High Vacuum L Type Valve

Tighten bolt b in numerical order to assemble the body and the bonnet assembly. When tightening bolt b, tighten manually until the O ring is compressed, then perform extra tightening in diagonal order. For models with heater, tighten bolt a to mount the heater to the body.

XL-OMV0002

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5) 4 XL-OMV0002 510 O 0.1mm0.2mm Assy O 5 P11 O 6 (P12P14) 5 XL-OMV0002 2.2

XLG Series

66 2 11 55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62

High Vacuum L Type Valve

A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257

High Vacuum L Type Valve

A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257

High Vacuum L Type Valve

A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

XLDV Series

Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 481 b

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Rail Mounting, Cushion: Rubber Bumper, Series: J2

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Rail Mounting, Cushion:

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: F7NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Rail Mounting, Cushion: -, Series

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: A73--Reed, DC Volt.>5,<24, AC Volt.<100, LED, Vertical, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Rail Mounting, Cushion: -, Series: -

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Rail Mounting, Cushion: -,

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: F79F--Solid State, Diagnostic, 4 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc., Auto Switch Mounting: Rail Mounting, Cushion: -, Series: -

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Rail Mounting, Cushion: -, Series

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: F7BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Rail Mounting, Cushion: -, Series

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: F7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Rail Mounting, Cushion: -,

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: F7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Rail Mounting, Cushion: -, Series: -

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: F7PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc., Auto Switch Mounting: Rail Mounting, Cushion: -, Series: -

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: F7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 5m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Rail Mounting, Cushion: -, Series: -