Table of Contents

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.

NCQ2/CQ2

Applicable Cylinder Series: (N)CDQ2, (N)CDQ2W, (N)CDQ2www-wS/wT (Single acting), (N)CDQ2, (N)CDQ2W (Large bore size), (N)CDQ2K, (N)CDQ2KW, (Non-rotating rod), (N)CDQ2 (Long stroke), CDQ2wS (High lateral load) Auto switch type s e r u t a e F l e d o M e z i s e r o b e l b a c i l p p A y r t n e l a c i r t c e l E D-A72 D-A73 Grommet (Perpendicular) D-A80 Without indicator light D-A79W

PFxx-OMY0005

Error output is selected: Refer to page 43 e. Output OFF is selected: Refer to page 43 Press the SET button to set. Return to function selection mode.

VK300

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light Varistor Varistor Diode Diode Coil Coil Coil Coil S AC Vacuum Spec.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

OMR0031

The table e is moved based on the user defined settings. -Necessary settings: Target position, speed, acceleration, deceleration and load mass.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

LJ1 60 72 A A Motor mounting area B Section BB When mounting a coupling on the motor, mount it within the dimensional range shown on the left. 9.2 Thread P.C.D. 32.5 Coupling Motor 29.5 30 8 Dimensions D C F D E With brake (mm) 101 8.5 26 32 Without brake (mm) 93 17 19 27.5 E F Coupling mounting dimensions Section AA (Housing interior) Series LJ1H S20 Motor mounting area dimensions Mitsubishi

VK300

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light No.1 No.1 Varistor Varistor S Diode Diode Coil Coil Coil Coil No.2 No.2 (G, GS) (D, DS) AC Vacuum Spec.

Compact Cylinder

Z 2 x P Q L F K M E J (Port size) L Q Q B + Stroke B + Stroke A + Stroke A + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order w y e r t u o !

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Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

] LEKFS40 Series Stroke[mm] 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 Product weight[kg] 5.5 5.8 6.1 6.4 6.7 7.0 7.3 7.6 8.2 8.8 9.4 10.0 10.6 11.2 11.8 0.53 Additional weight with lock[kg] 4 - 2How to order L E K F S 32 G A 300 R1 CDH7T Motor type Size Lead[mm] Motor mounting position Symbol LEKFS25 LEKFS32 LEKFS40 Nil In-line 25 32 40 High performance R Right side parallel

CG5-S

X165US inch rod option dimensional changes R V Integral clevis type (E)/CG5ENS Dim.

10

Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T Z2K Z2L Z2M Z2N Z2P Z2Q Z2R Z2S Z2W Z2T Z3A Z3B Z3C Z3D Z3E Z3F Z3G Z3H Z3V Z3J A B C D E F H J K L M N Nil A B C D E F G H K L Z Nil XB A B D E H J L M Nil A B C D E F G H K L Z Nil XB A B C D E F G H J K L M N P Nil A B C D E F G H K L Z Nil XB A B C D E F M N P Q R S T U V W Y Z1A Z1B Z1C Z1U Z1D Z1E Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T

ISO Cylinder

(Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A set of a, b, c, e

New

G Grommet E NPT Grommet 1E 12 VDC (With surge voltage suppressor) G E G H K L Z 1F NPT 48 VAC 1G 1H 1V 1J Rc 220 VAC 240 VAC E E DIN terminal Special voltage With light Without DIN connector G (With surge voltage suppressor) E E NPT 24 VAC 12 VDC 48 VAC Rc E 1K 1L Note) When the body is resin, one-touch fittings are equipped. 220 VAC 240 VAC Conduit terminal 1M 1W (With surge voltage suppressor

MHZ

Flat finger type 3 E Narrow type is not available for 6, 32 and 40.

MHZ

Flat finger type 3 E Narrow type is not available for 6, 32 and 40.

1.1

R S T E E E 24 25 28 29 30 31 37 38 Communication cable Communication cable outlet (also used as signal cable outlet) 27 Series HRG Optional Accessories Note) Please order separately. Necessary to be fitted by customer.