MQQ

G5-S CV MVGQ CC RB J D-X 20Data 10-5-19 19 Series MQM Dimensions Basic style: MQMLB 6 Mounting nut M12 x 1 Rod end nut 2-M5 x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7

MQQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-5-1 2 Low Friction Cylinder Application Example (Metal Seal Type) Series MQQ Series MQQ Pressure control with fine pressure variations Low breakaway pressure Low

CY1

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing March, 1998 D-SMC.L.A. P-44 (JT)

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .06172 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .06160 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

In-line Type Flow rate and effective area AS2001FM Model AS1001FM AS2051FM 8 6 3.2, 4, 6 4 6 Metric sizes Tubing O.D.

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .02200 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .03148 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .02563 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .04069 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .03359 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .11023 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .11023 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .03527 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .03527 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

New

f J J J IN OUT IN OUT 2 x M Depth 5 H 2 x M Depth 5 G A H i G A 2 x P Port size B1 B b B1 B 2 x P Port size DIN terminal Cable 6 to 12 G1/2 Q F S Bracket mounting hole dimensions D a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) (44) 31.5 6.5 R C E 10.5 IN OUT 2 x M Depth 5 G A H 2 x P Port size B1 B (mm) A B B1 C D E F G Port size P H J M Model 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 35 35 40 40

58

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing LY printing NZ 6000SZ Printed in Japan.

New

H J H Conduit terminal DIN terminal Cable 0.24 to 0.47 Q F D D S G1/2 Qp0.08 F 1.34 (1.73) 1.26 R 1.24 0.99 T C K C R E E Sp0.08 A A B1 2 x P 1(IN), 2(OUT) port B1 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H G1/2 J H (inch) Grommet Grommet (with surge Dimensions Size Port size voltage suppressor) A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4

Electric Grippers

Bolt Max. tightening torque [Nm] Model LEHZ(J)10(L) LEHZ(J)16(L) LEHZ(J)20(L) LEHZ(J)25(L) LEHZ32 LEHZ40 M2.5 x 0.45 0.3 M3 x 0.5 0.9 Finger M4 x 0.7 1.4 Attachment M5 x 0.8 3.0 Runoff space Runoff space M6 x 1 5.0 Needle shaped workpiece Thin plate workpiece M8 x 1.25 12.0 4.

I

www.stevenengineering.com I 7.24 INSTRUMENTATION ELECTRO-PNEUMATIC REGULATOR D I M E N S I O N S S E R I E S VY140 0 102 03 04 D I M E N S I O N S S E R I E S VY150 0 102 03 04 D I M E N S I O N S S E R I E S VY170 0 110 12 D I M E N S I O N S S E R I E S VY190 0 114 20 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 !