Table of Contents Series MHSH3 MHSH3-32D to 80D 6-TA, thread depth TB 3-UA thread depth 6 UB P .C.D.R P (Finger operating port) 3-SA, counterbore dia.
76 0.7 0.1 0 500 300 1000 1500 81 75 66 51 0.3 REB Cylinder stroke (mm) G 60 55 49 37 0.5 REC The above curve in the graph refers to P = 0.5 MPa of supply pressure.
76 0.7 0.1 0 500 300 1000 1500 81 75 66 51 0.3 REB Cylinder stroke (mm) G 60 55 49 37 0.5 REC The above curve in the graph refers to P = 0.5 MPa of supply pressure.
76 0.7 0.1 0 500 300 1000 1500 81 75 66 51 0.3 REB Cylinder stroke (mm) G 60 55 49 37 0.5 REC The above curve in the graph refers to P = 0.5 MPa of supply pressure.
(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.
25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Se ries CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L
0.0 75 6i8.0 200,000r 7,800 32.0 78.0 67m P$2050fltt l, -2, -3 30.0 50 t,130.0 ?7 0,000 44,500 76.0 r55.0 17,800 2,900 P$2t 00[t -t, -2, -l 30.0 r00 2,260.0 360,00044,500 69.0 160.0 17,800 Ptt2t 5ofltt l, -2, -l 30.0 t50 3,390.0 421,00044,500 90.0 285.0 17,800 4300 All dimenslons in milimetets. (ololog tlo. A al B D Il f J t( l(l wt wt (I$odel) D!npirg (on!l!
P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P
75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type/with Mounting Brackets Dimensions not shown are the same as the basic type (drawing above).
+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.
125 150 175 200 100 -X 2 position Single SYJ3000 P. 10-16-4 1.2 (0.067) 20Double Single Double VZ3000 2 position 4.5 (0.25) Data P. 10-16-8 Single VZ5000 12.5 (0.7) 2 position Double Single Double VF3000 2 position 16 (0.9) P. 10-16-14 D-Z73, D-Z76, D-Z80 D-Y59A/Y69A, D-Y59B/Y69B, D-Y7P/Y7PV D-Y7NW, D-Y7NWV, D-Y7PW/Y7PWV, D-Y7BW/Y7BWV Auto switch specifications Reed switch Solid state switch
(P .1190) (P .1190) (P .1190) S0700 Note) (P .1212) (P .1214) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) VQ (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) VQ4 (P .1153) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1173) (P .1175) VQ5 (P .1190) (P .1190) (P .1190
Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.
Series VQ7-8: Manifolds P.22 How to Order Manifolds P.23 Manifold Dimensions (DIN Connector Type) P.24 Manifold Dimensions (Prewired Connector Type) Manifold Options P.25 to 27 Option Dimensions P.28, 29 Manifold Option Mounting Bolt Part Numbers P.30 Manifold Exploded View P.31, 32 Manifold Specifications Sheets P.33 to 36 Safety Instructions P.37 5 Port Solenoid Valve/Precautions P.38
override A B PB 16 (23) (22)16 (11)10 12 (16) 62(72) 75(86) 62(72) 75(86) 50 PA R1 R2 P (P , A, B, R1, R2) 5-3/8, 1/2, 3/4 2-1/8 Indicator light B A Mounting hole 2-7.5 49(64) 49(64) 18 (20) (20)18 44(58) 44(58) G1/2 (Cable 8 to 10) Bottom ported drawing Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (
154 71.5 82.5 82.5 56(71) 56(71) 49(64) 49(64) 16(20)(B port) 16(20)(A port) 31(42) 31(42) Mounting hole 2-7.5 P R2 R1 VK Manual override A B PB (11) 10 12 (16) 16 (23) (22) 16 VZ 62(72) 75(86) 62(72) 75(86) 50 A VF Cable with connector PA R1 R2 P VFR (L 500) B A Mounting hole 2-7.5 5-3/8, 1/2, 3/4 2-1/8 49(64) 49(64) 44 (58) 44 (58) 18 (20) (20) 18 Indicator light (P , A, B, R1, R2) VP4
< 0.4 MPa 0.3 MPa P < 0.4 MPa 500 1000 900 160 800 400 700 140 600 160 500 125 125 300 CLJ2 Load mass: m (kg) Load mass: m (kg) 400 140 CLM2 300 CLG1 125 200 CL1 200 MLGC CNG 100 500 400 300 200 100 100 500 400 300 200 100 MNB Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNA Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 2000 600 CNS 500 160 160 CLS 140 400 1000 140 700
(Pitch) P = 10.5 (A, B port) Applicable tubing O.D.: 4 6 DIN rail release button 4-One-touch fittings (P , R port) Applicable tubing O.D.: 8 DIN rail holding screw Manual override (Press and turn for the locking type.)
Lead wire length* (m) Load voltage Auto switch model Electrical entry Indicator Wiring (Output) 3 (L) 5 (Z) Applicable load Special function Style 0.5 () (N) AC DC P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P C76 IC circuit P P P P P p p p P p p p p p p p P P P P P P P P 3 wire (Equiv. to NPN) 5V Yes C73 100V 12V Relay PLC C80 IC circuit No 100V