25 -X10 X10 X10 IZS 40 IZS 42 1660 1660 10 10 B B Ordering example) Bar length Type 41 42 520 700 760 880 940 1000 1060 1180 1240 1360 1420 1480 1540 1660 1720 1780 1840 1960 2020 2080 2140 2200 2260 2380 2440 Symbol Specifications Contents Model with drop prevention cover The main unit is shipped fitted with a drop prevention cover available as an option.
Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 45, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Rubber cushion, Auto Switches: None, Lead
Magnet: D (Built-in), Series: J2, Mounting: D (Double Clevis), Bore Size: 16mm, Stroke: 45mm, Cushion: Rubber Bumper, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type: A (Rail
Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 45, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Rubber cushion, Auto Switches: None, Lead
How to determine the auto switch installation position MHZ2 Step 2) Insert auto switch into the switch installation groove from direction B. "Set up as directed with power connected under no pressure or low pressure." A B MHZJ2 MHQ Step 3) Slide the auto switch in the direction of the arrow until the light illuminates.
RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !
RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !
Contamination and wear of emitters b. Loosening and damage of nozzles c. Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192
Part A Part B 5. Avoid using in a place where noise (electromagnetic wave and surge) is generated. Please take into consideration that the One-touch fittings for supplying air, need enough space for the air tubing to be easily attached/detached.
ISO4414JIS B 8370 ! ! ! ! ! ! 1) ISO 4414 : Pneumatic fluid power Recommendation for application of equipment to transmission and control systems 2) JIS B 8370: ! 1. 2. 3. 1. 2. 3. -3- FA FA FA FA ! () ! ! 10G 10G 10G 10G -4- 2. 2. 2. 2.
Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: L (Left Side Parallel), Motor Type: NT (Mounting Type T), Lead Screw: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 300mm, Auto Switch Mounting Bracket: C [With 1 pc. (Included)], Seal Band Stopper: Standard, Positioning Pin Hole: K (Body Bottom 2 Locations)
~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ . ~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".
Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision Type), Size: 40, Motor Mounting Position: In-line, Motor Type: NT (Mounting Type T), Lead Screw: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 150mm
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: L (Left Side Parallel), Motor Type: NT (Mounting Type T), Lead Screw: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 350mm
MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Seat Material: PCTFE, Standard, Poppet Feature Option: NT (First Stage Tied, Second Stage Free Poppet)
: 1/4 Inch NPT), Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Seat Material: PCTFE, Standard, Poppet Feature Option: NT (First Stage Tied, Second Stage Free Poppet)
Connections: 1/4 Inch NPT), Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Seat Material: PCTFE, Standard, Poppet Feature Option: NT (First Stage Tied, Second Stage Free Poppet)
Connections: 1/4 Inch NPT), Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Seat Material: PCTFE, Standard, Poppet Feature Option: NT (First Stage Tied, Second Stage Free Poppet)
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: NT (Mounting Type T), Lead Screw: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 200mm