3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) When specifying more than one option, indicate them alphabetically. 1.12-55 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 VV5QZ25C C Station Port size 33 (11) Grommet(G) (35) 25 (7.5) C6: One-touch fitting for 6 C4: One-touch fitting for 4 01: Rc(PT)1/8 2n-01, C4, C6 11 11.8 7.4 25.5 Mounting holes (5.5) U Side n B 2 A 4 5 Manual override 4 (L4) (L3) L1 L2 3 P=16 21.7 2 P=16

Flow Control Equipment

Retainer prevents accidental loss of needle Air Flow/Effective Area Optional: Hexagonal lock nut, Nickel plated option AS22l1F-01 AS23l1F-01 AS22l1F-02 AS23l1F-02 AS32l1F AS33l1F AS42l1F AS43l1F AS12l1F-M3 AS13l1F-M3 AS12l1F-M5 AS13l1F-M5 Model Metric size 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tube O.D. 1/8", 5/32" 1/8", 5/32" 1/8", 5/32" 3/16", 1/4", 1/4", 5/16", Number

4/5 Port Air Operated Valve Series SYJA3000

Manual override 55 1/8 2-1.8 (Bleed port) With fiflter (80 mesh) 40 25.5 (Piping port) 20 12 11.5 R1 R2 P 18 22 22 1/4 2-1.8 (Bleed port) 63 27.2 (R1, R2 port) With fiflter (80 mesh) 1/8,1/4 (P, A, B port) 3 position closed center/exhaust center/pressure center SYJA7 20-01 3 position closed center/exhaust center/pressure center SYJA7 403 4 5 2-4.3 (For mounting) 3 4 5 01 02 2-3.2 35 34 8.5

Series KP/KPQ/KPG

KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10

Series KP/KPQ/KPG

KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10

3 Port Solenoid Valve Metal Seal Series VZ200 1

Rc 1/8 C6, C8 C6, C8 Rc 1/4 VZ415VZ425Base mounted (Without sub-plate) VVZ400-32A-2 VVZ400-31A-2 VP Port size Rc 1/4 VZ412-01 VZ422-01 Body ported Applicable valve model VG Blanking plate VVZ400-31A-1 VVZ400-32A-1 VP VV3Z4-50-061-C8 Screws and Gasket Assembly Part No.

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) M5 VF1;20-;;1-M5 5(EA), 3(EB) M5 4(A), 2(B) 1/8 VF1;20-;;1-01 5(EA), 3(EB) M5 VF1;3;-;;1-M5 VF1000 4(A), 2(B) M5 VF1;3;-;;1-01 4(A), 2(B) 1/8 1(P), 5/3(R) 1/8 Type 30 manifold base 1(P) 1/8 Type 31 manifold base 5(EA), 3(EB) M5 Applicable tubing O.D.

JXCx-OMT0005CN

B RESET >+JOG (01-052) >+B RESET 65 - 112 12 0 2 3 4 5 6 7 Alarm _Comment _058 (01-058) 3A B RESET No.base PLC <> 1 1ABS 2INC 2PLC 2 14.2[2] (P.54) Alarm _Comment _061 (01-061) 3D B RESET <>+ <>+Alarm _Comment _062 (01-062) 3E B RESET <> (01-096) C RESET <> (01-097) <> C RESET <> <>OFF JOG OFF (01-098) OFF DRV C RESET <>ON SVRE ON DRIVE ON (01-099) <> SET OFF

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

SFOD-OMT0005CN

(PLC ) Alarm _Comment _061 (01-061) <> (1) ()1(ABS)2(INC) (2)PLC 15ms(30ms) 13.2[2](P.53) 3D B RESET (+)(-) Alarm _Comment _062 (01-062) (+)(-) 3E B RESET <> (01-096) C RESET <> -64- (01-097) <> C RESET <> <>OFF JOG OFF (01-098) OFF DRV C RESET <>ON (SVRE ON) DRIVE ON (01-099) <> SET OFF DRV C RESET <> <>12 (01-103) C RESET 1 [] A [a ] 2 [SW] [] A [a ] <> <>

LEC-OM02704CN

[0] 1EA5 4 (2) ([8][4][8][5]) [8][4] [0][1][F][F] 8 [8][5][0][0] [8][5][0][0] (16)10 [8][5] [0][0] 0(PA) 0001(PB) 0002(PC) 0003(PD) 03 4 (3) ([9][2]) [9][2] [6][0] 14.5.5 8 [6][1] (4) ([8][2]) [8][2] [2][0] 1EA5 4 (5) ([8][2]) [8][2] [0][0] 1EA5 4 (6) ([C][0]) [C][0] [0][1][F][F] 9 8 (16)10 9 14 15 14 (7) ([C][6]) [C][6] [0][1][F][F] 0 8 (16)10 (8) ([C][7]) [C][7] [0][1][F][F]

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Attachment: None, Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 4 (0.4MPa), Connection Thread: 02M (R 1/4, M5 Female)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

Speed Controller with Indicator

A L5 D2 L2 L1 T H (Width across flats) Metric Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS231FS1-01-23 (S) 3.2 13.3 24 17.5 36 43.9 42.4 40.8 39.3 13.3 20 15 14 AS231FS1-01-04 (S) 4 8.2 13.9 25.1 AS231FS1-01-06 (S) 6 10.4 26.2 20.4 38.8 15 AS231FS1-01-08 (S) 8 13.2 10.2 16.4 30.1 21.5 40 14.2 16 AS231FS1-02-04 (S) 4 7.2 9.6 12 1/8 13

0.

Port size [2(A) port] VQZ200 VQZ300 p p p p p Port size Symbol C4 C6 C8 C10 01 02 CM Note 1) 4 one-touch fitting 6 one-touch fitting 8 one-touch fitting 10 one-touch fitting Rc 1/8 Rc 1/4 Mixed port sizes p p p p p Kit type C Connector Note 1) Specify port mixture/with port plug by means of the manifold specification sheet.

OMS0020

How to order L E C C G 1 L Cable length K 0.3m L 0.5m 1 1m ii. Dimensions 39 (3) Cable between branches (between the branch connectors) i. How to order L E C C G 2 L Cable length K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 40 8.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port Type SS5YJ7-21P-01 1/4 1/4 1/4 2.1 1.4 1.8 0.36 0.32 0.37 0.55 0.36 0.50 2.3 2.1 2.1 0.26 0.24 0.20 0.54 0.50 0.50 1/8 C6 C8 Body ported Type SS5YJ7-21P-C6 SYJ723 for internal pilot Type SS5YJ7-21P-C8 Note) Value at manifold base