Digital Flow Switch (Remote type sensor unit)

PFM5-(N)01/(N)02/F01-1/2 -25No.PF-OMJ0016-J PFM5-(N)01L/(N)02L/F01L-1/2 -26No.PF-OMJ0016-J PFM5S-(N)01/(N)02/F01-1/2 -27No.PF-OMJ0016-J PFM5S-(N)01L/(N)02L/F01L-1/2 -28No.PF-OMJ0016-J PFM5-F02-1/2 -29No.PF-OMJ0016-J PFM5-F02L-1/2 -30No.PF-OMJ0016-J PFM5S-F02-1/2 -31No.PF-OMJ0016-J PFM5S-F02L-1/2 -32No.PF-OMJ0016-J PFM5-C/N-1/2 -33No.PF-OMJ0016-J PFM5-C/NL-1/2 -34No.PF-OMJ0016-J PFM5S-C/N

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PE 12 E Bracket Main port R T J D 1 2 3 I O M C N P: For mounting 4 locations B H G A Drawing indicates conduit terminal type.

Compact 5-Port Solenoid Valve

J When J is selected for e, install the release valve or vacuum breaker in the middle of the vacuum piping.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

5.6 22 Per hour [J] 56 220 Lock looseness at servo motor shaft (Note 5) [degrees] 2.5 1.2 Number of lockings [times] 20 Lock life (Note 3) Work per locking [J] 5.6 22 For the suppressed voltage 145 V TND20V-680KB (135[V]) Selection example of surge absorbers to be used (Note 7, 8) For the suppressed voltage 370 V TND10V-221KB (360[V]) Note 1.

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

3 Ejector assembly ZK2 EJ A W 10 Nozzle nominal size 07 0.7 10 1.0 12 1.2 15 1.5 Bellows type with groove Flat type with groove 257 ZHP Series Dimensions 30 N 70 Silencer In the case of Flat type P 16.6 EXH. 24.7 P F E D C A PD port 3 6.2 K M Female thread mounting M Male thread mounting Unlocked: 32.2 PD port 2 Locked Unlocked J PD port 1 G H P port L E F 6.2 10 7.8 6.2 Lock screw 14.4 1.4

2/3 Port Valve for Various

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

IR10-OM00007

-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

IR30-OM00013

-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

E E H J K L1 L1 L2 L2 M t W1 W2 Model MQR (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L1,L2: Nut material PVDF dimensions W: Width across flats dimension LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/8" 1/4" 3/8" 1/2" 3/4" 1" 10 11 16 21 24 32 41 14.5 58 69 89 100 117 136 56 14 20 25 29 37 49 9 6 7 7 9 9 10 23.5 8 8 8 8 13 13 22.5 16 21 26 32 41 50

155

62 5.5 48 30 31 1 90 74 44 22 135.9 144.5 151 40 36 72 6.5 60 35 39.5 External pilot solenoid type (Conduit terminal) P Pilot port 2 x 1/8" (Back side PE: Filter standard installation) J N I Manual override 2.3 12 Bracket G O L M F E 4 x K 2 1 D C H (2 locations) Main port A B A B C D E F G H I J K L M N O P Main port Model SGC2lll-ll10 SGC2lll-ll15 SGC3lll-ll20 SGC4lll-ll25 3/8 63 49.6

VXA21/22

(Base) VVXA211-07 (Valve) VXA2121-00 (Blank plate) VX011-001 1 pc. 6 pcs. 1 pc. The standard arrangement of manifolds should be placed on an individual port on this side, each solenoid valve from the left side and a blank plate in the right side.

Micro Mist Separator Series AFD20/30/40

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Mist Separator Series AFM20/30/40

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

In case of ZQ1 3M-00, the overall length is 111. 5 6 5 6 5 6 5 6 K J Q N K J E F E F Q N Circuit diagram P PE EXH EXH P PE Left Right V V V V E F E F E F 5 6 5 6 5 6 ZQ1 3M-K1 ZQ1 3M-K2 KZQ1 3M-J1 -FZQ1 3M-Q1 K10 Series ZQ Dimensions Manifold type (with PD port) ZZQ1 -BSC ZQ1 3MCommon air pressure supply (P) port (One-touch fitting: Applicable tubing O.D. 8) Supply valve Release valve Common

5-Port Solenoid Valve

U side (2 to 10 stations) U C G D side (2 to 10 stations) D E H Both sides (2 to 24 stations) B F J * 3/5(E) port is plugged for the built-in silencer type. * When the built-in silencer type is used, keep the exhaust port from coming into direct contact with water or other liquids. The asterisk denotes the symbol for the assembly. Prefix it to the part numbers of the valve, etc.

Secondary Batteries

Please make additional use of an air suction filter of the ZFA, ZFB or ZFC series. 90 Manifold X125 ZZQ1 07 B B 2 Series compatible with secondary batteries Port exhaust specifications 90 Material restriction Vacuum release pressure supply port (PD port) Maximum Number of Stations in Simultaneous Operation B None (Release pressure is supplied from the P port.)