SMC Pneumatic Clean Series

, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 20 25 32 40 50 63 80 100 100 Non-lube Double acting, Available double rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction flow rate of vacuum suction type (Reference values) Specifications Bore size (mm

Electric Actuators

1 t !

CV/MVGQ

Standard Stroke Standard stroke (mm) Note) Bore size (mm) Symbol Specifications 25, 50, 75, 100, 125, 150 20 -XA Change of rod end shape 25, 50, 75, 100, 125, 150 25 25, 50, 75, 100, 125, 150, 200 32 25, 50, 75, 100, 125, 150, 200, 250 40 Note 1) Intermediate stroke except mentioned above is produced upon receipt of order.

21

Foot 2 CM-L020B CM-L032B CM-L040B 2 foots, 1 mounting nut Flange 1 CM-F020B CM-F032B CM-F040B 1 flange Single clevis 1 CM-C020B CM-C032B CM-C040B 1 single clevis, 3 liners Double clevis (with pin) 1 double clevis, 3 liners, 1 clevis pin, 2 retaining rings 1 trunnion, 1 trunnion nut 1 CM-D020B CM-D032B CM-D040B Caution Trunnion (with nut) CM3-T020B CM3-T032B CM3-T040B 1 1.

MXW Series Long Stroke Slide Table

n = 1 + 2 + 3 < 1 Load factors n Note Item Examine W. W max. is maximum movable load at Va. 1 =W/Wmax. (1) Max. movable load Examine Mp,My,and Mr.

Compact Cylinder with Solenoid Valve/

, 100 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 Surge voltage suppressor Diode (Non-polar: Varistor) 32 1 Indicator light LED Note) The S and Z types of surge voltage suppressor have an internal circuit allowing voltage drop, so use within the following allowable voltage range.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

VFR

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (External pilot port) Manual override (Non-locking) Electrical entry (2.3) 2-5.6 (Mounting hole) Rc 1/8 (PE port) Max. 10 (With direct manual override) (Grommet terminal) 5-Rc 3/8, 1/4 ( ): Rc 1/4 0 1 0 1 0 1 0 1 0 1 0 1 2 position double: VFR321 -E, VFR321 -DZ 0 1 0 1 3 position closed center: VFR331 -E,

5 Port Solenoid Valve Series VQZ1000/2000/3000

YOS: DIN terminal without connector (DC specification) Note 1) Note 1) Note 1) Note 1) Note 1) Note 1) Note 1) Note 1) Note 1) YS: DIN terminal (DC specification) Y: DIN terminal YO: DIN terminal without connector Function Symbol Specifications DC (0.35 W) AC Note 3) Nil Standard With surge voltage suppressor With light/surge voltage suppressor With surge voltage suppressor (0.9 W) B Note

SX

1-12.

Basic type / Direct mount type Series CY3B/CY3R

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B DH 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

0.

VQZ100 / How to Order Valve C4 Series VQZ 1 5 1 5 M 1 CE compliant CE marked Nil Q 1 VQZ100 body width 10 mm Note) For CE compliant models, DC type only. Type of actuation 1 N.C.

High Vacuum Angle Valve

Table 1: Suffix Symbol for Seal Material Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for Plasma Compound no. 2101-80*1 70W 4079 SS592 SS630 SSE38 1232-70*1 3310-75*1 *1 Produced by Mitsubishi Cable Industries, Ltd.

Rotary Clamp Cylinders

2 @0 i o e @3 @1 !1 o t y u w q r !9 @2 @5 @4 !

CLA

With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JO1'l2) 7S+,5O(n-2) ao. 5O(1l-2} 90+50(n-2) ""F ttl surface

XM, XY

-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

Compact Cylinder

20, 25, 30, 35, 40, 45, 50, 75, 100 840 IN 1400 1960 63 63 936 OUT 1560 2184 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke.

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.