High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

Modular Type Lubricators Series AL

D U With Auto Drain S F W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A H L E IN OUT Bracket (Optional) D NPT 1/4 5 Series AW20~40 Filter Regulator How To Order AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Bowl Symbol 2 8 Applicable Body Size 20 30, 40 Description

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

, 11 P.12 to P.15 P.1, 2 P.3, 4 P.5 to 9 P.5 to 9 Adsorption is possible even on a slanted surface.

CS1

Refer to p.1.10-20 for dimensions of auto switch setting position and mounting height. Refer to p.1.10-8 for auto switch min. mountable stroke. CS1F125SCS1125, #3 CS1F140SCS1140, #3 CS1F160SCS1160, #3 CS1F180SCS1180, #3 2001 to 2400 55 325 30 30 347 331 2001 to 2400 390 55 36 36 372 357 In case of rod boot style, min. stroke is 30mm or more.

100

state. 100 Vacuum break flow rate [L/min (ANR)] 0 10 20 30 40 50 60 70 80 90 P = 0.5 MPa P: Supply pressure [MPa] P = 0.4 MPa P = 0.35 MPa P = 0.3 MPa P = 0.2 MPa 0 1 2 3 4 5 6 7 8 9 Number of needle rotations * The flow rates shown in this graph are representative values for the ejector with silencer exhaust specification, and the suction flow may vary depending on the piping conditions

Table of Contents

Dimensions (Hexagon width across flats) Dimensions Min L1 H Screw D D Model Max 20.5 20.5 30 34.2 37 49 ASN2-M5 ASN2-U10/32 ASN2-01 ASN2-02 ASN2-03 ASN2-04 8 8 12(12.7) 17(17.5) 19 24(23.8) 23.3 23.3 35 39.2 42 54 10 10 15 20 25 30 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Screw D Note) (in parentheses) are the dimensions of NPT screw specifications. Caution Be sure to read before handling.

CG1

,B6 D-C7,C8 D-C73C D-C80C D-G5 D-K5 D-G5NTL D-H7W D-H7F D-H7BAL D-B59W D-H7 D-H7C D-C73C D-C80C D-G5W, K59W D-G59F D-G5BAL Bore B 16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

25.5 15 21.5 25 23.5 27 22 28.5 18.5 15.5 11.5 13.5 17 12 Auto switch mounting heights (mm) D-C7 D-C8 D-H7 D-H7W D-H7F D-H7BAL D-B5 D-B6 D-B59W D-G5NTL D-G39 D-K39 D-A33 D-A34 D-C73C D-C80C D-H7C D-A44 Bore size (mm) HS HS HS HS HS 25 28 27.5 62 72 20 27 30 29.5 64 74 25 30.5 33.5 32.5 66 76 32 34.5 37.5 37.0 70.5 80.5 40 12 Auto Switch Specifications Contact Protection Boxes: CD-P11, CD-P12

Thermo-chiller/Rack Mount Type

to 230 VAC) p. 11 Communication Functions pp. 30, 31 VOptions HRR012/018 How to Order With Electric Conductivity Control Function, Applicable to DI Water Piping p. 32 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 12 Applicable to DI Water Piping p. 32 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 12 Inverter Pump Mounted p. 33 Specifications High-Pressure Pump

OMR0031

Specifications LAT3-10 Stroke 10 mm, Resolution 30 m LAT3-20 Stroke 20 mm, Resolution 30 m Card Motor 8 options LAT3-30 Stroke 30 mm, Resolution 30 m (Refer to the table Product LAT3M-50 Stroke 50 mm, Resolution 5 m Number on the right) LAT3F-10 Stroke 10 mm, Resolution 1.25 m LAT3F-20 Stroke 20 mm, Resolution 1.25 m LAT3F-30 Stroke 30 mm, Resolution 1.25 m LAT3F-50 Stroke 50 mm, Resolution

Prevents Micro-Bubbles

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

TABLE OF CONTENTS

Cont L-7/64 O4-SER. 40 C-Series 20 Only (Magnetic or Non-Magnetic Body Flush Mounting 1 9/16 Housing Heavy Flux Plate B Stop)\ X-1/8 Sleeve Port Adapter 6-Multi N-1/8 O5-SER. 50 S-AN Connector D-Diode Coil (STD) Purpose O-5/32 OE5-Explosion W-Spacer (Series 50 Only) P-3/16 Proof D-Series 15, 30, 50, 70, OE & J.I.C.

LEH_C

) ()Amm b)30 31 =30 1) ()Amm 2) CW () (CW )30 29 30 1 29 8 - (LEC ) (LEC ) () 2:CCW 1:CW () 2:CCW () 1) 1 100 40 100 / LEHZ(J),LEHF,LEHS 50 100 / LEHZJ10L,LEHZJ16L 2) 100 5 50 LEHZ(J) , LEHS 5 20 LEHF10 5 30 LEHF203240 3) 10 2,000 10 0: 0 21 0 1) P.53 8.3 2) 3) 4) P.40 7.1 9 - 6. !

LEF-OM002xx

30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200 3,000 Max.acceleration/deceleration

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For detailed specifications, refer to page 8-30-1. Normally closed (NC = b contact), solid state switch (D-F9G/F9H/Y7G/Y7H type) are also available. For details, refer to page 8-30-31 to 8-30-32. D-A90 cannot be mounted on Series MY1HT. Electrical entry (Fetching direction) Type Model Features D-A90 D-Z80 Grommet (In-line) Grommet (In-line) Reed switch Without indicator light 8-12-24

C95

Ht B Auto Switch mounting positions and dimensions [mm] Auto switch operating ranges [mm] D-Z7/Z8, D-Y5/Y7 (W) All models D-Y6, D-Y7 (W) V D-Y7BA Bore Size [mm] Bore Size [mm] D-Z7 D-Z8 D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA A B Hs Ht Hs Ht Hs Ht 14 1.5 25.5 23 26.5 30 7.5 5.5 3.5 23 23 32 32 25 1.5 29.5 26 30 34 8.5 5.5 3.5 26 26 40 40 26.5 2 33.5 31 34.5 31 38 31 7.5 7 3.5 50 50 31.5 2 39 36

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Manifold type D-sub connector Flat ribbon cable Connector Serial Series 10-/21-VQ1000 Plug-in 10-/21-VQ2000 VQ1000 How to Order, Manifold Options VQ2000 How to Order, Manifold Options VQ1000/2000 Model, Standard/Manifold Specifications P. 515 P. 517 P. 521 102110211021VQ1000/2000 1021F kit (D-sub connector) P. 523 VQ1000/2000 1021P kit (Flat

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Manifold type D-sub connector Flat ribbon cable Connector Serial Series 10-/21-VQ1000 Plug-in 10-/21-VQ2000 VQ1000 How to Order, Manifold Options VQ2000 How to Order, Manifold Options VQ1000/2000 Model, Standard/Manifold Specifications P. 515 P. 517 P. 521 102110211021VQ1000/2000 1021F kit (D-sub connector) P. 523 VQ1000/2000 1021P kit (Flat

One-touch Fittings

57.2 45.2 9 18.1 Q2 Q2 Round type P D 4 to 12 2 x N Q1 2 x O 3 x Applicable tubing *1: D is maximum diameter.

125

1/4, 3/8, 1/2 [Port 1(P), 2(A), 3(R)] A B PE 8.25 121.9 112.1 104.9 R 3 84.5 P1 15 30 30 15 60 52.5 P 1 A 2 30 33 2 x 5.5 (For mounting) A Air operated: VEX3320 DIN terminal (D) Caution How to Use DIN Terminal Connector Refer to page 1739.