Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

= % %6% * % 0 MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions #=5; A E #=5; 8% ,9% 55 8% ,9% 55 DB E A DB #$% 2 , 3)% ,4 2 , 3)% , 80 80 0 0 0 0 100 100 D0 -X Individual -X Series MVGQ Construction Series MVGQM MVGQM12 to 25 20, 25 Over 50 stroke 12, 16 MVGQM32 to 100 50 or more Component Parts Note Material Description Description Note

CNG

2 2 MNB 1 1 CNA 0.5 100 500 400 300 200 100 0.5 500 400 300 200 1000 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 200 200 CLQ 100 100 40 32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100

JXCx-OMU0004

P.50 6 * 8 e PLC PLC 9.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

H W2 W1 K E E H J K L1 L1 L2 L2 M W2 Model t W1 M 4 3 6 10 8 12 19 25 LQ3P11 LQ3P12 LQ3P21 LQ3P31 LQ3P32 LQ3P41 LQ3P51 LQ3P61 M 11 6 14 10 9 14.5 23.5 22.5 56 58 8 16 17 16 7 20 17 16 20.5 28 27 67 69 8 21 24 H (E,E) (E,E) 21 7 25 22.5 19.5 24.5 39 36 83 89 8 26 28 L1,L1 KK L2,L2 24 32 41 9 9 10 29 37 49 24 22 30.5 44.5 42.5 96 100 117 136 8 13 13 32 41 50 36 43 55 Panel hole diameter K 26.5

Dual Rod Cylinder Series CXSJ/CXS

CX2 CXW 2.5 CXSM CXSL 32 CXT 2 Maximum load mass W (kg) CXSJ CXS 1.5 25 20 15 1 D10 -X 0.5 Individual -X 6 20 40 60 80 100 120 140 160 180 200 0 Cylinder stroke (mm) 563 Series CXS Construction: Slide Bearing CXSM6 !5 y!6 @3@0 @1r w !3 !0!9ut !4 !7 !1 !2 e !8 q @4 @2 @5 CXSM10 CXSM15 !7 !5 @6 @1 r w !3 i !0 !9 u t !6 !7 !5 @6@0@1r w !3i!0!9u t!6 !4 y e !1 !2 @0 !8 q !4y e !1 !2 q !

C95

1 $5 o $7 e Section B (Tie-rod for unit attachment) Section A (Release piston bushing) #1 !2 !2 !2 100 80 63 50 40 32 80, 100 Description Material Qty. Note Component Parts No. No.

Compact Manifold Regulator Series ARM5

150 200 250 0 0 50 100 150 200 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM5AA1-308 (One-touch fittings: IN/OUT 6) ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition

CNG

CNG 2 2 MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 1 CNA 0.5 100 500 400 300 200 100 0.5 500 400 300 200 1000 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 200 200 CLQ 100 100

Air Catch Sensor Series ISA

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 3 0 3 0 3 0 Regulator 3 0 3 0 3 0 Supply port P P P T T T U U U E E E L L L Supply port S S S L L L P P P T T T U U U E E E L L L S S S L L L 6 9 6 9 6

JXCx-OMT0002

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position mode (mm/s) (mm) (mm/s2) (mm/s2) Selection (mm) (mm) (mm) Axis 1 Absolute 100 100.00 1000 1000 1 0 0 5.0 Axis 2 Absolute 100 100.00 1000 1000 1 0 0 5.0 1 Axis 3 Absolute 100 100.00 1000 1000 1 0 0 5.0 Axis 4 Absolute 100 100.00 1000 1000 1 0 0 5.0 Axis 1 Absolute 50 50.00 1000 1000 0 0 0 0.5 Axis 2 Absolute

60

mesh) PIP65 P P [Application pending] P Restriction of environmentally hazardous substancesRoHS compliant Series VXK CAT.ES70-34B w w d d it it e e h h c c la la o o u u p p t t e e r r r r e e e e m m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

MVGQ

DMVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions -X Symbol A E Symbol Bore size (mm) 80 DB E A DB Stroke Bore size (mm) Up to 50 st Over 50 st Up to 50 st Over 50 st 2080 84 143 9.5 25 68.5 93 28 18.5 Data 100 100 89 153 5 30 69 105 36 21 10-16-17 18 Series MVGQ Construction Series MVGQM For 12 to 25: MVGQM12 to 25 Over 50 stroke Courtesy of Steven

Air Slide Table

(mm) Table displacement (mm) MXQR20-50 MXQR20-30 MXQR20-40 MXQR20-100 MXQR20-125 MXQR20-150 MXQR20-40 MXQR20-100 MXQR20-125 MXQR20-150 0.06 MXQR20-50 MXQR20-150 MXQR20-100 0.08 MXQR20-125 MXQR20-30 0.04 MXQR20-20 MXQR20-100 0.04 MXQR20-20 MXQR20-10 0.04 0.02 MXQR20-10 0.02 0 0 0 100 200 300 100 200 300 400 500 600 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr = 200 mm 0.08 MXQR25-150

MXS

8 w e q !1 !0 !6 CL MLGC r CNA !2 !3 t !

SFOD-OMT0010

Handling Precautions . 98 13.4 Operating environment . 99 13.5 Maintenance and Precautions . 100 13.6 Precautions for actuator with lock . 100 14.

0.4

FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) ERR. RD SD RUN POWER 120 80 10.6 4 46.2 ERR T/R RUN MODEL SB (SI No.EX124-SMB1) 0 1 DIP SW. L8 = 16n + 118.5 100 Drawing shows a SC case.

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

SYJ3000/5000/7000

port R port P, E port Nil D E Non-locking push type, Push-turn locking slotted type Push-turn locking lever type How to Order Pilot Valve Assembly DIN Terminal Part No. 5 Y V115 Without indicator light With indicator light SY100-82-1 Rated voltage Rated voltage Voltage symbol Part no. 24 VDC SY100-82-3-05 12 VDC SY100-82-3-06 100 VAC SY100-82-3-01 200 VAC SY100-82-3-02 110 VAC (115 VAC) SY100

Series AK1000

Code psig/bar unit MPa unit No code 0 V3 1 2 10 40 No gauge port e e 4PL 5PC No pressure gauge (Connections: 1/4 inch NPT) Sample Order Number Port -30 in.Hg to 30 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa AK1410TS e q 6 6 6 6 w 6 6 6 6 r t qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet