Auto Switch Guide

2-color indication with diagnostic output Grommet Band 10-20-51 MK(2) Grommet Rail 10-20-52 Grommet Tie-rod 10-20-53 RS Q G Water (coolant) resistant type D-H7BAL D-G5BAL D-F7BAL D-F7BAVL D-F5BAL D-F9BAL D-Y7BAL 10-20-54 RS H A Band Grommet Water resistant 2-color indication 10-20-55 Solid state switch RZQ 10-20-56 Rail Grommet 10-20-57 Tie-rod Grommet MI W S 10-20-58 Direct Grommet CEP1

Lightweight and Compact

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating

LEF-OM002xx

500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100

Rotary Actuator

Without air cushion With air cushion Air-hydro 50 P694020-20 P694020-21 P694020-23 63 P694030-20 P694030-21 P694030-23 80 P694040-20 P694040-21 P694040-23 100 P694050-20 P694050-21 P694050-23 Corresponding parts u, o, !0, !3 are included as a set. u, o, !0, !3, @3 are included as a set. u, o, !0, !3 are included as a set.

•

4 Urethane tube H&lil 6 Urethane tube M8X1 AS 012 1>8 0110 1>1. 1>20' 1>32 40I>li~ Symbol T hread diafP"cft size ~} 16 2 4 6 8 10 13 20 25 32 40 50 Type AatlvDe Aat with rib ,o..ep \YIJ8 U4 UlS !!' .!!l t ~lI>h~... M10X1 AlO I'!

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

ZX

Y DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W.

Fluoropolymer Piping Equipment

When ordering nuts as spare parts, size 4 and 5 are as shown below.

Electric Actuator with Integrated Guide

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Electric Actuator with Integrated Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8

Stability of suction position,

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

10

x 1.25 7 21 16 5 63 32 18 35 75 56.5 20 13 45 14 16.5 28.5 11 58 50 64 M8 x 1.25 7 21 16 5 80 37 22 40 95 72 25 16 45 20 19 37 13 72 62 76.5 M10 x 1.5 10 30 16 5 100 37 26 40 114 89 30 16 55 20 19 37 16 72 71.5 86 M10 x 1.5 10 30 16 5 -Wl Bore size [mm] MM MO N NB P RF S V W WL ZZ S ZZ 32 M10 x 1.25 15 27 35 1/8 11 92 4 6.5 24 143 40 M14 x 1.5 19 27 40 1/4 11 97 4 9 24 152 50 M18 x 1.5 19

CV/MVGQ

mm or more. 6 7 7 11 11 14 18 18 22 26 86 83 83 84 85 27 30 31 37 40 38 43.5 49 63 73 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11 11 13 16 18 18 18 20 20 Bore size (mm) 40 50 63 80 100 Without rod boot With rod boot ZZ 221 231 239 271 283 W l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke H 51 58 58 71 72 ZZ 229

CV/MVGQ

mm or more. 6 7 7 11 11 14 18 18 22 26 86 83 83 84 85 27 30 31 37 40 38 43.5 49 63 73 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11 11 13 16 18 18 18 20 20 Bore size (mm) 40 50 63 80 100 Without rod boot With rod boot ZZ 221 231 239 271 283 W l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke H 51 58 58 71 72 ZZ 229

HRX-OM-R016

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8

MNB

40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6

7

Therefore, the flow rate is calculated as the formula: Q = 0.05/1 x 20 = 1 [kg/h]. 161 VXD Series Flow Rate Characteristics Note) Use this graph as a guide. In the case of obtaining an accurate flow rate, refer to pages 157 through to 161.

4-channel Flow Monitor ( compatible)

Keep wiring as short as possible to prevent interference from electromagnetic noise and surge voltage. Do not use a cable longer than 20 m. Wire the DC(-) line(blue) as close as possible to the power supply. Environment Do not use the product in area that is exposed to corrosive gases, chemicals, sea water, water or steam. Otherwise failure or malfunction can result.

%silltr

P(pslq) 1 0 20 30 40 50 60 70 80 90 100 cf 1.68 2.36 3.04 3.72 4.4 5.08 5.76 6.44 7.12 7.80 On lh olher hand it would be wrong to use Boyle's Law in pneumatics. In the case of tools as well as cylinders the change is never lsothermic but always Adiabatic change.

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

SMC Pneumatic Clean Series

W X Y M X Y Z LS + Stroke LX LZ ZZ + Stroke (mm) 7 7 6 6 LD 4 4 4 4 LC 3 3 3 3 LT 30 25 22 20 LH 51 53 53 53 LS Z 135 125.5 123.5 118 ZZ 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 54 44 36 32 LX 10 10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5 192 55 55 60 60 10 12 11 14 5 5 6 6 40