure only to an intermediate valve] Indicate the arrangement of the individual SUP block assembly and SUP blocking disk on a manifold specification sheet.

Vacuum Module Series ZX

E D P F Nil Model ZX1 K1 Vacuum switch (E) (D) Adsorption confirmation switch (P) Vacuum switch (ZSE2) ZX1-K1-E (Release to atmospheric pressure) Spacer 1 (ZX1-S1) (For side mounting) Pressure sensor 78 Rc 1/8 EXH port (EXH.)

LEY-OM007

a <> ABSINC ABS() / / INC()/ / b c 2mm d e f / P.41 7.2 / P.43 7.2 g INP ON INP INP ON / P.41 7.2 h / P.41 7.2 / P.42 7.2 i 100 % 150 % LEY16A 200 % LEY25A / P.42 7.2 j 12AREA ON 12 INC ABS() No.1 148 250 AREA k INP No.0 50+20 = 70 -24- 1 -IN INPAREA a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 100.00 3000 3000 0 0 0 100 80.00

Rubber seal 5 Port Solenoid Valve Series SYJ7000

R 61.5 (DIN 62.8) A A A A A 30 R P R 21 21 83.7 [85.9] 84.5 [86.7] 21 60 B B B B B 1/4 (P, R port) (Pitch) P = 19 Manual override 23.5 (Station n) (Station 1) (Light/surge voltage suppressor) + + + + + 58 [65] 42.6 26 B B 19 40 A A 1/8 (A, B port) 2 (Pitch) P = 19 23.5 L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) Approx. 300 (Lead wire length) 0.8 Applicable

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

Large Size Vacuum Module: Series ZR

ZX L SET H ZR 59.5 ZM ZMA ZQ 109 (Port exhaust) 114 (With built-in silencer) ZH 1 ZU 1 ZL ZY ZF ZP SP ZCUK 18 20 ZR1 -D AMJ AMV For port exhaust 7.2 1 Exhaust (EXH.) port Rc 1/4 AEP HEP S S Related Equipment 75 Digital pressure switch for vacuum Attachment D 109 1 (Port exhaust) 114 1 (Built-in silencer) (75.8) 56 P PD 3 100 (2000) Filter block D Dimensions not indicated are identical to

Vacuum Pad

P #Vacuum Ejector or Pump and Number of Vacuum Pads Ejector and number of pads Vacuum pump and number of pads Vacuum line Tank P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

Vacuum Pad

P #Vacuum Ejector or Pump and Number of Vacuum Pads Ejector and number of pads Vacuum pump and number of pads Vacuum line Tank P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

Vacuum Pad

P #Vacuum Ejector or Pump and Number of Vacuum Pads Ejector and number of pads Vacuum pump and number of pads Vacuum line Tank P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24

MXQ

Axial piping type (25): MXQ25L-P 17 40 11.5 79 Operating port 2-Rc 1/8 32 Other dimensions are the same as basic style. 20 8-5-39 40 Series MXQ External Dimensions of Adjuster Rubber Stopper (AS/AT) Extension End (mm) Body mounting section Stroke adjustment range (mm) Body mounting section Table mounting section A Applicable size Model P B C F G M D E P 1) H J K Q 1) A D MXQ-AS6(L) 5 16.5

MXS

Model Mounted to body B C D E H F M P* I A J Q* MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 7 2.5 6 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 8 3 7 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 12 4 31 10 9.5 M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5

Water-cooledThermo-chiller

50 or less Chloride ion (Cl) [mg/L] 50 or less Sulfuric acid ion (SO42) p p p p p [mg/L] 50 or less Acid consumption amount (at pH4.8) [mg/L] 70 or less Total hardness 1.Thoroughly read the Operation Manual.

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

39

type Top cover Nil M Rubber cover Bore size 50 63 Metal cover 50 Equivalent 63 Equivalent Front mounting Nil F No Cylinder port Nil TF TP Yes NPT G Proximity switch T P W Rc TURCK P&F Arm opening angle 15 30 45 60 75 90 105 120 135 None 15 30 Arm mounting position 45 Right L R Left D 60 Both sides 75 90 105 120 135 Refer to Other Clamp Cylinders on page 12 for 80.

SY

43 Type 41P Type 42P When P/R ports are located on the D side, the designated P/R ports on the other side are plugged.