CP95 , 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500
, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500
beyond the air cushion limit lines or when the stroke adjustment causes limited or no cushion engagement. 200 Thrust energy E2 100 10 20 30 40 50 100 200 300 Fs Fs + mgs Fsmgs 400 500 Absorbed energy E W2 max.
(AR300, 400, 500 only) Bowl can be attached and detached with one hand.
Note q w e Material Material No.
267 283 299 315 331 347 14 12 16.5 15 13 11.5 Note) Width of SI unit applicable to E: Matsushita Electric Works, Ltd. and G: Rockwell Automation, Inc. widens to 24.3 mm .
100 4H10depth5 5 (26) (44) 110 100 Stroke69 (Stroke+131) 10 92 85 (For 100 to 150 strokes) 208 (For 200 to 1000 strokes) C section detail (S=2/1) 12 3 500 12 3 450 10 2 400 10 2 350 8 1 300 8 1 250 6 0 200 6 0 150 6 0 100 Stroke F E Stroke F E Dimension table 1) The motor mounting plate and coupling are attached but no motor, controller, driver, motor cable and encoder cable are included.
540 260 400 540 400 540 510 650 510 650 400 540 400 540 400 540 510 650 510 650 590 730 1.7 1.5 2.0 1.5 1.2 1.2 1.0 5.0 2.5 3.0 3.0 3.0 1.7 2.0 0.4 0.2 0.45 0.2 0.2 0.15 0.45 4.5 0.61 11 0.6 0.35 0.75 0.35 0.35 0.3 0.75 1/4 (6A) 0.85 0.9 1.0 0.9 0.55 0.85 1.0 0.35 0.15 0.4 0.15 0.2 0.1 0.4 6 1.05 19 0.55 0.3 0.5 0.35 0.35 0.3 0.5 Water oil air 1.0 Steam 0.5 0.13 0.08 0.15 0.08 0.1 0.08
E C B H1 H1 B1 AL AL C A A K K B F N F N H + Stroke S + Stroke H ZZ + 2 x Stroke d e 10.2 L f h + L ZZ + L + Stroke d d e e 10.2 10.2 f f L L + Stroke h + L + Stroke h + L S + Stroke ZZ + 2L + 2 x Stroke (mm) Bore size Stroke range (mm) A AL B B1 C D E F G H1 J K KA M MM (mm) 40 50 63 80 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41
Component Parts Replacement Parts No. u i Description Description Sub-plate Pilot valve No. q w e r t y Note Aluminum die-casted Part no.
500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200, 300, (400), 500
Mass (g) End boss type (Symbol) Model H E M K MHZA2-6 28 28 28 28 MHZAJ2-6 29 29 29 29 396 Parallel Style Air Gripper/Standard Type Series MHZ2 How to Order Bore size 6 MHZ2 D 6 M9BW Made to Order Refer to page 400 for details. Number of fingers 2 2 fingers Number of auto switches 6 mm Bore size 6 Nil S 2 pcs. 1 pc.
400 2) Flow rate : 60L/min 5) Flow rate : 60L/min 75 50 25 0 25 50 75 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm mm ionizer to workpiece [mm] ionizer to workpiece [mm] Installation distance from Installation distance from 200 200 10m/s 400 400 10m/s 5m/s 600 600 5m/s 800 800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50
Span to be set : (420) (410) 60.0 % Example with 400=ON, 410= 10.0, and 420= 90.0 when (200)=dir is selected: 100% 90% 400=on Stroke 10% 400=oFF 0% 0% 100% Input current (4mA) (20mA) Fig. 26 When this zero point / span setting is conducted, a position value (P value) is shown with determination of the set span as 0-100%.
, r Power supply: 400 VAC *4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: CH1 20C/CH2 25C, r Load: Same as the cooling capacity, t Circulating fluid flow rate: Rated flow, y Power supply: 400 VAC, u Piping length: Shortest *5 With the pressure control mode by inverter.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!
0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !
PB32 (e)([Pr. PB33][Pr. PB36][Pr. PB56][Pr. PB59])[Pr.