ARM10/11

48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Dimensions by the Number of Stations Manifold stations 10 Model Symbol 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252 210 168 126 84 L1 592 537 482 427 372 317 262 207 152 ARM3000 L2 578 523 468 413 358 303 248 193 138 L3 550 495 440 385 330 275

Table of Contents

Precautions. 243 243 245 246 248 248 248 248 250 250 252 252 253 253 254 255 258 258 258 258 260 260 260 262 262 263 263 264 264 266 266 266 268 268 268 270 270 271 273 275 276 278 278 278 279 280 280 281 281 282 283 285 285 286 286 286 287 288 288 289 291 293 294 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

unit manifold (VV2Q22) Equation L1= (n1) X 29+49 L2=L110 L3=L410.5 L5=L111.2 Dotted line: DIN rail mounting (-D) Dimensions n: Station (Max.20) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 310 600 281 571 252 542 223 513 194 484 165 455 136 426 107 397 78 368 L1 L2 L3 L4 L5 49 339 300 590 271 561 242 532 213 503 184 474 155 445 126 416 97 387 68 358 39 329 337.5 625 300 587.5 275

VKF300

(PT) 1/8 (ports P, R) 18 25 31 53.5 Approx. 300 (lead wire length) Light (DZ type only) 4Rc(PT) 1/8 (ports P, R) 75.5 83 Manual override (non-locking) nRc(PT) 1/8 (port A) Applicable cord O.D. 4 to 6.5 A A P = 19 20 L: Dimension table n: Stations n L L1 L2 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275

ZPT/ZPX

ZPX40HBN-B01-B8 -B10 ZPX50HBN-B01-B8 -B10 ZPX63HBN-B01-B10 -B12 ZPX 80HBN-B01-B10 -B12 ZPX100HBN-B01-B10 -B12 ZPX125HBN-B01-B10 -B12 150 275 40 50 63 80 100 125 +1 0 +10 152 271 1 +1 0 +19 166 464 2 +2 0 +37 164 460 3 +2 0 +61 235 648 6 +4 +1 +121 225 644 12 +7 +3 +228 22 How to Order ZPX 40 HB N B01 B10 Pad diameter (mm) Mounting thread 40, 50 63, 80 100, , 125 40 40 50 B 8 50 M8 x 1.25

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36e) (388) @ NVZ5000 TApe 40 Manifokl,/ Bottom Ported inch (mm) Grommet (G) (H) Example pneumatic circuit diagram L type plug connector (L) M type plug connector (M) I : With indicator liqht and surge voltage suppressor n) 2 3 4 5 6 1 6 9 1 0 11 12 13 l4 16 18 19 2.60 3.35 (66) (85) 4.O9 4.a4 (104) (123) 5.59 (142) 6.34 (161) 7.09 (180) 7.83 8.5S (lse) (a8) 9.33 1237 ) 10.08 10.83 (256) (275

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Pertormance Prechion and slrengh in conliguralions to meel nost appljcations Plcision vs, Moment loading Unmatched Versatility from The leader in Pneumatics SLIDE TABLE Technology Work Table ' I cytinder , , I Conventional Syslem Linear Bearing univcEal lilourl Slide table MuHiple moLrnting opions Standard Stroke (mm) 25 30 40 50 60 75 100 sffi 125 150 '175 200 225 250 275 300 350 400 L I

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Momnt loading Conventional Systetn lHvatal ou dldebL Multipl mounting optims 30 Standard Strcke (mml 125 150 175 200 225 250 275 300 350 400 I ffi75 100 60 I s OF so 'a so =ooi ;slisawl[soww so I T sow lsawjl:ew11 a a a a a a a a a a a a a a a a a a a a a a a a a a a a a t a a a a a a a a a a a a a a a a a a a a a a a a a a '"?FF_PryFry4F!

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l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?

REA/REB

Load Center Offset in Operating Direction (Lo) 25 144 9 + Lo 32 275 11 + Lo 40 520 13 + Lo Bore size (mm) RB Allowable load weight WA (kg) J DBore size (mm) Allowable load weight WA (kg) 5.6 Lo + 2.8 13.34 Lo + 2.9 10 -X 15 Lo: Distance from center of slide block to loads center of gravity (cm) 2043.2 Lo + 6 20 46.15 Lo + 3.55 Data 25 80 Lo + 4 32 188.1 Lo + 5.7 40 10-2-41 41 Series REAL

Air Slide Table

Weight of Centralized Adjuster [g] Model Standard stroke [mm] Reduction only when the product comes with a retraction stroke end adjuster 10 20 30 40 50 75 100 125 150 MXQ6 160 165 210 230 240 10 MXQ8 195 225 235 275 355 410 10 MXQ12 375 405 435 495 525 685 765 20 MXQ16 660 690 740 820 860 1,010 1,270 1,370 40 MXQ20 1,140 (60) 1,170 (60) 1,200 (60) 1,290 (60) 1,400 (60) 1,600 (60) 2,050

NARM Series

6.61 8.27 9.92 11.57 13.23 14.88 16.54 (84) (126) (168) (210) (252) (294) (336) (378) (420) NARM3000 L1 5.98 8.15 10.31 12.48 14.65 16.81 18.98 21.14 23.31 (152) (207) (262) (317) (372) (427) (482) (537) (592) L2 5.43 7.60 9.76 11.93 14.10 16.26 18.43 20.59 22.76 (138) (193) (248) (303) (358) (413) (468) (523) (578) L3 4.33 6.50 8.66 10.83 12.99 15.16 17.32 19.49 21.65 (110) (165) (220) (275

Valve Single Unit

EXH port Rc 1/4 SUP port 67.6 50.5 P E 18.5 18.5 9.5 9.5 58.2 60 1 1 26 L plug connector (L) M plug connector (M) 115.6 (Single, Double) 128.1 (Single, Double) 128.6 (3 position) 141.1 (3 position) 16.7 (Lead wire length) 300 300 (Lead wire length) 33.4 Stations n n: Stations (n1 + n2) 3 85 65 4 104 84 5 123 103 6 142 122 7 161 141 8 180 160 9 199 179 10 218 198 11 237 217 12 256 236 13 275

C92

single clevis C Rear double clevis D Bore (mm) FB AB TD E1 R W MF ZF CD EB L XD UB CB EW MR TR AO AT XA SA AH L1 XV TL TM UW TF UF E2 46 60 70 85 102 116 140 180 32 36 45 50 63 75 90 115 16 20 25 25 30 35 45 60 12,5 12 15 16 20,5 20,5 20 20 130 145 155 170 190 205 245 280 7 9 9 9 12 14 16 18 10 12 12 16 16 20 25 30 65 75 80 90 110 140 164 204 15 18 18 23 23 28 30 35 142 160 170 190 210 230 275

VQ20/30

mounting (-D) 1 2 3 4 5 6 7 8 9 10 Dimensions n: Station (Max. 20) L n 11 12 13 14 15 16 17 18 19 20 600 590 625 635.5 588.8 571 561 587.5 598 559.8 542 532 562.5 573 530.8 513 503 537.5 548 501.8 484 474 500 510.5 472.8 455 445 475 485.5 443.8 426 416 450 460.5 414.8 397 387 425 435.5 385.8 368 358 387.5 398 356.8 339 329 362.5 373 327.8 281 271 300 310.5 269.8 310 300 337.5 348 298.8 252 242 275

EX120/121/122

external terminals and FE Insulation resistance 10 to 57 Hz with constant amplitude of 0.75 mm p-p 57 to 150 Hz with constant acceleration of 49 m/s2 for 2 hours in each direction of X, Y and Z direction (During de-energizing) Vibration resistance Impact resistance 147 m/s2 3 times in each direction of X, Y and Z (During de-energizing) Standards CE marking, UL (CSA) recognition Mass 300 g 275

LX

1 1 10 10 10.1 10.1 15.1 15.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 7.6 7.6 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 5.1 5.1 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 2.5kg Positioning time (sec) Positioning distance (mm) 100 150 50 10 1 10 10.1 15.1 5.1 1.1 0.2 Speed (mm/s) 20 5.1 7.6 2.6 0.6 0.1 30 3.4 5.1 1.7 0.4 0.1 Refer to page 303 for acceleration time. 275

Fieldbus System

input terminal and supplied voltage of +24 V) (At PNP input, between the pin for input terminal and supplied voltage of 0 V) Open circuit detection current 2 wires 0.5 mA/Input Note 2) 3 wires 0.5 mA/Connector Note 2) Current consumption 50 mA or less 55 mA or less 70 mA or less Enclosure IP67 (Manifold assembly) Standards CE Marking, UL (CSA), RoHS compliant EX600-DXlCl Weight 300 g 275

Thermo-chiller Series HRZ Fluorinated Fluid Type

Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc. Regarding the fluid other than the above, please contact SMC.

JIS Standard Compact Hydraulic Cylinder

DMade to Order specifications (For details, refer to pages 275 to 278) Standard Strokes Symbol Specifications Change of rod end shape -XA -XC61 -XC63 -XC64 Stroke (mm) 5 10 15 20 25 30 35 40 45 50 75 100 Compatible with CHQHB series (14 MPa) Intermediate stroke [XC63] (Built-in spacer type) Intermediate stroke [XC63] (Built-in spacer type) Bore size (mm) 20, 25 32 40, 50, 63 80, 100 Intermediate