G P (51) (6) 3 3 t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 G P MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.) 10 (Clamp stroke) 0 d0.05 0 d0.05 Z D E E G 6 51 77 67.5 10.5 Diamond type Round type (Guide pin dia.: 17.5 or more) H
L 3 m Connector Nil w/ connector Stroke(mm) Made To Order Fluoro rubber packing (Ex.) 2-2-2 Applicable Auto-Switch Models Z w/o connector 25, 50, 75, 100 Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW 2-color D-M9PW A96 Reed D-A96 M9B Solid State D-M9B M9BW Indication Solid State D-M9BW A90V Auto-Switch D-A90V
Auto switch model Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) Load voltage Indicator light Applicable load Perpendicular In-line Special function Type Electrical entry Wiring (Output) AC DC 100 V A90 A90V 5 V, 12 V 100 V or less IC circuit No Relay PLC 24 V Reed switch Solid state switch 2-wire A93 A93V 12 V Grommet Yes A96 A96V IC circuit 5 V 3-wire (NPN equiv.)
Air Slide Table Double-ported Type How to Order 6, 8, 12, 16, 20, 25 MXQA Series RoHS 30 ZA MXQ 12 M9BW A q w e r t y u i t Functional options u Number of auto switches q Bore size Body option: w Double-ported type e Standard stroke [mm] A 6 10, 20, 30, 40, 50 Symbol Functional option Nil Without functional option 1 With buffer 2 With end lock 3 Axial piping 4 With buffer, end lock 5 With
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
B 5 A E Auto switch mounting groove (Both sides) Refer to the dimension table. When auto switches are used, side mounting with through-holes is not possible.
Z 4-LD SLOT Rod side flange style: CG1WFN End boss is machined on the flange for E.
r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i s a s s e m b l e D i s a s s e m b l i n g p r o c e d u r e A s s e m b l e p r o c e d u r e T r o u bl e s hoo t i n g Safety Instructions These safety instructions
With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.
6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !
Dimensions MGPM (Slide bearing) A, DB, E Dimensions (mm) (mm) Bore size (mm) A E DB Bore size (mm) A E DB 50 st or less 93.5 93.5 109.5 109.5 Over 50 st 200 st or less 129.5 129.5 150.5 150.5 Over 200 st 15.5 9 16.5 11.5 50 st or less Over 50 st 200 st or less Over 200 st 50 st or less Over 50 st 100 st or less Over 100 st 200 st or less Over 50 st or less 96.5 96.5 112.5 112.5 Over 50 st
AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Wiring (Output) Pre-wire connector Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line 3-wire Reed switch Solid state switch A96V A96 5 V IC circuit Grommet (NPN equivalent) Yes Yes Relay, PLC 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW A93V M9NV M9PV M9BV F9NWV
AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Wiring (Output) Pre-wire connector Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line 3-wire Reed switch Solid state switch A96V A96 5 V IC circuit Grommet (NPN equivalent) Yes Yes Relay, PLC 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW A93V M9NV M9PV M9BV F9NWV
B 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.34 0.20 4-E 0.34 0.25 0.50 0.25 0.50 0.34 0.53 0.34 0.66 0.41 B Rear screw clearance hole / NC(D)Q8M(Z) (Inch) Symbol Bore E B 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.34 0.20 4-E 4-E 0.34 0.25 0.50 0.25 0.50 0.34 0.53 0.34 0.66 0.41 B Through screw clearance hole / NC(D)Q8N(Z) (Inch
F: Angle adjustment range 5 E: Angle adjustment range 5 E: Angle adjustment range 5 B port Angle adjustment screw A port Clockwise rotation 0 8 0 e gl 10 n Allowable Lateral Load to the Piston Rod End a e nt gl e an m st t en u dj m a m st u ju m i in ad M F: Angle adjustment range 5 m u im Using friction fittings makes it easier to mount the load to the piston rod end. ax 0 M 7 M 1 in e
-/22Double Foot Style (M) / CJ2M, CJ2M 10112122Rubber bumper View E GB F NN GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Cover surface Piping port 2 x M5 x 0.8 D LY LB LH LT LZ LX LT S + Stroke H NA A 4 x LC Mounting hole Y X X Y NB LS + Stroke Z + Stroke C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) A 10 16 D 15 15 F 4 5 GA 8 8 GB 5 5 H 5 5 MM 28 28 NN M4 x 0.7 M5
WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50 64 80 E 4.9 8 11.7 14.8 F 3 5 6 8.5 G 6.5 9.5 11 14 H 3.4 5.5 6.6 9 J M4 x 0.7 M6 x 1 M8 x 1.25 M10 x 1.5 Model Applicable cylinder MY3A16, MY3B16
IC circuit Terminal conduit 5 V, 12 V 12 V 3-wire (NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire (NPN) Relay, PLC Yes IC circuit Diagnostic indication (2-color indication) 5 V, 12 V 24 V 12 V Grommet IC circuit 5 V, 12 V Water resistant (2-color indication) 12 V IC circuit With diagnostic output (2-color indication) 5 V, 12 V IC circuit A96 5 V Yes A93
Note 3) Bore size determination E Es NG Determination of allowable stroke (W + WB) V 2 E = x ( ) 2 1000 E Es Note 2) OK Determination of pressure (P) when making intermediate stop Review of order made products based on operating conditions P Ps DNote 1) This cylinder cannot perform an intermediate stop using an air pressure circuit in vertical operation.