V

Max Vacuum Pressure* 0.5 0.7 1.0 1.3 mmHg (Torr) 5 12 24 40 Max Suction S Type 660 (100) 8 20 34 70 Flow Rate L Type 360 (400) / / / / L Type 400 (400) 10 20 34 68 Air Consumption S Type 660 (100) 10 20 34 68 L Type 360 (400) H O W T O O R D E R ZH V A C U U M E J E C T O R *Vacuum pressure is quoted as mmHg below atmospheric (Torr Absolute) 1 Torr = 0.0197PSI D ZH D I M E N S I O N S M

33

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 195 Thermo-chiller Basic Type HRSE Series

Slider Type/Ball Bushing Bearing

Determination of kinetic energy of load (E) E > Es E Es Bore size determination Tentative determination of L type W V 2 E = () 2 1000 Note 2) E > Es Determination of pressure (P) when making intermediate stop P > Ps P Ps Consider made-to-order products, depending on an operating condition. Tentative determination of L type (For intermediate stops, refer to page 1515.)

Compact Hydraulic Cylinder

2 @2 @4 t e !0 Series CH2G !3 @3 r @5 !

Table of Contents

OR-1860-120F F: FKM E: EPDM For VCB30 OR-2380-130F F: FKM E: EPDM For VCB40 OR-2600-180F F: FKM E: EPDM e When external leakage occurs after disassembling a valve, replace the above seals.

JXCx-OMU0026

Module Error (914) E < Details > This is generated when the parameters are not set. Turn off the control and motor drive power supplies. No data Error (915) E Download appropriate parameters, and then turn on the power supply. -90No.

VM

VH600 VR Option VH300 VH410 VH VH300/400 Bottom ported VH210 VHS VH200/300/400 Panel mounted All models applicable Different P port location (On handle side) Note that 1(P) port of VH600 is located on handle side as standard.

Power Valve: Economy Valve Series VEX5

900 1000 700 600 500 400 300 200 100 0 E 800 900 1000 700 600 500 400 300 200 100 0 F 800 900 1000 700 600 500 400 300 200 100 0 G When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

[Torque: Less than 0.1 Nm] Push-turn locking lever type [Type E] While pressing the lever down, turn it in the direction of the arrow. If it does not turn, it can be operated the same way as the non-locking type. Plug position Actuation type B port N.C. A port N.O.

PFxx-OMA1007

Body size Standby E/P regulator Standby regulator Residual Pressure Relief valve 20 EXA1-AC2 30 EXA1-AC1 EXA1-AC2 40 60 EXA1-AC1 -14No.PF-OMA1007-B Names and Functions of Individual Parts Air Management System (Standby E/P regulator type) No.

Magnet: D (Built-in), Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 175mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 350mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 450mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 50mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 500mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 75mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 100mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 100mm, Option: J [Nylon Tarpaulin, Cushion: Both Sides (Air-hydro has No Cushion)], Lock Operation: E [Spring Lock (Lock Exhaust)]