240 temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200 VAC 4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: CH1 20C/CH2 25C, r Load: Same as the cooling capacity, t Circulating fluid flow rate: Rated flow, y Power supply: 200 VAC, u Piping length: Shortest 5 With the pressure control
Vacuum (V) and exhaust (E) port should not be sealed simultaneously.
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L N P PF3W504 3/8 70 50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W520 3/8 1/2 78 54 30 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W540 1/2
Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure
Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 300mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: D (Built-in), Mounting: G (Rear Flange), Style: Aluminum Tube, Bore Size: 80mm, Thread: TN (NPT), Stroke: 100mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)
Magnet: D (Built-in), Mounting: G (Rear Flange), Style: Aluminum Tube, Bore Size: 80mm, Thread: TN (NPT), Stroke: 600mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)
Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 100mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -
Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 600mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -
Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 100mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: 3 pcs.
Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: 3 pcs.
Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 75mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 300mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 5m, Number: 4 pcs.
Determination of load's kinetic energy (E) bore size E > Es E Es Determination of bore size Review of larger bore size E = m E 2 a ( ) 2 = (Refer to page 8-16-8.) 1000 P Ps P > Ps Determination of pressure for intermediate stop (p) (Refer to page 8-16-8.)
Component Parts No. q w e r t y u i No. o !0 !1 !2 !3 !4 !