HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Add a "" in front of the part numbers for solenoid valves, etc., to be mounted. 2 3 4 Class 2 Class 3 Class 4 Enter together in order, counting from station 1 on the D side. OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations D side U side 1 2 3 4 5 n Body material Brass Symbol D H Seal material FKM FKM 02 : 10 2 stations : 10 stations All IN ports are 3/8.

HRX-OM-W058

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Vacuum Pad

Adapter: Vacuum Inlet Construction Adapter Applicable Pad List 8 8 8 8 8 8 8 8 Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6

Vacuum Pad

Adapter: Vacuum Inlet Construction Adapter Applicable Pad List 8 8 8 8 8 8 8 8 Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6

Vacuum Pad

Adapter: Vacuum Inlet Construction Adapter Applicable Pad List 8 8 8 8 8 8 8 8 Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, 15, 20 25, 30, 35, 40 45, 50 12, 16 20, 25 Dimensions ...10 &11 Series CQS How to Order . 1 12 16 20 25 5, 10 Construction . 12 Solid state switch D-M9N, F9NV D-M9P, F9PV D-M9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Dimensions ...13 to 16 Series CQSK How to Order . 1 12 16 5, 10, 15, 20, 25, 30 Construction . 17 20 25 5, 10, 15, 20, 25, 30 35, 40, 45, 50 Dimensions ...18 &19 Note

Air Fittings & Tubing

D.

Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

Table of Contents

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

-fl Seies

O-ring O, @, O Non plug-in type ME263LR-o2-1 Plug-in type Conneclor lead wires With terminal block. o @ End plate (kit) asJY ME272LR-02-1 End Plate (U) lD, End plate (D) (D ,Clamp O ' O o-rins G), O, O, O. Non plug-in type 1!

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

O-ring O, @, O Non plug-in type ME263LR-o2-1 Plug-in type Conneclor lead wires With terminal block. o @ End plate (kit) asJY ME272LR-02-1 End Plate (U) lD, End plate (D) (D ,Clamp O ' O o-rins G), O, O, O. Non plug-in type 1!

Ionizer Nozzle type IZN10 Series IZS

30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 445 IZN10 Series Flow Rate Characteristics (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 (3) Female threads for piping/IZN10-11 With Stainless steel 316 One-touch fitting + Anti-static tubing 0.7 Energy saving static neutralization nozzle/IZN10-01 0.3

Air Cylinder

D-H7l D-H7C D-G5l/K59 D-G5lW/K59W D-G59F D-G5NT D-G5BA D-C7l D-C80 D-C73C D-C80C D-B5l D-B64 D-B59W D-A9l D-A9lV Bore size A B A B A B A B A B A B A B 20 33 24 (32) 29 20 (28) 28.5 19.5 (27.5) 29.5 20.5 (28.5) 25 16 (24) 23.5 14.5 (22.5) 26.5 17.5 (25.5) 25 32.5 24.5 (32.5) 28.5 20.5 (28.5) 28 20 (28) 29 21 (29) 24.5 16.5 (24.5) 23 15 (23) 26 18 (26) 32 34 25 (33) 30 21 (29) 29.5 20.5 (28.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A7H/A80H D-A73C/A80C D-F/F7V/F79F D-F7W/F7WV D-J79/J79W D-J79C D-F7BAL/F7BAVL D-Z7/Z80 D-Y59/Y69 D-F7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-A7H, D-A80H D-F7, D-J79, D-F7W D-J79W, D-F7BAL D-F79F, D-F7NTL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-Y7BAL D-A7 D-A80 D-A79W D-F7NTL D-A7 D-A80 D-A73C D-A80C Bore size (mm) A 32.5 32.5 36.5 A 33 33 37 A 30 30 34 A 38 38 42 A 29 29 33 38.5 42 U 80 88 98

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

LOCK FREE LOCK FREE Pilot type Nil Internal pilot R External pilot Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Stations Stations Symbol Symbol 02 02 2 stations 2 stations Connector mounting position Double wiring Note 1) Double wiring 12 12 12 stations 12 stations Symbol Mounting position 02 02 2 stations 2 stations D D side Specified layout (Up to

Title not found

Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.

Combination Cylinder

8 I 28 33.5 37.5 46.5 K 5 5.5 5.5 7 L 30 30 30 39 MM M8 N 15 15 15 21.5 NA 24 30 34.5 42.5 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 PG 22 27 27 29 PH 19.5 24 24 24 PL 20 24 24 24 PW 38 41 41 41 RR 9 9 9 11 S 127 137 139 167 U 14 14 14 18 Z 198 212 214 256 ZZ 207 221 223 267 1/8 1/8 1/8 1/4 CXS M10 X 1.25 M10 X 1.25 M14 X 1.5 CXT MX Double Clevis (D) MXU CLM2D Bore size Stroke MXH MXS MXQ

CL

D C B H d Tube I.D.

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1