Table of Contents

-02 AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800

VQZ1000/2000/3000

Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VQZ2121-C6 800 700 600 500 400 300 200 100 0 VQZ3121-C6 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

00-A-5 0 0 200 400 600 800 1000 1200 1400 VQ45 (Plug lead type) B ARBQ4000-00-B-5 Flow rate (l/min(ANR)) P ARBQ4000-00-P-5 ARBQ4000-00-P (P B) 0.7 Outlet pressure (MPa) 0.6 SMC 0.5 0.4 0.3 0.2 50 147 0.1 0 0 200 400 600 800 1000 1200 1400 B 2 SMC Flow rate (l/min(ANR)) 12 1 P 5 3 R2 R1 Pressure Characteristics 59 PE 4 A Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate

CE

screw (M3 x 0.5 x 10l ) Switch spacer Switch mounting nut Data 50 25 to 600 BQ-2 63 25 to 600 Please contact SMC regarding non-standard strokes.

ZSE2/ISE2

: ZSE2-0R Grommet type: ZSE2-0R-15 Connector type: ZSE2-0R-15C Pressure setting trimmer Indicator light (Red) Pressure setting trimmer Indicator light (Red) H SET L H SET L 15 15 9 9 2-M2.5 x 41L Mounting thread 25 2-M2.5 x 41L Mounting thread 25 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6

Digital Flow Switch

Hysteresis*6 Variable from 0 Protection Over current protection Switch output Analog output*7 Output type Voltage output: 1 to 5 V (0 to 10 V can be selected*8), Current output: 4 to 20 mA Impedance Voltage output Output impedance: Approx. 1 k Current output Maximum load impedance: Approx. 600 Response time*9 Linked with the response time of the switch output.

3

Expanded flow range Compact, Space saving Wide range of flow measurement with one product Compared with the current PF2A, Flow ratio 78 % reduction Weight 74% reduction 100:1 Mounting space 1100 g a 240 g Compared with PFMC7202-06 and PF2A703H-10 Rated flow ratio is 10 : 1 for current PF2A. 2000 L type 55 Applicable flow range [L/min] PFMC7202 New 1 2 5 10 20 25 50 100 150 200 300 500 600

Power Valve: Economy Valve Series VEX5

900 1000 700 600 500 400 300 200 100 0 E 800 900 1000 700 600 500 400 300 200 100 0 F 800 900 1000 700 600 500 400 300 200 100 0 G When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 784 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Connector type: ISE2-15C Grommet type: ISE2-15 01 T1 01 T1 Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 Indicator light (Red) Indicator light (Red) 20 20 600 (3000) 600 (3000) ZSE ISE ZSP

5 Port Solenoid Valve

Symbol Length Nil 3 6 10 150 mm 300 mm 600 mm Part no. 1000 mm S0700-S-M5 Note) Standard wire length of valve with plug connector is 300 mm. When ordering a lead wire length of 600 mm or longer, list the part numbers for the valve without connector and the connector assembly.

5 Port Solenoid Valve Series VQZ1000/2000/3000

100 0 Perpendicular, upward actuation Horizontal actuation VQZ VQZ1151-01 SQ VFS 800 700 600 500 400 300 200 100 0 VFR VQZ2151-02 VQ7 900 800 700 600 500 400 300 200 100 0 VQZ3151-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

AC Servo Motor Driver (CC-Link Type ）

from the initial value. 600 for LEY25 A Lead *5.

Digital Pressure Switch ( compatible)

. -65No.PS-OMX0002-A Unit specification and pressure gauge measurement value (PD) Series Unit Rated pressure range Display/settable range MPa -0.100 to 1.000 -0.105 to 1.050 kPa -100 to 1000 -105 to 1050 kgf/cm2 -1.02 to 10.197 -1.07 to 10.71 ISE20C bar -1.00 to 10.00 -1.05 to 10.50 psi -14.5 to 145.04 -15.2 to 152.3 Pressure gauge measurement value (PD) 600 to 5000 580 to 5200 MPa 0 to

Digital Flow Switches Series PF2A

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 13

5 Port Solenoid Valve Series SV

Stroke mm 70% 30% AS3201F -02-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

Digital Pressure Switch ( compatible)

-0.1010 0.01 to -0.105 kPa 0 to -101.00 10.0 to -105.0 kgf/cm2 0 to -1.0299 0.102 to -1.071 bar 0 to -1.0100 0.100 to -1.050 ZSE20B psi 0 to -14.649 1.45 to -15.23 inchHg 0 to -29.83 3.0 to -31.0 mmHg 0 to -757.6 75 to -788 Pressure gauge measurement value (PD) 1000 to 5040 600 to 5200 MPa -0.1000 to 0.1000 -0.105 to 0.105 kPa -100.00 to 100.00 -105.0 to 105.0 kgf/cm2 -1.0197 to 1.0197 -

Compact 5-Port Solenoid Valve

Made to Order Manifold Exploded View 16 20 25 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 32 40 50 63 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 ZK2 Combination Manifold 100 Fittings, Replacement Parts, Tools 0 100 200 300 400 500 600 700 800 Average speed [mm/s] Manifold Options Specific Product Precautions * Values at extension of a directly coupled

Thermo-chiller/Rack Mount Type

] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR012 018-A-10, HRR012 018-W-10 [50 Hz] [60 Hz] 800 800 40C 32C 40C Heating capacity [W] Heating capacity [W] 600 600 32C 400

Modular Design with Uniform Body Style

0 150 100 50 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-D AFD40-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.7 MPa P1 = 0.7 MPa 0.01 0.01 0 0 0 600 400 200 800 1000 0 100 200 500 400 300 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 72 AFM20-D to AFM40-D Series AFD20-D to AFD40-D Series Dimensions AFM20

Series AK1000

Inlet pressure: 60 psig (0.41 MPa) 1/2 inch Connection ) 1.50 (38.1) 50 0.34 40 0.28 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.50 (63.5) 10 0.07 0.88 (22.4) 0 0.00 0 40 80 120 160 200 Flow Rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AK1400TA Inlet pressure: 0 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg abs) -21 600