MVGQ

, D-Z76, D-Z80 D-Y59A/Y69A, D-Y59B/Y69B, D-Y7P/Y7PV D-Y7NW, D-Y7NWV, D-Y7PW/Y7PWV, D-Y7BW/Y7BWV Auto switch specifications Reed switch Solid state switch 10-16-1 2 Series MVGQ Valve Mounted Cylinder Precautions Be sure to read before handling.

100

mm L: With lead wire (300 mm) M: With lead wire (300 mm) MN: Without lead wire Vacuum pressure switch q Output N NPN open collector 1 output P PNP open collector 1 output A NPN open collector 2 outputs B PNP open collector 2 outputs C NPN open collector 1 output + Analog voltage output D NPN open collector 1 output + Analog current output H: Lead wire length 600 mm LN: Without lead

JA/JAH/JB/JS

Thread nominal size 30 Description H B C D d JS10 nut M4 x 0.7 3.2 7 8.1 6.8 JS16 nut M5 x 0.8 4 8 9.2 7.8 JS20 nut M8 x 1.25 5 13 15 12.5 D C JS32 nut M10 x 1.25 6 17 19.6 16.5 JS40 nut M14 x 1.5 8 22 25.4 21 H B JS63 nut M18 x 1.5 11 27 31.2 26 10-19-14

JA/JAH/JB/JS

5 7 8 7 10 13 17 22 27 14.4 19 24.8 29 38.4 49.2 17 23 29.9 33.5 38 47.5 80 210 JS20-8-125 JS32-10-125 M8 x 1.25 M10 x 1.25 43.9 49.5 1100 2500 6000 11000 JS40-14-150 JS63-18-150 M14 x 1.5 M18 x 1.5 60 74.5 11 13.5 Rod end nut (mm) d: Thread nominal size 30 Description H B C D d JS10 nut M4 x 0.7 3.2 7 8.1 6.8 JS16 nut M5 x 0.8 4 8 9.2 7.8 JS20 nut M8 x 1.25 5 13 15 12.5 D C JS32 nut M10

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

C11.2 1218 MY1H Series Mechanically Jointed Rodless Cylinder Linear Guide Type Side Support Side support A MY-SA 2 x G F 2 x H E C D A B Side support B MY-SB MY1B 2 x J MY1H MY1H MY1B E A B C D MY1M MY1C (mm) MY1H Part no.

CY1F

(mm) Bore size D-A9, D-A9V D-F9, D-F9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum stroke for auto switch mounting (2pcs.) (mm) D-A90V D-A96V D-A93V 22 Bore size D-F9V D-F9WV D-F9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 Mounting patternq, w 32 35 Mounting patterne 20 12 Auto Switch Mounting As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

for LECA6: LEC-D-1-2 Terminal name Function Details Accessory 0V Common supply () M 24V terminal/C 24V terminal/EMG terminal/BK RLS terminal are common ().

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Note 4) When specifying more than one option, indicate them alphabetically. 2.10-11 VQZ100/200/300 Body Ported How to Order Manifold VQZ200/300 VV3QZ 2 2 08 C D Series DIN rail mount 2 3 VQZ200 VQZ300 None DIN rail mounting (DIN rail standard length) DIN rail mounting (Without DIN rail) D DO Order DIN rail separately Refer to p.2.10-17 for DIN rail part number.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

mm) q Model q C side traveling parallelism to A side w D side traveling parallelism to B side C side w LEKFS25 0.04 0.02 LEKFS32 0.04 0.02 LEKFS40 0.04 0.02 D side * Traveling parallelism does not include the mounting surface accuracy.

ML2B

D A B Side support B MY-SB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

ML2B

D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

5 Port Solenoid Valve, Series VQC

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

17

D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

SYJ72R is only for manifold use. 35 Series SYJ700 Construction c f a e b d N.C. N.O. c f a e b d (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) h h 3 (R) 1 (P) 3 (R) 1 (P) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No.

Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2B18010DC C (D) Q2B20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2B18020DC C (D) Q2B20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2B18030DC C (D) Q2B20030DC M18 x 155 l M18 x 165 l 36 155 39 165 C (D) Q2B18040DC C (D) Q2B20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2B18050DC C (D) Q2B20050DC

Adsorption Plate

pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

A

COMBINATION UNITS MODULAR TYPE (N)AC1000(N)AC6000 M51" C o m b i n a t i o n o f f i l t e r, re g u l a t o r a n d l u b r i c a t o r i n c l u d i n g mounting bracket and pressure gauge H O W T O O R D E R FILTER/REGULATOR/LUBRICATOR (N)AC 00 G T E C H N I C A L SPECIFICATIONS D R A I N Manual drain D Auto drain Japanese N North American Model NAC1000 NAC2000 NAC3000 NAC4000 NAC5000