Type: General-Purpose/Standard Pressure Gauge, Maximum Indicated Pressure(Mpa): 1, Outer Diameter(φ): 57, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/8, Option: None, Size: 57, Transparent cover material: Polycarbonate, Special Configurations: None, Attachment: Clear cover has protrusion. (Clear cover is removable). The wrench flats protrude., Unit

21

1.5 FX Effective thread length 2 x FL FZ FT S + Stroke F 40 Boss-cut 40 20 to 32 ZZ + Stroke Rod Flange (F) (mm) A 14.5 AL 12 B 34 B1 13 B2 26 C2 30 D 8 E 20 F 13 FD 7 FL 10.5 FT 4 FX 60 FY FZ 75 G 6 H 31 H1 5 H2 8 Bore size 0 0.033 0 0.033 0 0.033 0 0.039 20 25 32 40 17.5 15 40 17 32 37 10 26 13 7 10.5 4 60 75 6 34 6 8 17.5 15 40 17 32 37 12 26 13 7 10.5 4 60 75 8 34 6 8 23.5 20.5 52

Display Pressure: 7 (0.7MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 7 (0.7MPa), Connection Thread: 02 (R 1/4), Grade: SRB (General Degreasing, Production Line), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Type: -, Maximum Indicated Pressure(Mpa): -, Outer Diameter(φ): -, Shape: Back side thread, Maximum Indicated Pressure: 0.7 MPa, Connection screw: R 1/4, Option: None, Size: 57, Grade: Parts: precision cleaning; Assembly: clean room M5.5 (class 10,000), Transparent cover material: Polycarbonate (Hard coated), Attachment: Clear cover has protrusion. (Clear cover is removable). The wrench flats

Display Pressure: 0.7MPa, Connection Thread: R 1/4, Grade: General Degreasing, Production Line, Attachment: Clear Cover Removable, Wrench Tighten

17

5 w @7 !1 !7 !8 !9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

Fluoropolymer Piping Equipment

8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1/2" x 3/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 3/4" x 5/8" 3/4" x 5/8" 1/4" x 5/32" 1/4" x 5/32" 1/4" x 5/32" 1/2" x 3/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/4" x 5/32" 3/8" x 1/4" 1/8" x 0.086" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/8" x

Electric Actuator

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

X6 11-7-32 to 11-7-51 Shaft, Bolt, Parallel key stainless spec.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

on page 11-7-24.

High Vacuum Angle Valve

Refer to maintenance parts 7-1 7-2 8 9 Refer to part no.

Series SY3000/5000 Valve Replacement Parts 1 How to Order Port Block Assembly Mounting screw 0V 6A SY One-touch fitting Series Thread type 3 3000 Nil Rc 5 F 5000 G N NPT T NPTF Pilot type ∗ Except M5 Nil Internal pilot R External pilot A, B port size Thre

Series SY3000/5000 Valve Replacement Parts 1 How to Order Port Block Assembly Mounting screw 0V 6A SY One-touch fitting Series 3 5 Thread type Nil F N T 3000 5000 Rc G NPT NPTF Pilot type Nil R A, B port size Thread piping Symbol Port size M5 01 Except M5 Internal pilot External pilot Option for mounting Nil 1 Applicable series SY3000 SY5000 M5 x 0.8 1/8 Standard (Valve mounting screw not

Aluminum High Vacuum Angle Valve

Refer to maintenance parts 7-1 7-2 8 9 Refer to part no.

Table of Contents

LJ1-7-G DVO P0820 Only series LJ1 H S10 has the T-nuts built into the body. LJ1-7-R MR-RB013 Non-standard Motor Cables LJ1-7-Y JUSP-RG08 These are cables for connecting non-standard motors and drivers. Cable lengths other than those shown below should be arranged by the customer.

Vacuum gripper

9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B

Vacuum Gripper

10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-

Vacuum Gripper

10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16

Vacuum Gripper

ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover Removable, Wrench Tighten, Option: Nickel Plated