Air Slide Table Series MXQ

Nil (Example) A93 3m .

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data K A .

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

150 10 20 30 125 75 100 20 50 10 40 13-/22-MXQ6(L) 13-/22-MXQ8(L) 13-/22-MXQ12(L) 13-/22-MXQ16(L) 13-/22-MXQ20(L) 13-/22-MXQ25(L) 6 4.5 5.5 5.5 13.5 5.5 13.5 1 1 1 9 9 7.5 5 12 32 8 31 8 16 3.5 3.5 7.5 11.5 26.5 27.5 11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70 75 19 8 71.5

CRQ2

Lead wire length symbols: Auto switches marked with are made-to-order specification. 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Auto switches other than those listed above are also available. Refer to page 11-8-9 for details.

3-Position Rotary Table

Follow the appropriate procedure (R or L) shown in Table 2.

3

A AA C J L L J K (4 locations) Flat washer With 4 pcs.

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø 25, ø 32, ø 40

Example of L6L7 attachment With long spacer L: With low load shock absorber + adjustment bolt Left side Right side L unit Short spacer L unit Long spacer With short spacer With long spacer H: With high load shock absorber + adjustment bolt With short spacer With long spacer Port Port Intermediate fixing spacer is not available for end lock mounting side.

51

However, please contact SMC for water-resistant products of 20 and 25. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.

MK

Lead wire*(m) Rail mounting 20 to 63 Load voltage Direct mounting 32 to 63 Indicator Special function Wiring (output) Electrical entry Applicable load (N) Style 0.5 () 3 (L) 5 (Z) DC AC Perpendicular In-line Perpendicular In-line 3 wire (NPN Equiv.) A76H A96V A96 IC 5V A72 A73 A72H A73H 200V Yes Yes No No Yes Yes Grommet Reed switch 12V 100V A93V A90V A93 A90 Option Part No.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Please consult with SMC regarding water resistant types with the above model numbers. *2 1 m type lead wire is only applicable to D-A93. * Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN D* Since there are other applicable auto switches than listed above, refer to page 154 for details. * For details

Compact Cylinder/Guide Rod Type Series CQM

When mounting D-A9(V)/M9(V)/M9W(V)/M9A(V)L types on a side other than the port side with 32 to 50 cylinders, order auto switch mounting brackets separately.

CE

Indicator light Lead wire length (m) Applicable load 0.5 (Nil) 3 (L) 5 (Z) Auto switch model Special function Type Load voltage AC DC Wiring (Output) Electrical entry Pre-wire connector In-line Perpendicular Reed switch 3-wire (NPN equivalent) IC circuit A96 A96V 5 V Grommet Yes 2-wire 24 V A93 12 V 100 V Relay, PLC A93V 3-wire (NPN) 3-wire (PNP) M9N M9NV IC circuit 5 V, 12 V M9PV

Heavy Duty Stopper Cylinder

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with a symbol are produced upon receipt of order.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Rear flange surface M Right flange surface Flange side r Temperature specifications/Heater t Auto switch type Symbol Temperature Heater Nil 5 to 60C Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

CE

For details, refer to page 10-20-40. 10-12-16 16 10-12-17 17 Stroke Reading Cylinder Series CE1 12, 20, 32, 40, 50, 63 How to Order CE1 32 200 L J79W Number of auto switches Mounting style Auto switch B L F G D Both ends tapped style (Standard) Bore size Nil Without auto switch Nil 2 pcs.

CE

Mounting style B L F 12 mm equivalent S 1 pc.

Pin Cylinders Series CJP2/CJP

d m t L d m t D d9 D d9 l l Part no.

15

Please consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.