48

Direct teaching P P P Position Set in units of 0.01 mm [Pushing]: Pushing start position JOG teaching P P P P P P P P P P P P P P Set in units of 1 mm/s2 Acceleration/deceleration during movement Select from 16-level Acceleration/Deceleration Step data setting (Excerpt) Set in units of 1% Rate of force during pushing operation Select from 3-level (weak, medium, strong) Pushing force Set

KR

KRY P. 4 KRV KRE P. 5 P. 3 Use to connect tubes through a panel. Spatter cover Spatter cover Plug Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. P. 5 KR P. 5 KRC1 KRP P. 5 Use to plug unused One-touch fittings.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

25 mm interval.

Cylinder with Lock

+0.084 0 +0.3 +0.1 Up to 750 40 37 102 32 139 1/4 1/4 78 20 61 25 52 14 123 21 79.5 20 23 18 17 13 M12 x 1.75 10 71 31.5 +0.084 0 +0.3 +0.1 Up to 750 40 37 116 41 160 1/4 1/4 92 25 64 30 52 14 144 21 93.5 22 25 20 19 16 M12 x 1.75 10 72 35.5 (mm) (mm) With Bellows Bore size (mm) Stroke range (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 l Z KA L MM N P RR S T U V Z ZZ e f h ZZ 14 30

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Metric size Inch size Series Appearance Size 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/8" 1/2" 3/4" 1" 1 1/4" 25 4 3 1 1/4" 1 2 3 4 5 6 7 1 2 3 4 5 6 P.326 Male Connector LQ3H K P.327 M Female H 1 2 3 4 5 6 1 2 3 4 5 6 P.328 KK Male D Elbow LQ3L MS P.329 LQ Female MQR 1 2 3 4 5 6 1 2 3 4 5 6 P.330 T Male Branch tee LQ3B P.331 Female 1 2 3 4 5 6 1 2 3 4 5 6 P.332 Male Run tee

AC Servo Motor Driver (Network card type ）

(factory-wired) When using a driver built-in regenerative resistor, connect P+ and D. (factory-wired) When using a regenerative option, disconnect P+ and D, and connect the regenerative option to P+ and C. P+/C/D Regenerative option Refer to section 11.2 for details. Symbol Connection target (application) Description Supply the following power to L11 and L21.

Thermo-chiller

9 Water-cooled refrigeration . p. 11 Cooling Capacity. p. 13 Pump Capacity. p. 13 Dimensions. . p. 14 Parts Description. p. 14 Recommended External Piping Flow. . p. 16 Cable Specifications. p. 16 Operation Display Panel. . p. 17 Alarm. p. 17 Communication Functions. p. 18 Options. p. 19 Optional Accessories. . p. 20 VCooling Capacity Calculation Required Cooling Capacity Calculation. p.

VS 8-2/VS 8-4

P.3, 12 P.3, 12 D-sub connector D-sub connector 25 pins 26 pins Terminal block is compactly arranged on one side. ( ( ) ) ( ) ( ) ( ) Conforming to MIL D-sub connector P.3, 13 P.3, 13 F kit Flat ribbon cable Flat ribbon cable Conforming to MIL flat ribbon cable connector P.3, 15 P.3, 15 P kit Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type

SZ3000

, 3(R) port] Applicable tubing O.D.: 8 25 13.3 13.3 25 (Pitch) P = 10.5 16.2 16.2 17 36.7 34 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2nOne-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

SMC Pneumatic Clean Series

MM 2-LC LX D D I LZ 20, 25 Width across flats B2 Standard port MM Relief port 45 45 Width across flats NA LT N 4-LD N X Y S + Stroke X Y Z LS + Stroke Z + Stroke ZZ + 2 x Stroke 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P N I F A 13 8 AL D K MM NA NN B1 B2 G 54 47 47 40 B ZZ 188 154 152 144 LX 55 40 40 40 LH 30 28 28 25 LT LS LD 4 4 4 4 LC 75 55 55 55 LZ X Y 40 32 25 20 Bore size 1/8 27 25 25 21 24

VFR

pressure) (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 Pressure center (B) (A) 4 2 (EA)(P)(EB) 5 1 3 Model Model Flow characteristics (1) Response(3) time (ms) Max. (2) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Type of actuation Weight(4) (kg) Port size operating cycle (Hz) Plug-in Non plug-in C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 17 0.36 4.7 18 0.40 5.0 20 0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21

SYJ300/500/700

48 R P R P R P VS Refer to page 4-4-61 for dimensions with connector cable.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Non-locking) VT 59.5 [66] 47.1 VP 53.5 40.5 25 VG VP n-Rc (PT)1/8 (A port) VQ 8 23 A A 19.5 VQZ (Pitch) VZ P=19 20 [ ] for AC VS L plug connector (L) M plug connector (M) 59.5 [66] 10.5 53.5 53.5 10.5 1.5 1.5 23 8 23 8 70.9 [72.2] 39 39 66.9 80.5 25 25 4-Rc (PT)1/8 (P/R port) (Lead wire length) 300 70.6 [77.1] (Lead wire length) 4-R c(PT)1/8 300 (P/R port) 47.1 [ ] for AC Other dimensions

CNA

49 20 40 10 102 17 67 20 18 12 15 11 Up to 600 +0.3 +0.1 11 M12 x 1.75 22 40 37 102 32 139 1/4 1/4 78 20 31.5 61 25 52 14 123 21 83 20 23 18 17 13 Up to 750 +0.3 +0.1 11 M12 x 1.75 26 40 37 116 41 160 1/4 1/4 92 25 35.5 64 30 52 14 144 21 98 22 25 20 19 16 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) l Z L e f h ZZ MM N P Q S RR T U V W H Z ZZ 40 50 63 80 100 40

CNA

35 32 86 27 115 1/4 1/4 64 16 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 J KA L MM N P Q H S T U V W Z ZZ K RR 6 M8 x 1.25 14 30 M14 x 1.5 27 1/4 37 to 39.5 51 10 153 37.5 16 9

MLGC

B76 B73 I.C. 5V P P P P P P P P P P P P P P P P P 3 wire (Equiv.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

13 Specifications p. 14 3-Screen Display High-Precision Digital Pressure Switch for General Fluids ZSE20C(F)/ISE20C(H) Series How to Order p. 24 Specifications p. 25 Set Pressure Range and Rated Pressure Range p. 26 Analog Output p. 26 Functions p. 26 Internal Circuits and Wiring Examples p. 27 Dimensions p. 28 3-Screen Display High-Precision Digital Pressure Switch/ IO-Link Compatible ZSE20B

Mechanically Jointed Rodless Cylinders

32 40 50 63 Long stroke -XB11 Basic short type MY3A Shock Absorber Soft Type Note) -XB22 Centralized piping P.1 Basic standard type MY3B Helical insert threads -X168 Standard piping Holder mounting bracket Note) -X416, -X417 Copper Free 20MY3M Slide bearing guide type P.25 Note) Except the MY3A Shock Absorber Soft Type Series RJ Installed Cylinder (-XB22 spec.) added Soft stopping enabled

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) G H2 M5 x 0.8 (This drawing shows the cases of 20 and 25.)

4/5 Port Air Operated Valve Series SYJA3000

Type S31 Manifold: Side Ported 91.7 [96.1] Approx. 300 (Lead wire length) SS5YJ3-S31Stations -M3 L1 L2 3.5 2-3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 52.2 [54.4] 51.4 [53.6] 17.3 30 3 91.7 [96.1] 78.8 [83.2] 78.8 [83.2] 13.5 A A A A A B B B B B P R P R P R 29.2 P R 30 17.3 25 7.5 12 25 51.4 [53.6] 52.2 [54.4] 13.5 B B B B B A A A A A 3 5.2 2-3.5 (For mounting)