MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100

Stability of suction position,

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.

SX

S 5 VDC R 3 VDC 1-6-55 56 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x

Free Mount Cylinder

D Double acting Acting 16 16 mm Nil 20 20 mm Q Rod piping/Male thread 25 25 mm Bore size Stroke (mm) 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 TN TF R Rod piping/ Pad direct mounting 32 32 mm Note) In the case of rod piping (Q, R), TF (G1/8) is not available.

LJ1H

Note 5) For command pulse input with an open collector method.

REA/REB

25 REAH15, 20, 25 REAH15, 20, 25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 High Precision Guide Type REAH 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REAH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 Max.

Digital Flow Switches

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] 100 2 or 3 particles/cc 10 00 10 20 30 40 50 60 70 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Compact Manifold Regulator Series ARM5

(Full Span) Display accuracy 230 Calibration angle Limit indicator With limit indicator 17.5 L side end block R side end block 6 28 OPEN 56 SMC 56 1.5 SMC 28 20 7 7 20 R E V 18 O 26 26 18 C 22 32.5 32.5 14.5 Port Plug Bushing VVQ0 58A Part no.

CXS

CXS -R 10 15 ZZ SS Z (Z) Manual lever insertion 1.7 Dual-Double-Rod Type CXSW K KK Hexagon (O) (Z) (mm) O K Width across flats 12 Model CXS10-R 6.5 8.5 Width across flats 13 CXS15-R (mm) Symbol ZZ Z SS KK 50 Stroke 10 20 50 40 30 10 20 30 40 50 10 50 40 30 20 10 20 30 40 Model 19.5 80 90 100 115 125 30 97 107 117 132 142 24.5 40 50 CXS10-R 20.5 90 100 110 120 130 35 109 119 129 139 149 45

New

B B 2 x M5 Thread depth N 2 x M5 Thread depth N Terminal part Faston connector 250 Series 23 K K 11 9 6.5 J H H J 15 (mm) Conduit Faston type Dimensions Size Port size A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 14 14 19 22 14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9

7

Rated voltage Rated voltage Electrical option Electrical option VX2 GDM2A-G-S5 24 VDC 24 VDC 12 VDC 100 VAC VXK 100 VAC 110 VAC 110 VAC 200 VAC VXD VXD 200 VAC 220 VAC None C18312G6GCU GDM2A-R None 220 VAC 230 VAC VXZ 230 VAC 240 VAC 240 VAC 24 VAC VXS 24 VAC 48 VAC GDM2A-G-Z5 GDM2A-R-L1 GDM2A-R-L1 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L5 GDM2A-R-L5

Fieldbus System

-DMlF 52.5 10.7 10.7 52.5 47 52.5 10.7 47 20 47 20 106 106 106 8 56.4 22.1 56.4 8 22.1 37 56.4 2.2 22.1 20 Series EX600 Accessories u Power supply cable with M12 connector i Communication cable with connector r Seal cap (M8) o I/O cable with connector t Marker w Valve plate r Seal cap (M12) y Power supply cable with 7/8 inch connector e Reinforcing brace (for direct mounting) e Reinforcing

Digital Flow Switch ( compatible)

(page 88) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y

Cylinder with Lock

L1 l1 (Min.) l2 R SR (Max.)

5 Port Solenoid Valve

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM. Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring Connector Top entry Connector entry direction can be changed with a single push.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

The rotation range under the adjustment of an angle at 60 is indicated below. The rotation range under the adjustment of an angle at 60 is indicated below. e g n a r n o e ti g a n t a o r R n io R Note) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clockwise direction.

A

Adjustable Air Cushion B O R E S I Z E 20 3/4 25 1 32 1 1/4 40 1 1/2 50 2 63 2 1/2 Stroke/inch S T R O K E Stroke/Hundredths of an inch S T R O K E STOCK STROKE LIST FOR ALL STYLES SERIES NCG S Y M B O L S R U B B E R C U S H I O N E D B O R E S I Z E S TA N D A R D S T O C K E D S T R O K E M A X I M U M S TA N D A R D S T R O K E 20 1, 2, 3, 4, 5, 6, 8 20 25 1, 2, 3, 4, 5, 6, 8, 10, 12

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Table of Contents

Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.