JXCx-OMY0008

When an alarm is generated, deactivate the alarm after troubleshooting and correcting the error with reference to chapter "15.2 Alarms and countermeasures" (P.61). Alarms are divided into two types. One is an alarm group B to D which can be cleared by turning ON RESET.

1.1

) a 94.5 b c 105 d 330 e 480 f 640 g 265.5 h 315.5 i 480 j Model HRG001-A HRG001-W HRG002-A HRG002-W HRG005-A HRG005-W HRG010-A HRG010-W HRG015-A HRG015-W 61 61 94.5 334 105 330 480 640 265.5 315.5 480 61 94.5 105 330 480 640 265.5 315.5 480 61 94.5 334 105 330 480 640 265.5 315.5 480 153 298 398.5 451.5 135 625 741 153 298 398.5 451.5 135 325 625 741 242 342 402 452 115 230 400 560

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

EXxx-OMY0006CN

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

Prevents Micro-Bubbles

Dimensions LLCA--C Stations 4-Mounting hole for W Y A K D L3 L2 L1 (Max.

High Purity Chemical Valve

Dimensions LLCmA-mm-C Stations 4 x Mounting hole for W Y A K D L3 L2 L1 (Max.

Step Motor Controller (Servo / 24 VDC)

Posn failed (1-149) D SVON Input *1) The connection with the higher-level devices (such as the PC and teaching box) is disconnected. RESET Ctrl Comm ALM (1-150) D SVON Do not remove the cable during operation by the controller setting kit or teaching box. Input *1) Abnormality in communication with the encoder.

Step Motor Driver （ Pulse input type ）

Automatic pulse reference detection . 61 11.1 The meaning of automatic pulse reference detection . 61 11.2 Operation procedure using automatic detection function . 61 11.3 Automatic pulse reference detection OFF . 62 12. Alarm Detection . 64 12.1 Parallel output for the alarm group . 64 12.2 Alarm details . 65 13.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT A One-touch fitting d Part No. A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail AXT100-DR-l 12.5 (Pitch) 5.25 7.5 VQ Enter suffix number into l from the table below.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

LPush-locking slotted style [D] While pressing, turn in the direction of the arrow. If you do not turn, the mechanism does not lock in position.

ZR

ZR1D1 D2 D3 10.2 SMC PRESURRE SWITCH RESET SET Attachment D Digital pressure switch Suction filter 71.3 (73.3 for D2, D3 types) 81 SMC 61 PV PD Filter block D 78.8 3 Note) 1 Dimensions for mounting bracket A 2 Dimensions for mounting spacer A Bracket A part no. : P3270153 (Standard accessory) Spacer A part no. : P3270156 13-3-19 19 Series ZR Suction Filter: ZR1-FX Specifications ZR1-FX

Speed Controller with Uni One-touch Fitting AS Series

AS-D Bore size AS-T U01 Uni Uni Uni Uni 1 8 1 4 3 8 1 2 U02 U03 U04 ASP ASN Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Electric Actuator Triple Axis P&P Unit

Dimensions (reference drawing for assembling) 12 6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31 4H10depth5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5

ZQ-OM01401

Q1 5 4 () 1) () Q2 1)+COM (4) 7) (2)1U (3)J1,J2, Q2 (11) (P ) L L 0.3m 0 (M5x0.8) LO L 2 4 3 6 (5) 5 4 2) B (12) (2):1U 2)(3)Q1 8) (3)Q2 Assy N C 3) ) (6) ( D [kPa] (2):3M EA NPN2 9) 8) (PD) EB PNP2 0 to -100 EC NPN1 + S EE PNP1 + C FA NPN2 D FB PNP2 -100 to 100 8)VQ100 Ass yP.41 FC NPN1 + FE PNP1 + (3)Q2 (4)LO 9)(3)J1,J2Q2 P.6 (3)C 4) F 3) ZFC 4

energy saving effect

60 61 Waterproof specification IPX4 Accessories Alarm code list stickers 2 pcs.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to page 17-6-3 for Safety Instructions and 17-5-59 to 17-5-61 for High Purity Chemical Valve Precautions.

Slide Unit Series CX2/CXWM/CXWL

and D-A8. ( mm) Note 1) The dimensions show D-A7 and D-A8. ( mm) Hw 23 Hs 12.5 Ht 15 Hw 23 Ht 15 Hv 10.5 Auto switch model Auto switch model D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C D-F7LF

Slide Unit Series CX2/CXWM/CXWL

and D-A8. ( mm) Note 1) The dimensions show D-A7 and D-A8. ( mm) Hw 23 Hs 12.5 Ht 15 Hw 23 Ht 15 Hv 10.5 Auto switch model Auto switch model D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C D-F7LF

V

Y P E 41 S I D E P O R T E D M A N I F O L D.

CRB2/CRBU2/CRB1

, D-R80, D-T79.