5 Port Solenoid Valve

M5 external pilot port Direct EXH outlet with built-in silencer 1 2 3 4 5 6 7 8 n Stations D side U side DIN rail clamping screw 3 2 B 1 23.5 (12) Plug-in Manifold Stacking Base 13.8 4 A 8.2 4.9 8.5 (7.5) 7.3 (n-1) x 8.5 2n x C2, C3, C4, N1, N3 (4(A), 2(B) port) C2: 2 one-touch fitting C3: 3.2 one-touch fitting C4: 4 one-touch fitting N1: 1/8" one-touch fitting N3: 5/32" one-touch fitting

Compact 5-Port Solenoid Valve

C2: 2 (SMC) C4: 4 (SMC) 9.1 (C6) 10.3 (C2, C4) D D 3/5 B 2 E 3/5 B 2 B 2 B 2 E B 2 27 (C2, C4) 25.8 (C6) A 4 A 4 A 4 1 P P 1 4 A 4 A S (Pitch of C2, C4) P = 6.5 One-touch fitting [1(P), 3/5(E) port] Applicable tubing: 8 (SMC) (Pitch of C6) P = 9 * Refer to page 97 for dimensions of external pilot and built-in silencer. * Refer to pages 65 to 68, 79, and 80 for dimensions when L6, b, and

Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 0.4MPa, Connection Thread: R 1/4, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Removable, Wrench Tighten

Size: 42.5 O.D., Display Pressure: 0.4MPa, Connection Thread: NPT 1/8, Clear Cover Material: Polycarbonate, Attachment: Clear Cover Removable, Wrench Tighten, Option: -

Size: 46 (42.5 O.D.), Display Pressure: 4 (0.4MPa), Connection Thread: N01 (NPT 1/8), Clear Cover Material: Polycarbonate, Attachment: C2 (Clear Cover Removable, Wrench Tighten)

A_HEC-OM-K001

3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function . 3-6 Chapter 4 Installation . 4-1 4.1 Installation, Transport and Transfer . 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.1.4 Installation . 4-2 4.2 Piping . 4-3 4.2.1 Preparation of Facility Water . 4-4 4.2.2 Preparation of Recirculating

SMC offers a variety of pressure gauges including general purpose, oil-free/external parts copper-free with limit indicator, clean series and a pressure gauge with a pressure switch.  Pressure ranges vary from 0 to 1.5MPa, depending on the selected gauge.  Panel mounting is possible.General purpose gauge w/limit indicator , Back or vertical side thread , Indication precision: ±3% F.S. (full

7.5

assembly (Elbow type) SJ3000 4(A) 2(B) KJL07-C2 1/4" one-touch fitting assembly (Elbow type) KJL04-C2 4 one-touch fitting assembly (Elbow type) KJW01-C2 1/8" one-touch fitting assembly (Long elbow type) KJL06-C2-N 6 one-touch fitting assembly (Elbow type) KJW03-C2 5/32" one-touch fitting assembly (Long elbow type) KJW02-C2 2 one-touch fitting assembly (Long elbow type) KJW07-C2 1/4" one-touch

Table of Contents

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

7.4

2 x 1/8 1(P) port = Thread type 9 (With One-touch fitting) 10.2 39.7 Stations 1 2 n D side U side 3 4 5 6 7 8 Grommet 300 (Lead wire length) 51.4 43 50.3 (Single solenoid) 72.8 (Double solenoid dual 3-port) 81 (Closed center) B 2 B 2 20 14 A 4 A 4 14.6 2n x C2, C3, C4, M5, N1, N3 <4(A), 2(B) port> 5 C2: 2 One-touch fitting C3: 3.2 One-touch fitting C4: 4 One-touch fitting M5: M5 thread

CRB2/CRBU2/CRB1

D2 J K T J K T J K T Size C2 Y = 50 4 to 39.5 Y3 3 to 11.9 C1 L2 = 50 3 to 11.9 X3 4 to 39.5 63 Y3 3 to 14.9 4 to 45 63 3 to 14.9 X3 4 to 45 D2 = L1 = C2 = C 80 Y3 3 to 16.9 4 to 53.5 80 3 to 16.9 X3 4 to 53.5 X = 100 Y4 3 to 24.9 5 to 65 100 3 to 24.9 X4 5 to 65 80 Simple Specials Series CRB1 Axial: Top (Long-shaft side) Axial: Bottom (Short-shaft side) Symbol: A45 Symbol: A46 The short

ZP

nylon tubing M-5AN-4 N6 For 6 nylon tubing M-5AN-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 E Model A B C2 D E Vacuum inlet direction q Pad dia.

Air Cylinder Series CM2

5.5 (3) 0 () 1 () 1.5 (0) 2.5 (0.5) 5 (3) 6 (4) 9.5 (7) 0 () 10.5 (8) 0.5 () 3 (1) 4 (2) 6 (4) 7 (5) CJP 20 6.5 (4) 5.5 (3) 0 () 1 () 1.5 (0) 2.5 (0.5) 5 (3) 6 (4) 9.5 (7) 0 () 10.5 (8) 0.5 () 3 (1) 4 (2) 6 (4) 7 (5) CJ2 25 7.5 (5) 6.5 (4) 1 (0) 2 (0) 2.5 (0.5) 3.5 (1.5) 6 (4) 7 (5) 10.5 (8) 0.5 (0) 11.5 (9) 1.5 (0) 4 (2) 5 (3) 7 (5) 8 (6) CM2 32 40 11.5 6 7 13.5 7.5 8.5 11 12 15.5 5.5 17.5

SJ3A6

assembly (Elbow type) SJ3000 4(A) 2(B) KJL07-C2 1/4" one-touch fitting assembly (Elbow type) KJL04-C2 4 one-touch fitting assembly (Elbow type) KJW01-C2 1/8" one-touch fitting assembly (Long elbow type) KJL06-C2-N 6 one-touch fitting assembly (Elbow type) KJW03-C2 5/32" one-touch fitting assembly (Long elbow type) KJW02-C2 2 one-touch fitting assembly (Long elbow type) KJW07-C2 1/4" one-touch

5 Port Solenoid Valve Series SV1000/2000/3000/4000

(Pitch) With External Pilot Specifications P=10.5 13.5 46.7 22.3 11.8 18.1 8.4 10 12.6 23 29.2 28.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 45.5 5 3 E 5 3 E 5 3 E 5 3 E 52.7 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 59 P 1 P 1 C2 P 1 P 1 C2 PE PE One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32

Air Cylinder

4 !2 !3 !4 !1 !0 !4 !4 Air-hydro With air cushion !4 !4 With Rubber Bumper/With Air Cushion Replacement Part: Seal Component Parts No.

Micro Mechanical Valve Series VM1000

EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.