NCA1

R O D T H R E A D S T D. R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult SMC Customer Service for larger sizes.

Compact Manifold Regulator Series ARM5

Common Supply Type Construction OUT IN ARJ AR425 to 935 SMC AMR K P C U O S L H ARM t e A-A A ARP w y IR IRV r VEX1 i SRH SRP !

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

EX120/121/122

228 (E4) 1560 (618) 0 Input a 0 Input b a 0 Input b a Input signal range a 0 to 10 V Input signal range a b 1 to 5 V Input signal range a b 10 to 10 V 10 V 1 V 5 V 10 V 10 V 0 to 5 V 5 V 4 to 20 mA 4 mA 20 mA 5 to 5 V 5 V 5 V 0 to 20 mA 20 mA 20 to 20 mA 20 mA 20 mA Regarding AD value In the above graph, 2 AD values are explained as below. 3901 : AD value [Decimal value] (F3D): Offset Binary

MXS

0 A B NN-M4 X 0.7 thread 8 deep MGG 4 MGC 1 MGF 7 7 6.5 3.2 CY1 A B 11 5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L

ITV

SRP SRF VCHR ITV ITV No load voltage (V peak) 0 to 20 [V] Max. current rating 5.0 100 Peak voltage IC ITVX Over 20 and 30 or less [V] (2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak) or less, and a power supply consisting of a class 2 power supply unit confirming to UL1310, or a class 2 transformer confirming to UL1585. 2.

Modular Type Regulators Series AR

Unit AC AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K Bracket and Relief Valve (Optional) P2 (Gauge Port Size) U Min. Clearance For Maintenance A E W G AC-A AA Bowl Detail (AF20/AW20) M J N F (2) P1 (Port Size) C D V Q Q IN OUT K Note: Sight glass not applicable to all size 20 bowls. B P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

CL

(mm) Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 AL LH KA BX K B1 EA B BY BP C D GB GC H1 J LD FA F EB GA With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to1400 30 to 1400 30 to 1400 Without rod boot to 500 to 600 to 600 to 750 to 750 to 1400 to 1400 to 1400 1 4 1 4 1 4 1 4 1 4 1 2 1 2 3 4 / / / / / / / / 22 27 27 32 41 8 11 11 13 16 M8 X 1.25 M8 X 1.25 M10

Combination Cylinder

CY MY 3.1-61 Series CL1 Centre Trunnion/(T) (A) Lock-up at piston forward (B) Lock-up at piston backward 40 to 100 125 to 160 (mm) Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 AL B B1 BX BY C D EA EB F GA GB GC H1 J K KA FA BP W/o rod boot to 500 to 600 to 600 to 750 to 750 25 to 1000 30 to 1000 35 to 1200 W/ rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 20 Z ZZ (NN-1) x H G H 5.5 11 5.5 11 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) GA 11 21 31 43 41 F 20 30 20 28 38 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 HA 20 20 20 30 48 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 M 42 52

Magnetically Coupled Rodless Cylinder

Auto Switch Proper Mounting Position (mm) A B C D Auto switch model D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V K dimension (Switch rail height) Bore size 6 3 6 11 16 20 26 28 5.5 5.5 5.5 6 6 7.5 6.5 1.5 1.5 1.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W K HT HB HC N X A 2-Plug 4-Counterbore dia.

SMC Pneumatic Clean Series

N 1.5 N F A 1.5 F H S + Stroke 20 Non-lock manual release type K (This drawing shows the cases of 20 and 25.)

Stopper Cylinder

16 20 Y Q F A + 2 stroke B + Stroke V H + Stroke Width across flats K T 0 0.1 E W M D E 2 x N through 4 x O counterbore 2 x P (Rc, NPT, M thread) Stroke A + 2 stroke B + Stroke V H + Stroke Width across flats K T 0 0.1 Y M Q F D E A + 2 stroke B + Stroke V H + Stroke Width across flats K M T 0 0.1 D E 2 x P (Rc, NPT, G) A + 2 stroke B + Stroke V H + Stroke Width across flats K M Q F Z Stroke

AC

For combinations without AW, indication should be "-R" of option. (3) Standard bracket: T bracket for a set of 2 pieces, and L bracket for a set of 3 pieces. But when a check valve (symbol "K") or a residual pressure release 3 port valve ("V") is attached, L bracket is attached for a set of 2 pieces.

C85

13 15 8 15 24 32 6 62 44 17 20 24 28 8 8 22 8.2 11 20 25 G 1/8 M22 x 1.5 M10 x 1.25 137 17 15 10 15 30 32 8 65 50 20 22 28 33.5 8 8 22 11 10.2 22 With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 M8 x 1.25 71 20 8 36 20 6 84 96 109 134 159 25 M10 x 1.25 74 22 10 36 20 8 87 99 112 137 162 187 Item Wh I Stroke 1

C85

A 10 3 (3.5) 4 (4.5) 4 (5) 7 (5) 8.5 (6.5) 8 10 12 16 20 25 ( ) for air cushion type.

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

Modular/F.R.L. Units Series AC

Unit AC AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K Bracket and Relief Valve (Optional) P2 (Gauge Port Size) U Min. Clearance For Maintenance A E W G AC-A AA Bowl Detail (AF20/AW20) M J N F (2) P1 (Port Size) C D V Q Q IN OUT K Note: Sight glass not applicable to all size 20 bowls. B P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) Width across flats B1 H1 2 x NN MM MM NA 2 x Eh8 20, 25 D D Standard port Width across flats KA 45 45 1.5 A AL K Relief port (10-, 21-) H + Stroke A AL K 1.5 Vacuum port (11-, 22-) ZZ + 2 x Stroke S + Stroke F H F (mm) Female Rod End Female rod end 2 x M5 x 0.8 Relief port (10-) Vacuum port (11-) A1 20 20 20 21 H M4 x 0.7 M5 x 0.8 M6 x 1 M8 x