JXCx-OMY0004

Turn ON when transmitting numerical data to the controller. (7, 8, 9) 4 0 Start flag 1-7. (Unused) Set always OFF(0) 5 0-1. Movement mode 1: ABS (Absolute) 2: INC (Relative) (7, 10) 2-7.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(-F) M plug connector (M): 10-SYJ72M-M-01 (-F) DIN terminal (D, Y): 10-SYJ72MD Y-01 (-F) M8 connector (WO): 10-SYJ72M-WO-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 57.5 Max. 10 16.1 46.2 M8 x 1 31.1 36 18.5 42.6 [49.6] Approx. 300 (Lead wire length) Pg7 80.5 [82.7] 70.7 [72.9] 90.5 89.6 72.2 65.7 49.7 23.5 10.9 23.5 10.9 23.5 10.9 23.5 10.9 21 21

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details regarding different conditions

HRX-OM-S010

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Keep this operation manual accessible for reference. 7 - 2.2 Product configuration The product configuration of this controller is as follows.

Micro Mechanical Valve Series VM1000

Red VM131-01-35RA VM151-01-35RA VM131U-01-35RA VM151U-01-35RA VM133-M5-35RA VM153-M5-35RA Black VM131-01-35BA VM151-01-35BA VM131U-01-35BA VM151U-01-35BA VM133-M5-35BA VM153-M5-35BA Green VM131-01-35GA VM151-01-35GA VM131U-01-35GA VM151U-01-35GA VM133-M5-35GA VM153-M5-35GA Yellow VM131-01-35YA VM151-01-35YA VM131U-01-35YA VM151U-01-35YA VM133-M5-35YA VM153-M5-35YA Note 1) It is possible

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-M091

(Request)[STX] 01WSV100258 [ETX] [5Ch] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message SV1 Circulating fluid set temperature [06h] BCC value 00258 Write information (25.8 oC) [5Ch] BCC value 5.8 Command explanation HRS Series 5-18 HRX-OM-M091 Chapter

HRX-OM-Q033

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

Valve Single Unit

How to Order Valves 5 L N SX 5 1 20 01 Thread type Series A, B port size Nil Applicable series Rc Symbol Port size M5 x 0.8 3 SX3000 5 SX5000 G F M5 One-touch fitting for 4 C4 N 7 SX7000 NPT SX3000 One-touch fitting for 6 C6 NPTF T Type of actuation 1 8 01 1 2 position single One-touch fitting for 4 C4 Rated voltage SX5000 2 2 position double One-touch fitting for 6 C6 5 24 VDC 6 12 VDC 3

HRX-OM-X071

Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm contents, causes, and troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check

Tamper Proof and Flat Head Screw

-01ST 20.4 27.5 1/8" 8.4 4 9.3 5/32" 9.3 20.4 27.5 12.7 14.3 AS221F-N01-03ST AS221F-01-06ST 14.2 7 35.6 11.6 R 1/8 12 1.5 13.5 6 32 3/16" 11.4 23.1 30.2 14.3 16.5 AS221F-N01-05ST AS221F-01-08ST NPT1/8 12.7 14.2 7 35.6 1.5 32 15.2 25.3 18.5 32.4 8 AS221F-N01-07ST AS221F-01-10ST 15 1/4" 13.2 23.9 31 18.5 18.5 21 33.1 40.2 10 AS221F-N01-09ST AS221F-02-04ST 5/16" 15.2 25.3 32.4 15 21 10.4 16

JXCx-OMY0008

Turn ON when transmitting numerical data to the controller. (7, 8, 9) 7012h 0 Start flag 1-7 (Unused) SET always OFF(0) Index 7020h: Operation Method Index Bit Signal name Description 7020h 0-1 Operation Method 1: ABS (Absolute) 2: INC (Relative) (7, 10) 2-7 (Unused) SET always OFF(0) Index 7021h: Speed Index Bit Signal name Description Input range Min. unit 7021h 0-15 Speed 1 to Basic parameters

HRX-OM-R028

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication

JXCx-OMY0006

Turn ON when transmitting numerical data to the controller. (7, 8, 9) 0 Start flag 2 1-7 (Unused) Set it always OFF(0) 8-9 Movement mode 1: ABS (Absolute) 2: INC (Relative) (7, 10) 10-15 (Unused) Set it always OFF(0) Word3: Speed Word Bit Signal name Description Input range Min. unit 3 0-15 Speed 1 ~ Basic parameters "Maximum speed" (7, 11) 1 mm/s Word4, 5: Target position Word Bit Signal

VZ5000

) 01 02 01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01 02 MAX. 10 Applicable cable O.D. 3.5 to 7 3-3-71 Series VZ5000 2 Position Double VZ5240 Grommet (G), (H) VZ5240G H 01 02 Manual override (Non-locking) (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm (PE port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) 2-Rc 1/4 (5(R1), 3(R2) port) L

KP/KPQ/KPG

KPQY12-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 K 10 10

JXCx-OMT0005CN

B RESET >+JOG (01-052) >+B RESET 65 - 112 12 0 2 3 4 5 6 7 Alarm _Comment _058 (01-058) 3A B RESET No.base PLC <> 1 1ABS 2INC 2PLC 2 14.2[2] (P.54) Alarm _Comment _061 (01-061) 3D B RESET <>+ <>+Alarm _Comment _062 (01-062) 3E B RESET <> (01-096) C RESET <> (01-097) <> C RESET <> <>OFF JOG OFF (01-098) OFF DRV C RESET <>ON SVRE ON DRIVE ON (01-099) <> SET OFF

Base Mounted Metal Seal/Rubber Seal Series VQ

SI unit output and coil numbering 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.