Type: Relay Device, Type: Electro-pneumatic lever type, Option: None, Pressure(MPa): 1.0, Terminal box: N/A, Pilot valve: N/A, Fork lever type fitting: N/A, Lever unit: With Stroke 35 to 100 mm / lever unit, Compensation spring: N/A, External scale plate: N/A, Position feedback signal: N/A, Air connection port: 1/4NPT, Conduit connection port: M20 × 1.5, Explosion-proof structure: ATEX

High Vacuum L Type Valve

Construction and Outer dimensions Indicator Handle Ass'y(Maintenance part) (Including ,,,) 1 Bellows holder (Material: SUS304) 7 Heater(option) Exterior seal (Maintenance part) 3 Bellows (Material: SUS316L) Valve (Material: SUS304) 6 5 Valve seal (Maintenance part) 2 Body (Material: A6063) 4 D C E E F C H B G A A Unit: mm Model H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41

SI unit (CC-Link compatible)

F: Contents are added. [July 2016] G: Contents revised in several places. [August 2019] H: Modified errors in text. [ November 2019] I: Contents revised in several places.

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)]

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option: TU (T+U)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option: T (High-pressure Pump Mounted)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option: TY (T+Y)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option: DMT (DM+T)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option: MTU (M+T+U)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option: MT (M + T)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: M (Applicabe to DI Water Piping)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: MT (M + T)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: DM (w/Electric Conductivity Control Function, Applicable to DI Water Piping)

Cooling Capacity: 030 [Cooling Capacity: 2500/2900 W (50/60 Hz)], Pipe Thread: F (G with PT-G conversion Fitting Set), Option: V (Stainless Steel Panel Specification)

Cooling Capacity: 030 [Cooling Capacity: 2500/2900 W (50/60 Hz)], Pipe Thread: F (G with PT-G conversion Fitting Set), Option: T (High-pressure Pump Mounted)

2 kPaStainless steel 316None(Open type) Grommet(Dripproof) JIS F 8801Cable gland Type A20a 20b ?20c ?

Thermo-chiller

Symbol Description Nil None J With automatic fluid fill function L Large capacity tank specification V Stainless steel panel specification W SI unit only Pipe thread type Nil Rc F G (with PT-G conversion fitting set) N NPT (with PT-NPT conversion fitting set) Power supply When multiple options are combined, indicate symbols in alphabetical order.

._3d_items_collection = {}; } SMC AN15-C08 silencer with 8mm fitting, AN SILENCER $5.50 + Add to Quote Add To Cart Add to Cart SMC AXT100-DS25-030 f type connector (vq/vzs) 3m

2 kPaStainless steel 316None(Open type) Grommet(Dripproof) JIS F 8801Cable gland Type A20a 20b ?20c ?

2 kPaStainless steel 316None(Open type) Grommet(Dripproof) JIS F 8801Cable gland Type A20a 20b ?20c ?