New

C37 20A 3/4 20 D 200 VAC N.O. Stainless steel E 230 VAC 6 D K L N.C. N.O.

ZX

Supply pressure (MPa) Suction flow rate (l/min (ANR)) ZQ ZX1-W07 Exhaust Characteristics Flow Characteristics ZF Vacuum pressure Vacuum pressure ZP Air consumption Air consumption Air consumption Suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure (kPa) ZCU AMJ Suction flo Suction flow r w rate ate Suction flow rate Misc.

Title not found

.O (r) aol O Gl ,9 .rO ";p:* Stroke Variations Long strokes up to 400mm standardized. a.l)compact guide cytinder QlBore size @pon typ. l t t t l t t t l l 7 5 _ _ t t t t t t t t t l l t t t l t t t l l t t r t t t t t t l r t t t t t t t t l 1't5 l t t t t r r r r l r t t t r r t t l l z a n * For bore s zes 12 & 16 onyM5x0SisavailaHe Befer to lable al eft for delats Ocylinder stroke (mm

LJ1H

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

A_HEC-OM-K001

A l l o w a b l e L o w e r T e m p . R a n g e Sets lower limit of temp. where the warning occurs. The difference between target temp. and lower limit temp. should be input. Function M O D E < 1 0 . 0 C [Tip] Status when temp. upper/lower limit alarm occurs. W R N P V < 2 5 . 6 C # 1 When temp. upper/lower limit alarm occurs, indicator WRN lights on.

ITV

Note 2) 4 to 20 mA DC is not possible with the 2-wire type. Power supply voltage (24 VDC or 12 to 15 VDC) is required. Note 3) Value for the state with no over current circuit included. If an allowance is provided for an over current circuit, the input impedance varies depending on the input power supply. This is 350 or less for an input current of 20 mA DC.

CXWM/CXWL

M L CX Plate mounting style with auto switch: CDPXW S M L Table (1) DHousing mounting style with auto switch: CDBXW M -X M L Table (2) 20Data Table (1) Plate Mounting Style with Auto Switch (CDPXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material CDPXW 10SM L CDPXW 16SM L CDPXW 20SM L CDPXW

Title not found

Manual override Nil: Nonockins push type 'oltage suppressor wrh ---'l ,hl wth sfige voftageJUepresd B: Lock ng iype (s oned) lD tr]]i\ -r1.LrF-r }pos lDn qhausl cn1er . t_tr-r fll, r-itr'Lt lir. ,L]! gpos ton pressure center ]]-trr\i rt it, rN !fT.",d""d_l I nuonerseat IIE t i r ; \ 1 . 1 r q t l 6. r': 6) G) ( : . : 6 ?

Air Cylinder

Double end lock: CBG1BN Bore size Stroke Wl (mm) Bore size (mm) S ZZ 20 92 129 25 92 134 32 91 133 40 101 153 50 119 179 63 119 179 80 146 220 100 146 220 ZZ + Stroke S + Stroke With rod boot 8 l 8 l 8 l IJ IJ e e JH f h + l f JW h + l ZZ + l + Stroke ZZ + l + Stroke 20 to 63 80, 100 (mm) (Reference) l Head end lock: -Hl Rod end lock: -Rl Double end lock: -Wl ZZ ZZ ZZ 20 30 18 55 27 15.5

Fieldbus System

EX600-ED2-l EX600-ED3-l w e r e r w 18 Series EX600 Dimensions SI Unit EX600-SPRlA EX600-SDNlA EX600-SMJl EX600-SENl EX600-SECl EX600-SPNl 10.7 47 55.2 10.7 55.2 47 26 26 23.7 106 106 56.4 8 22.1 22 22 11.5 56.4 22.1 106.5 End Plate EX600-ED2 42.5 5.5 EX600-ED3 26 20.5 85.1 5.5 20.5 8 90 8 90 106 106 13.2 30.35 30.35 56.6 36.65 30.2 73.6 56.6 13.2 30.2 Handheld Terminal 170 (39.6) 20 76 19

IDU/IDF

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

VQ7-6/7-8

end plate assembly Manifold block assembly U side end plate assembly < End plate assembly > AXT512 A AXT512 1A End plate position Cylinder port position Wiring specification L side R side L R L side R side L R Side Bottom A B P, R port size Rc1/2 Rc3/4 12 One-touch fitting 04 06 C12 Cylinder port size Rc3/8 Rc1/2 03 04 < Manifold block replacement parts> Part No

Table of Contents

(Except L kit) F, P and S kits are provided with an exhaust on one side, while L kits are with an exhaust on both sides. Note 1) 01 1 station Note 2) The number of max. stations differs from kit to kit. (Refer to the table below.)

Title not found

Hea\,y duty gu de rod type Wdide bearng lOpott typ" l l l l l l l l l l r r t t t r r l l l t t t t t t l l l l tza t t t t t t t t t l t t t t t t t t t l ,75 _ t t t l l l l l l l znn t r t t t t l t l l ' For bore sizes 12 & 16, only tu15 x 0.8 is availade.

Membrane Air Dryer

Size 3 10 20 5 $ $ $ $ $ $ $ $ $ $ Nil None (Standard) M V R S Flow direction (Right m Left) Standard dew point temperature and air flow rate With dew point indicator Standard equipment Flow rate by size Outlet air flow rate (L/min [ANR]) Standard dew point Symbol 3 5 10 20 (oC) 20 15 Drain discharge method Nil 25 25 50 50 100 100 200 200 Size Drain discharge H Note Symbol 3 5 10 20 method

VQZ1000/2000/3000

Rc 1/8 1(P) port 3 4 5 3 4 5 L plug connector (L): VQZ2 20 1(R)-L-C4/C6/M5 DIN terminal(Y): VQZ2 20 1(R)-Y-C4/C6/M5 Indicator light 300 149.5 (Lead wire length) 68 Pg.7 31 <36> 155.5 MAX. 10 71.5 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61.5 54 0 1 3 4 5 36 M plug connector (M): VQZ2 2 (R)-M-C4/C6/M5 300 (Lead wire length) Cover diameter

HEC_001W-E

(Ex. : 1:Normal) Function : Selects control operation mode from those shown below 0 : Stop of control (Pump Stop) 1 : Normal (normal control operation) 2 : AT (auto tuning) 3 : Learning control (Learn) 4 : External tune control (External) C o n t r o l O p e r a t i o n M O D E < 1 : N o r m a l When a learning control and an external tuning control are selected, measurement temperature (

NCG/CG1

Head Side Trunnion Style Rod end lock/-R Bore size (mm) Z (Head side trunnion) ZZ (Head side trunnion) With rod boot With rod boot Without rod boot Without rod boot Head side trunnion style: CBG1T (Rod end lock -R only) 145 + l 124 + l 104 125 20 152 + l 131 + l 109 130 25 157 + l 133 + l 111 135 32 175(182) + l 147(154) + l 127(134) 155(162) 40 200(211) + l 168(179) + l 148(159) 180(191)

Environment

4 q Accuracy w Size r Motor type t Lead [mm] Nil Basic type H High precision type 63 Symbol LEY63 A 20 B 10 C 5 L 2.86* Symbol Type Output [W] Actuator size Compatible driver e Motor mounting position S4 AC servo motor (Incremental encoder) 400 63 LECSA2-S4 Nil Top mounting R Right side parallel L Left side parallel D In-line S8 AC servo motor (Absolute encoder) 400 63 LECSB2-S8 LECSC2-S8

CA2

9 f l 9 f l + Stroke h + l + Stroke h + l S + Stroke h + l MB ZZ + l + 2 strokes ZZ + 2l + 2 strokes Stroke range (mm) A Bore size (mm) MB1 AL B B1 C D E F G H1 K KA J M MM N Without rod boot With rod boot 40 60 8 6 up to 500 20 to 500 30 27 22 44 16 32 10 15 M8 x 1.25 14 11 M14 x 1.5 27 CA2 50 70 11 7 up to 600 20 to 600 35 32 27 52 20 40 10 17 M8 x 1.25 18 11 M18 x 1.5 30 63 85 11 7 up