3 Position Cylinder Series RZQ

3 Position Cylinder 2-stage stroke enabled with a small increase in length Provides intermediate stop mechanism Overall length of cylinder tube RZQ First-stage stroke Additional cylinder tube length Full stroke CDQ2 Overall length of cylinder tube Series RZQ 32, 40, 50, 63 Comparison of cylinder tube overall length (mm) Full stroke = 300 mm (150 + 150 = 300 mm in case of CG1BN) CG1BN150

RZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Additional cylinder tube length Full stroke RHC CDQ2 MK(2) RS Q G Overall length of cylinder tube RS H A Comparison of cylinder tube overall length (mm) RZQ Full stroke = 300 mm (150 + 150 = 300 mm in case of CG1BN) MI W S CG1BN150+150-XC11 Dual stroke

MXU

Note 3) ( ) in column W is the dimensions of D-A93.

Free Mount Cylinder for Vacuum Series ZCUK

Note 4) Figures in ( ) in the table W are D-A93. (mm) Operation Range 20 Bore size Auto switch model 10 6 16 9 25 12.5 32 14 D-A9, A9V D-M9, M9V D-M9W, M9WV 11 7 4 5 7 7 Since this is the average value at a normal temperature including hysteresis (tolerance 30%), it is not guaranteed.

ZCUK

Note 4) Figures in ( ) in the table W are D-A93.

MXU

Note 3) ( ) in column W is the dimensions of D-A93.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

: 0.5 mNil (Example) A93 3 m L (Example) A93L PLC: Programmable Logic Controller Refer to page 889 for the applicable auto switch list. 778 MXS 1322Air Slide Table Specifications 6 8 12 16 20 25 Bore size (mm) Air Fluid Double acting Action 0.15 to 0.7 MPa Operating pressure 1.05 MPa Proof pressure 10 to 60C (No freezing) Ambient and fluid temperature 50 to 300 mm/s Piston speed Rubber bumper

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

S 8 50, 100, 150, 200, 250, 300 "n" pcs. n 12 50, 100, 150, 200, 250, 300, 350, 400 Auto switch type Adjuster option Nil Without auto switch (Built-in magnet) Nil Rubber stopper B Shock absorber Metal stopper C One side centralized piping, switch rail Only for MXY12 One side centralized piping, with switch rail Nil Without one side centralized piping, without switch rail N The auto switch

SMC Pneumatic Clean Series

Applicable models D-A73, A73H, A73C, C73, C73C, E73A, Z73, R73 D-97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) However, when using a 2 color indication auto switch (DA79W, A59W, B59W), be aware that the switch will constantly remain ON if the connections are reversed.

Slit Valve XGT Series

For 200 mm wafer For 300 mm wafer 529

Pin Clamp Cylinder Series CKQ/CLKQ

Indicator light Lead wire Flexible fluorine resin heavy-duty cable, 6, 0.5mm2, 2 cores, 300 mm Impact resistance Switch part : 1000 m/s2, Connector part : 300 m/s2 Insulation resistance 50 M or more at 500 VDC (between lead wire and case) Withstand voltage 1000 VAC for 1 minute (between lead wire and case) Ambient temperature 10 to 60C Enclosure IEC529 standard IP67, JIS 0920 Watertight

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

circuit 3-wire (PNP) M9PAV*1 M9PA*1 M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 M9BAV*1 M9BA*1 v v V v v Grommet Water resistant (2-color indicator) With diagnostic output (2-color indicator) 4-wire (NPN) 5 V, 12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V A72 A72H V V Grommet 100 V A93V*2 A93

Round Type Hydraulic Cylinder

CHQ CHK CHN Mounting correctly Mounting incorrectly CHM CHM CHS Solid state D-M9N, M9P, M9B, M9NV, M9PV, M9BV D-M9NW, M9PW, M9BW, M9NWV, M9PWV, M9BWV D-M9NA, M9PA, M9BA, M9NAV, M9PAV, M9BAV Reed D-A90, A93, A96, A90V, A93V, A96V CH2 Aporox. 10 to 15 CHA Figure 1.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

127 128 129 130 145 147 148 149 150 155 157 158 159 160 Guide pin diameter Round type Diamond type Applicable hole diameter of workpiece Guide pin shape Round type, Diamond type For 20 For 25 For 18 17.5 17.7 17.8 17.9 18.0 19.5 19.7 19.8 19.9 20.0 24.5 24.7 24.8 24.9 25.0 Symbol 175 177 178 179 180 195 197 198 199 200 245 247 248 249 250 For 30 29.5 29.7 29.8 29.9 30.0 295 297 298 299 300

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Vertical Mounting L W Mounting orientation W L Maximum speed (mm/s) Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 800 All strokes Stroke (mm) (1) (2) (3) 8 Selection graph (4) (5) (6) (7) 12 to 40 Horizontal Mounting W W Mounting orientation L Direction for L can be up, down, left, right, or diagonal.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes Bore size [mm] Standard stroke [mm] Note 1) Long stroke [mm] Note 2) 40 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500 800 Refer to pages 18 to 23 for cylinders with auto switches. 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500, 600 1200 Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

Bore size (mm) Standard stroke (mm) Note 1) Long stroke (mm) Note 2) Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at stroke end) and mounting height Operating range Auto switch mounting bracket/Part no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600

Rotary Cylinder Series MRQ

Applicable model: D-A73, A73H, A73C, C73, C73C, E73A, Z73 D-R73, R73C, 97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed.

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80: 1400 100: 1500 Refer to pages 19 to 23 for cylinders with auto switches. 80, 100 Intermediate strokes not listed above are produced upon receipt of order.

Plate Cylinder: Double Acting, Single Rod ø25, ø32, ø40, ø50, ø63 Series MU

300 Other intermediate strokes can be manufactured upon receipt of order.