typeRated flow rangeOperating pressure rangeWithstand pressureOperating fluid temperatureLinearity Note 1)Repeatability Note 1)Temperature characteristicsOutput Note 2)specificationsPower supply voltageCurrent consumption (No load)ResistanceWeight Note 3)Port size (Rc, NPT, G)PF2W540TWater, Mixture of water (50%) and ethylene glycol (50%)Karman vortex5 to 40 l/min0 to 1 MPa1.5 MPa0 to 90C

20 to 40C: FluorinertTM20 to 90C: FluorinertTMFC-3283/GALDEN?HT135FC-40/GALDEN? HT200?20 to 908.0 (at 20C)3.3 (at 20C)?

s (3cP) or lessKarman vortex0.4 to 4 l/min0 to 1 MPa1.5 MPa0 to 90C?2.5% F.S. or less (at 25C water)?1% F.S. or less (at 25C water)?5% F.S. or less (0 to 50C, based on 25C)Pulse outputAnalog outputAnalog output12 to 24 VDC (ripple ?

typeRated flow rangeOperating pressure rangeWithstand pressureOperating fluid temperatureLinearity Note 1)Repeatability Note 1)Temperature characteristicsOutput Note 2)specificationsPower supply voltageCurrent consumption (No load)ResistanceWeight Note 3)Port size (Rc, NPT, G)PF2W520TWater, Mixture of water (50%) and ethylene glycol (50%)Karman vortex2 to 16 l/min0 to 1 MPa1.5 MPa0 to 90C

CATALOG

position or 3 Position Closed or Exhaust Center White Color to match Bright Operating Environments H O W T O O R D E R (N)VH S E R I E S S Y M B O L S T E C H N I C A L SPECIFICATIONS Fluid Air (N)VH Max Operating Pressure 1MPa / 145PSI (VH2/3/400) 0.7MPa / 100PSI (VH600) B O D Y S I Z E Ambient & Fluid Temperature -5 ~ 60C / 23 ~ 140F 2 1/4 Port 3 3/8 Port 4 1/2 Port 6 1 Port Operation Angle 90C

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

(Equivalent to IP44) 90C 47C (50C) or less Splashproof/ Low jetproof type (JIS C 0920) 35C (40C) or less 100C Note) ( ) For IF32 To protect the microswitch, ambient temperature must be lowered when the fluid temperature exceeds 70C.

PF2D

Viscosity: 3 mPas (3 cP) or less Detection style Karman vortex Flow rate measuring range 0.4 to 4 l/min 1.8 to 20 l /min Note 1) 4 to 40 l/min Operating pressure range Note 2) 0 to 1 MPa 0 to 0.6 MPa Proof pressure Note 3) 1.5 MPa 0.9 MPa Operating fluid temperature 0 to 90C Linearity Note 4) 2.5%F.S. or less (at 25C water) Repeatability 1%F.S. or less (at 25C water) Temperature characteristics

V

position or 3 Position Closed or Exhaust Center White Color to match Bright Operating Environments H O W T O O R D E R (N)VH S E R I E S S Y M B O L S T E C H N I C A L SPECIFICATIONS Fluid Air (N)VH Max Operating Pressure 1MPa / 145PSI (VH2/3/400) 0.7MPa / 100PSI (VH600) B O D Y S I Z E Ambient & Fluid Temperature -5 ~ 60C / 23 ~ 140F 2 1/4 Port 3 3/8 Port 4 1/2 Port 6 1 Port Operation Angle 90C

1.1

Switch output, Accumulated pulse output, Analog output Capable of switching back and forth between cumulative and instantaneous flow Capable of operating at temperatures as high as 90C IP65 Features Monitor Sensor Separate type Digital Flow Switch for Deionized Water and Chemicals PF2D Set flow rate range (l/min) Series 0.4 to 4 Related Products PF2D 1.8 to 20 4.0 to 40 Body sensor: New

Thermo-con

Temperature range which can be set with the Thermo-con: 50 to 140F (10 to 60C) If a lower temperature (down to 4F (20C)) or higher temperature (up to 194F (90C)) than this range is necessary, select the Thermo-chiller HRZ series. 3.What kind of the circulating fluids will be used?

Compact Proportional Solenoid Valve Series PVQ

Table: Coil outer surface temperature range Model Coil outer surface temperature PVQ10 PVQ30 90C or less 100C or less Ambient temperature: 50C at the valve proximal section (approx. 1 mm) when the maximum current is applied Coil Working Principle Core The armature is attracted to the core by electromagnetic force as the coil is energized.

AK1000

Compression 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.4 lbs (1.09 kg) 3) Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Leak rate Connections Supply pressure effect Installation Internal volume Mass 1) Max 300 psig (2.1 MPa) for PTFE seat. 2) 14 to 194F (10 to 90C

AZ1000

(0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.76 lbs (1.25 kg) 5) Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass 1) Max 300 psig (2.1MPa) for PTFE seat. 2) 14 to 194F (10 to 90C

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

Viscosity: 3mPas (3cP) or less Detection style Karman vortex 0.4 to 4 L/min 1.8 to 20 L/min Note 1) 4 to 40 L/min Rated flow range Operating pressure range Note 2) 0 to 1 MPa 0 to 0.6 MPa Proof pressure Note 3) 1.5 MPa 0.9 MPa Operating fluid temperature 0 to 90C Accuracy Note 4) 2.5% F.S. (at 25C water) Repeatability 1% F.S.

KT10

(110 MPa) 24000 psig (165 MPa) 40 psig (276 MPa) Proof pressure Burst pressure 40 to 160F (40 to 71C) (No freezing) 3) 0.06 Bubble tight NPT 1/4 inch, MS33649 Option: Panel mount 5.07 lbs (2.3 kg) 4) Ambient and operating temperature Cv Leak rate Connections Installation Mass 1) Not available for material code B 2) Source pressure 6000 psig (41.4 MPa) for PEEK seat. 3) 14 to 194F (10 to 90C

SL5200

pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass 1) 14 to 194F (10 to 90C

20 to 40C: FluorinertTM20 to 90C: FluorinertTMFC-3283/GALDEN?HT135FC-40/GALDEN? HT200?20 to 908.0 (at 20C)3.3 (at 20C)?

s (3cP) or lessKarman vortex0.4 to 4 l/min0 to 1 MPa1.5 MPa0 to 90C?2.5% F.S. or less (at 25C water)?1% F.S. or less (at 25C water)?5% F.S. or less (0 to 50C, based on 25C)Pulse outputAnalog outputAnalog output12 to 24 VDC (ripple ?

s (3cP) or lessKarman vortex1.8 to 20 l/min Note 1)0 to 1 MPa1.5 MPa0 to 90C?2.5% F.S. or less (at 25C water)?1% F.S. or less (at 25C water)?5% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2D 300/301(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output Note 5) 1 to 5 VLinearity: ?

20 to 40C: FluorinertTM20 to 90C: FluorinertTMFC-3283/GALDEN?HT135FC-40/GALDEN? HT200?20 to 908.0 (at 20C)3.3 (at 20C)?