VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner

60

VXK21 VXK22 VXK23 Model Solenoid Coil P P P 2 mm P P P P P P P P Coil: Class B, Class H Orifice size Orifice size 3 mm 4.5 mm Rated Voltage 6 mm AC: 100 V, 200 V, 110 V, 220 V, 240 V 230 V, 48 V DC: 24 V, 12 V 8 mm Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 Normally Open (N.O.)

Direct Operated

Grommet Class H coil: AWG18 Insulator O.D. 2.2 mm Class B coil: AWG20 Insulator O.D. 2.5 mm q w Lead wire color Rated voltage q w DC (Class B only) Black Red 100 VAC Blue Blue 200 VAC Red Red Other AC Gray Gray There is no polarity.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

8 PCA-1557727 Terminating resistor for PROFIBUS DP (M12/B-coded) 217 A M8/M12 Connector PCA/EX9/EX500 Series Power Supply Cable/Connector p. 229 to 236 EX600 EX500 p. 229 p. 231 !

VZ5000

B) port 1 8 , C6, C8 1 8 Port size Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37

ZP

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103

Digital Flow Switches

HOLD BANK1 BANK2 MULTI COUNTER:CEU5 UP Nil D 100 to 240 VAC 24 VDC Output transistor mode COUNT PRESET FUNC. LEFT RIGHT DOWN Nil P NPN open collector output SEL.

Series VQ Metal Seal/Rubber Seal Body Ported

It will be locked set in a (Passage: P A) state. Turn the manual override counterclockwise by 180 to set the mark to B and press it in the direction indicated by the arrow. It will be reset in a (Passage: P B) state. (It is reset when shipped.)

RHC

A Auto switch 50 to 100 50 to 100 HS HS 12 12 SMC SMC 24.5 24.5 A 33 B A 33 Auto switch B D-C73C/C80C 20 to 40 D-H7C 20 to 40 HS HS Auto switch Auto switch B A B A 50 to 100 50 to 100 HS HS 8.5 8.5 SMC SMC 16 16 A 36.7 Auto switch A 38.2 B Auto switch D-A3/G39/K39 D-A44 Auto switch HS HS 36 36 Auto switch A 49 B A 49.5 B G 1/2 (Applicable cable O.D. 6.8 to 11.5) G 1/2 (Applicable

Air Fittings & Tubing

(mm) a b (1) (1) Weight (g) D1 D2 L1 L2 P Q M1 M2 Part No.

Rotary Actuator/Vane Style Series CRB2

CRB2BW15/20/30-D Q3 (Thread) Q1 (Thread) Q2 (Through-hole) A port B port Body (B) Body (A) 2 x R CRB2BW15/20/30-DE A port B port 2 x R (mm) Q (Depth) 90 100 R A B C D E (g6) F (h9) G1 G2 J K L M N P Model Q1 M3 (10) Q2 3.4 (6) Q3 M3 (5) CRB2BW15-D CRB2BW15-DE CRB2BW20-D CRB2BW20-DE CRB2BW30-D CRB2BW30-DE 5 11 9 14 10 15.5 25 10

Booster Regulator/Air Tank

Pressure gauge Pressure gauge Port size Applicable series Symbol Port size VBA10A-02 02 03 04 VBA1lA VBA2lA VBA4lA 1/4 3/8 1/2 VBA11A-02 Elbow silencer Silencer Combination of Thread Type and Options VBA20A-03 Body size Option Semi-standard Thread type Nil G N P P P P P P P P P P P P S P P P P P P P P P P GN P P P P P P P P P P P P GS P P P P P P P P P P LN P P P P LS P P GLN P P P

VZ100/300/500

Weight (g) Port size Body ported VZ110 VZ120 70 M5 x 0.8 0 to 0.5 Note ) Weight stands for grommet type Flow Characteristics Flow characteristics Type of actuation Port size N.C.: 1 2 (P A) N.O.: 3 2 (R A) N.C.: 2 3 (A R) N.O.: 2 1(A P) Supply side Exhaust side Model C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Body ported VZ110 VZ120 N.C. 0.11 0.19 0.026 0.071 0.023 0.042 0.19 0.13 0.071

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Intrinsically Safe Valve

Plug position Type of actuation B port N.C. A port N.O. (A)4 2(B) (A)4 2(B) Locked position Number of solenoids Single 1 (P) (EA)5 3(EB) 1 (P) (EA)5 3(EB) LOCK 2(B) (A)4 2(B) (A)4 Double PUSH (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) Caution How to Use Plug Connector When operating the locking type D with a screwdriver, turn it gently using a watchmakers screwdriver.

LECP6_C

CN1(P.18) 4.2 CN2CN3: LE-CP-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 USB 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O P.27 6.3 /(P.24) 17 - 5.

100

open from the fully closed state. 100 Vacuum break flow rate [L/min (ANR)] 0 10 20 30 40 50 60 70 80 90 P = 0.5 MPa P: Supply pressure [MPa] P = 0.4 MPa P = 0.35 MPa P = 0.3 MPa P = 0.2 MPa 0 1 2 3 4 5 6 7 8 9 Number of needle rotations * The flow rates shown in this graph are representative values for the ejector with silencer exhaust specification, and the suction flow may vary depending

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-H7C D-B5, D-B6, D-B59W Auto switch Auto switch Hs Hs Single Acting, Spring Return Single Acting, Spring Extend Bore size (mm) A B All stroke A Bore size (mm) B Auto switch model Auto switch model 150 200 Hs Hs All stroke 150 200 125 125 50 100 50 100 25 75 25 75 20 20 30 105 95.5 55 80 45.5 70.5 55 80 45.5 70.5 24.5(27) 24.5(27) 20.5 D-C7 D-C8 D-C73C D-C80C D-C7 D-C8 D-C73C D-C80C 25 25

High performance type Step Motor Controller (Servo/24 VDC)

Check that this matches the controller. (2) Check Parallel I/O configuration matches (NPN or PNP) Controller Electric actuator LEFS25FB-100 LEFS25FB-100 NPN (1) (1) (2) 8 No.JXC-OMY0002-A 2.4 Option 1 Actuator cable[5 m or less] (1) (2) A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 B-3 A-3 Yellow 5 1.5m 1 Green 3 3m 3 Blue 4 Shield (3) 5m 5 Vcc B-4 Brown 12 GND A-4 Black

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. + P.627 10-SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 23 (AR) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P.604 10-SYJ500 Push-turn locking lever type DIN terminal 1.2 23 (AR) 1/8 (SYJ500, 700 only) P.615 10-SYJ700 M8 connector 2.7 23 (AR) 1/8, 1/4 P.627 Note) All AC voltage models have built-in