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Note 2) Use a bushing (part no: 131368) when connecting the R 1/8 pressure gauge to the R 1/16 gauge port. Note 3) Except AR10. Accessory Part No.

Metric size Inch size Series Appearance Class LVW 6 8 10 12 19 1/8" 1/4" 3/8" 1/2" 3/4" 1" 11/4" 25 4 3 1 2 3 4 5 6 7 LQ1 Union reducing LQ3U-R LQ3 LQ3 : B side : A side LVN P.925 LQHB 1 2 3 4 5 6 : A side Union elbow reducing LQ3E-R TL TIL : B side TLM TILM P.926 TD TID 1 2 3 4 5 6 : B side Union tee reducing LQ3T-R TH TIH : C side : A side P.927 Note) : A side tubing O.D.

228 (E4) 1560 (618) 0 Input a 0 Input b a 0 Input b a Input signal range a 0 to 10 V Input signal range a b 1 to 5 V Input signal range a b 10 to 10 V 10 V 1 V 5 V 10 V 10 V 0 to 5 V 5 V 4 to 20 mA 4 mA 20 mA 5 to 5 V 5 V 5 V 0 to 20 mA 20 mA 20 to 20 mA 20 mA 20 mA Regarding AD value In the above graph, 2 AD values are explained as below. 3901 : AD value [Decimal value] (F3D): Offset Binary

(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

Connection thread size (R, NPT) Tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 2) If the fitting is tightened with excessive torque, a large amount of sealant will seep out.

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

) 11 7.5 MY1C (Cam follower guide type) B A (mm) 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A (mm) 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 11 8-11-102 98 Auto Switch Series MY1 Proper Auto Switch Mounting Position (Detection at stroke end) D-Z7, D-Z80 Note) The operating range is a guide

Head side flange style: CQ2G/CDQ2G Without auto switch With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st A B L L1 32 40 50 28.5 53 58 43 48 7 28.5 59.5 64.5 49.5 54.5 7 33.5 77.5 67.5 67.5 57.5 8 Flange bracket material: Carbon steel Double Clevis Style 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st A B CL Without auto

VV4Z1 05 20 1 VP VG Option Thread type 02 2 stations A port F: With foot bracket VP Nil Rc G NPT 00F 20 20 stations R port 00N S070 Rc NPTF 00T VQ P port Rc Bracket is not mounted.

LE-CSB-S;; is MR-BKS1CBL;M-A;-L manufactured by Mitsubishi Electric. LE-CSE-S;; is MR-J3ENCBL;M-A;-L manufactured by Mitsubishi Electric. LE-CSM-R;; is MR-PWS1CBL;M-A;-H manufactured by Mitsubishi Electric. LE-CSB-R;; is MR-BKS1CBL;M-A;-H manufactured by Mitsubishi Electric. LE-CSE-R;; is MR-J3ENCBL;M-A;-H manufactured by Mitsubishi Electric.

Seal Tube Can be used for a wide range of pressures from a low vacuum up to a pressure of 1 MPa. The use of a special profile ensures sealing and reduces resistance when the tube is inserted. Inch size 3 16 1 4 1 8 5 16 ", ", ", ", ", " 3 8 1 2 Body (White) O-ring Connection thread Stud M, R, Rc Effective when piping in a confined space.

port M5, 1/8 Individual EXH 1(P) port 5(EA), 3(EB) port 1/8 M5 x 0.8 VF3000 VV5F3-30 4(A), 2(B) port 1/8, 1/4 Body ported Base mounted VF3;30 VF3;33 2 to 20 5(R), 3(R) port Page 30 Common EXH stations 1/4 1(P) port 1/4 VF5000 VV5F5-20 4(A), 2(B) port 2 to 10 5(R), 3(R) port Common EXH stations 3/8 1(P) port VF5;20 VF5;23 3/8 VV5F5-21 4(A), 2(B) port 5(R), 3(R) port 2 to 15 Common EXH stations

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) q w e r q w e r N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Driver Inrush currents (A0-p) Main circuit power supply (L1, L2, L3) Control circuit power supply (L11, L21) LECSC2-T5 LECSC2-T6 LECSC2-T7 LECSC2-T8 30 A (attenuated to approx. 3 A in 20 ms) 20 A to 30 A (attenuated to approx. 1 A in 20 ms) LECSC2-T9 34 A (attenuated to approx. 7 A in 20 ms) 12 7 13. OPTIONS AND AUXILIARY EQUIPMENT 13.

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator ARM2500-A-02 ARM2500-A-02 ARM3000-A-02 ARM3000-A-02 Regulator 1 o !0 !1 !2 Replacement Parts End plate R 1 Description Material Part No. End plate L 1 No.

)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQ2300 VQ2400 VQ2301 VQ2401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQ2500 VQ2501 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ2A01 VQ2B01 4(A) 2(B) 2(B) 4(A) r 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) VQ2C01 2(B) 4(A) 5(R1) 1(P) 3(R2) Component Parts Component