AW

Model Optional specifications AW10(K) AW20P-270AS AR20P-260S AW20(K) AW30(K) AR40P-270AS AR40P-260S AW40(K) AW40(K)-06 AW60(K) AW60P-270AS Note 6) Bracket assembly Note 1) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AR30P-270AS AR30P-260S Note 7) Set nut G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type Note 2) Standard 0.02 to 0.2 MPa

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

M): 10-SYJ74M-M01 02 DIN terminal (D, Y): 10-SYJ74MD Y01 02 M8 connector (WO): 10-SYJ74M-WO01 02 01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) Max. 10 91.5 84 58 [65] 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 89.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Dimensions: VQZ3000 VV5QZ32 C (35) 34 Station (12) 2n-C6, C8, C10, 02 (7.5) (5.5) 26 C8: One-touch fittings for 8 C6: One-touch fittings for 6 (4) 44.5 Mounting holes Grommet (G) C10: One-touch fittings for 10 02: Rc(PT)1/4 U side DIN rail clamp screw n Manual override 5 A A A A 2 4 B 4 4 4 4 (L4) (L3) 2 L2 L1 3 B 2 2 P=19 B 2 1 SMC B 21 Stations 6 D side 9 9 10.5 10.5 58 37 95 (Single) (

Modular Type Air Filters Series AF

Symbol 10 20 30 40 50 60 Body size Description Metric thread (M5) Rc NPT G Nil Thread type N Note 1) F Note 2) + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 3) Mounting a Without mounting option With bracket + Semi-standard Option Nil C D Float type auto drain b Without auto drain Float type auto drain (N.C.)

KP/KPQ/KPG

KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5

4/5 Port Air Operated Valve Series SYJA3000

10 to 50 (No freezing.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

light 37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2

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,s M8xl A8 U Urethane rubber C Flat with rib 10 . 10 M4xO.7 B4 F Fluorine rubber D Deeptype 13-.13 .!1", 85 MSXO.8 1 ' GN E leclcic NBIllf,1-"'6J B Bellows type M6 x l B6 16. 1 6 .. GS EIecbIC Silicon l'l.bba-(frl-l16) eo> "" 20-;'20 02-2 2~8 ";10 /16 /20 /32 .:,aiSO 04 4 B8 M8 X 1.25 '$'32 ,,~ listO Pad Dia.

SZ3000

PG: Flat cable (20 pins) PH: Flat cable (10 pins) Valve stations F: D-sub connector P: Flat cable connector (26 pins) Symbol 02 Note Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring Note 1) ... ... ... ...

AC Servo Motor Driver (Pulse input type/Positioning type ）

V/4 Mpulses/s) _ _ 0 6 Servo motor-side droop pulses (10 V/100 pulses) (Note 2) _ _ 0 7 Servo motor-side droop pulses (10 V/1000 pulses) (Note 2) _ _ 0 8 Servo motor-side droop pulses (10 V/10 pulses) (Note 2) _ _ 0 9 Servo motor-side droop pulses (10 V/10 pulses) (Note 2) _ _ 0 A Feedback position (10 V/1 Mpulse) (Note 2) _ _ 0 B Feedback position (10 V/10 Mpulses) (Note 2) _ _ 0 C Feedback

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil assembly with terminal part no. Coil no.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

3 Port Air Operated Valve Series SYJA300

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

JXCx-OMT0023

Rated voltage AC[V] C[ F] R[ ] Test voltage AC[V] Outline drawing [Unit: mm] Vinyl sheath 200 0.5 50(1W) Across 18 1.5 Blue vinyl cord Red vinyl cord T-C 1000 (1 to 5s) 6 10 or less 10 or less 10 3 10 3 4 15 1 31.5 1 200 48 1.5 200 or more or more Note that a diode should be installed to a DC relay, DC valve or the like.

Silencer Series AN

Fitting Connection Series AN10 to 30-C RoHS How to Order 10 C AN 20 Applicable one-touch fitting size Body size Symbol Port size Applicable model AN10 AN10 AN15 AN20 AN20 AN30 Symbol 10 15 20 30 06 07 08 10 11 12 6 1/4 8 10 3/8 Connection type 12 Symbol Connection type C One-touch fitting connection Specifications Fluid Compressed air Max. operating pressure Note 1) 145psi (1.0 MPa) Noise

LEC-OM07605CN

[V] 10 [pulse] 0 0 10 [pulse] -8 [V] -10 [V] CW CW CCW 16 (4) 17 (10V/128) 10 [V] 8 [V] -128 [C] 0 128 [C] 0 -10 [V] -8 [V] CW 1. 2. () 3. 4.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note Note Symbol 02 Symbol 02 2 stations 2 stations Note 1) Connector mounting position Double wiring specification Double wiring specification ... ... ... ... ... ... ... ... 10 02 11 02 11 stations 10 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout Note 2) Specified layout (up to 22 solenoids possible) (up to 21 solenoids possible) 20 20 20 stations 20

2-Color Display Digital Flow Switch Series PFM

A B A B 4 (5/32") 10.1 8.1 4 (5/32") 10.1 36.1 6 10.3 8.3 6 10.3 36.3 8 (5/16") 12 10 8 (5/16") 12 37 1/4 10.3 8.3 1/4 10.3 36.3 PFM S-01/02--X693 PFM S-01/02--X694 7 5 7 5 10.2 10.2 (34.2) 43 1 43 1 A PFM A 51.5 (Max. 58.5) 51.5 (Max. 58.5) PFMV IN OUT 3 (34.2) PF2A 13 3 13 PF2W PF2D C 18 C 18 OUT IN B 48 20 20 48 B IF 2 x 3.4 2 x 3.4 C (Width across flats) C (Width across flats) A B A B

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

When the zero cut-off function is set to 0, the flow rate display value starts from 0 L/min., but in conditions other than horizontal installation and supply pressure of 0.35 MPa, the output may not be 0 L/min. 13 E F G PF2M701/02/05 /10/50/11/21(-L) PF2M725(-L) Voltage output (0 to 10 V)*1 0 V 0.10 V 0.12 V 10 V Output Output C G D H B F A E 0 0 Min. value of Flow Zero cut-off Max. value