KP/KPQ/KPG

Clean One-touch fitting (for blowing) 04 06 08 10 12 4 6 8 10 12 01 02 03 04 00 04 06 08 10 12 Thread connection Tubing (rod) connection R 1/8 R 1/4 R 3/8 R 1/2 Model H L T Y U R Male connector, Straight union Union elbow, Male elbow Male branch tee, Union tee Male run tee Male branch, Union "Y" Plug-in reducer Plug Same dia. tubing 4 6 8 10 12 Different dia. tubing (plug-in reducer) Clean

Digital Flow Switch (Integrated display type) ( compatible)

hysteresis) Setting range 0x0 to 0x0258 (0 to 600) Setting of OUT2 hysteresis (Temp. window comparator) 1049 0x0419 0 R/W U16 100 Y 0: Add (Addition) 1: dEC1 AC (Setting of the accumulated flow output direction) Setting of the accumulated flow output direction 1070 0x042E 0 R/W U8 0 Y (Subtraction OUT1) 2: dEC2 (Subtraction OUT2) 0: 10^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4

SZ3000

One-touch fitting Refer to One-touch fitting part number information on page 38. 9 Clip SX3000-115-1 10 10 Cassette Type Manifold Series SZ3000 Manifold Exploded View 60P manifold (plug-in, flat cable type) q w U side t r u e D side y No. Parts list Part No.

45

Direction P, R port A, B port specifications C8 (One-touch fitting for 8) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size A, B port 2 to 10 stations: W = 22n + 118 11 to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n

Title not found

-r DIN rail length Valve :l'"T,T;'fi":il"** :lloo,,"*,.s oec,,cl:on I l";]l;il"'fl:,^ii,lli' ffi!";:lffi | l ooraro barefe,.J r^Kb\,:r. I E Jr o.6roonoo(oosscte I =r..r'r,i;F,ro*"r,rewlrn+sy.:4IE19"'utrqr"Llliillilillii|l a r o ^ : r . . !

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

IIIIIIIIII

FLOW CAPACITY . 10-32 port 1/8" NPT port 2.0 CFM (56 LPM) with supply 10 PSI above set-point 2.3 CFM (65 LPM) with supply 10 PSI above set-point Operating characteristics are influenced by flow and outlet restriction Part Number Description S-5200-10S-5200-30S-5200-60S-5200-1000-10 PSI, 10-32 ports 0-30 PSI, 10-32 ports 0-60 PSI, 10-32 ports 0-100 PSI, 10-32 ports XX XX XX XX 0-10 PSI, 1/

Compact Rotary Actuator Series CRQ2

The rotation angle can be adjusted between 90 and 190. n io r at a n t o 10 g Rotation starting point 10 R e End of rotation 160 L L e R B B L g o n B t at a r 160 io 160 n 10 10 n io r at Da n t o g Rotation starting point End of rotation A A R e Operating size 20 30 40 Operating size 20 30 40 A Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Rotation starting point 10 10 End of rotation Lmax

42

(Including r, t and y) No. Part no. Description Material Qty VVQ4000 1 VFS r VVQ4000-80A-1 Gasket HNBR 10 Type Port thread type t VVQ4000-80A-2 Gasket HNBR 10 VFR Nil Rc N NPT T NPTF F G y VVQ4000-80A-4 Clip Stainless steel 10 A For 1 station C For 2 stations Note 3) Note) Spare parts consist of sets containing 10 pcs. each.

PFxx-OMX0007

R/W AoUt (Setting of analogue output) U8 0 Y 0: 1 to 5 V 10 to 10 V Setting of analogue output (Voltage output type only) 1 R/W FrEE (Setting of free range mode) U8 0 Y 0: oFF (Unused) 1: on (Used) Setting of free range mode 2110 0x083E Setting range 0x0190 to 0x1068 (400 to 4200) 2 R/W F_H (Set value of free range) S16 4000 Y Set value of free range Rated value 10% to 105% SAVE (Accumulated

15

Vertical Mounting, Ball Bushing Bearing e 35 mm stroke or less r Over 40 mm stroke 100 100 LEYG32L LEYG32L Load mass m [kg] Load mass m [kg] 10 10 LEYG25L LEYG25L 1 1 0.1 0.1 1000 1000 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] The limit of vertical load mass varies depending on lead and speed.

Rotary Actuator

&Q2 Q3 R S T V1 V2 W X Y CRB2B=10-=S CRB2B=10-=SE CRB2B=15-== CRB2B=15-==E CRB2B=20-== CRB2B=20-==E CRB2B=30-== CRB2B=30-==E CRB2B=40-== CRB2B=40-==E M3 0.004 0.016 0 29 15 8 14 3 1 5 9 0.5 9.5 9.5 24 6 M3 14 3.6 30 37 19.8 8.5 14.5 4 9 (6) 0.036 M3 M3 0.004 0.016 0 0.043 34 20 9 18 4 1.5 6 10 0.5 14 10 29 M3 19 7.6 39.5 47 21 11 17 6 5 12 (10) (5) M4 M4 0.004 0.016 0 0.043 42 29 10 20

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Series CQ2W/CDQ2W Dimensions: 32 to 50/With Auto Switch Both Ends Tapped Style Basic style (Through-hole): CQ2WB/CDQ2WB Both ends tapped style: CQ2WA Bore size (mm) O1 R R R O1 thread 32 40 50 M6 x 1.0 10 M6 x 1.0 10 M8 x 1.25 14 2-H thread effective depth C (opposite side also) 2-P (Port size) U 4-N through-hole Q Q 8-O counterbore 1 Width across flats K 11 Lead wire Minimum lead wire bending

Digital Flow Switch ( compatible)

(page 83) 2030 0x07EE 0 R/W Cut (Zero cut-off setting) U8 1 Y Setting range 0 to 10 1.0% increments 0: oFF 1: rAC 2040 0x07F8 0 R/W inP (External input setting) U8 1 Y (Accumulated value reset) 2: rPb (Reset peak/bottom) 2100 0x0834 0 R/W AoUt (Setting of analogue output) U8 0 Y 0: 1-5 (1 to 5 V) 1: 0-10 (0 to 10 V) Setting of analogue output (Voltage output type only) 1 R/W FrEE (Analogue

Digital Flow Switch (Integrated display type)

1 Parameter Data Data Initial value storage 3 Set value Remarks index type 2 dec hex 2020 0x07E4 0 R/W Reversed Display U8 0 Y 0: oFF (not reversed) 1: on (reversed) Zero cut-off range setting 1: Unit [%] 2030 0x07EE 0 R/W Zero cur S8 1 Y Setting range 0 to 10[%] 0: oFF 1: rAC External input setting Output type "L2" only (Reset accumulation) 2040 0x07F8 0 R/W Exterior input U8 1 Y 2: rPb

Rotary Actuator

R o t a ti o n R e r g o a n t n a a g ti r o e n n o r ti a a n t o g R e Symbol: C40 Symbol: C41 Symbol: C42 The rotation range and the angle adjusting direction of the angle adjustable type are changed. The rotation range and the angle adjusting direction of the angle adjustable type are changed.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 10 mm 10 mm 10 mm 10 mm Model With shims 10 to 13 mm 10 to 13 mm 10 to 13 mm 10 to 13 mm CKQG CLKQG CKQP CLKQP Workpieces to be clamped should not be thicker than those shown in the table. 5. Clamp only the flat side of a workpiece. 6.

CJ2

Bore 10 16 ZZ Z U S R NB NA MM KA H GB GA CX CB CA BB BA A CD(cd) 93 82 8 46 5 22.5 12.5 M4 X 0.7 4.2 28 14 18 8 3.2 3.3 17 12 15 15 99 85 10 47 8 27.5 12.5 M5 X 0.8 5.2 28 20 23 8 6.5 5 20 18 18 15 T mounting dimensions (mm) TY TX TW TV TH Bore 10 16 TC 12 32 22 40 29 4.5 16 38 28 48 35 5.5 1.3-34 Non-rotating Rod: Single Acting Spring Return/Extend Series CJ2K 10, 16 How to Order CJ1 Spring

Secondary Batteries

(mm) 1 8 4 Port size R Connection thread R Applicable tubing O.D.

Digital Flow Switch ( compatible)

(page 87) 2030 0x07EE 0 R/W Cut (Zero cut-off setting) U8 1 Y Setting range 0 to 10 1.0% increments 0: oFF 1: rAC 2040 0x07F8 0 R/W inP (External input setting) U8 1 Y (Accumulated value reset) 2: rPb (Reset peak/bottom) 2100 0x0834 0 R/W AoUt (Setting of analogue output) U8 0 Y 0: 1-5 (1 to 5 V) 1: 0-10 (0 to 10 V) Setting of analogue output (Voltage output type only) 1 R/W FrEE (Analogue