Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

Series SV

SV1200-5FU . 2 sets (double solenoid part no.) D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MB = ~Hs Auto switch = ~ Hs Auto switch MB1 CA2 CS1 Proper Auto Switch Mounting Position Auto Switch Mounting Height D-G5W D-K59W D-G59F D-G5 D-K5 D-G5NTL D-G5BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF C76 D-G5NTL D-G59F D-H7C D-G5BAL D-C7/C8 D-H7 D-H7W D-H7F D-H7BAL D-B5/B6 D-B59W D-G5/K5 D-G5W D-K59W Auto switch model D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-B59W C85 Bore size (mm) C95 HS

AC Servo Motor Driver (Pulse input type/Positioning type ）

2 to 10 AWG20 2 21/0.18 34.6 or less 1.35 4.7 0.1 HRZFEV-A(CL3) AWG20 2 cores LE-CSB-SB 2 to 10 Lock cable LE-CSB-RA 2 to 10 Note 5) or less 1.37 4.5 0.3 (Note 4) RMFES-A(CL3X) AWG20 2 cores LE-CSB-RB 2 to 10 AWG20 2 110/0.08 39.0 Note 1. d is as shown below. d Conductor Insulation sheath 2.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-10 AS421FG-N04-11 33.6 47.9 100 21 33.6 47.9 18.5 17.9 10 3/8" 21 100 NPT 1/2 23.8 25.4 28.6 50.1 57.6 25.4 24 57.6 49.6 50.1 49.6 42.1 42.1 R 1/2 28.6 AS421FG-04-12 AS421FG-N04-13 35.2 49.5 101 22 34.6 48.9 20.9 21.7 12 1/2" 22 101 Reference dimensions of M5 x 0.8, R threads after installation.

CG1

(2 colour, Diagnostic output) D-H7BA 5.3-55 Grommet (2 colour, Water resistant) Solid state switch D-H7C 5.3-31 Connector D-G5, K5 5.3-30 Grommet D-G5W, K59W 5.3-43 Grommet (2 colour) D-G59F 20 to 100 5.3-51 Grommet (2 colour, Diagnostic output) D-G5NT 5.3-59 Grommet (With timer) D-G5BA 5.3-56 Grommet (2 colour, Water resistant) Precautions Be sure to read before handling.

Valve Single Unit

Serial unit can be mounted on D side only. Valve stations SUP/EXH block assembly mounting position Note Stations Symbol 02 2 stations Mounting position Symbol Stations Double wiring specifications D U D side U side B 2 to 16 stations 2 to 10 stations 2 to 10 stations 08 8 stations How to Order Valves 02 2 stations Applicable up to 16 solenoids.

Valve Single Unit

Serial unit can be mounted on D side only. Valve stations SUP/EXH block assembly mounting position Note Stations Symbol 02 2 stations Mounting position Symbol Stations Double wiring specifications D U D side U side B 2 to 16 stations 2 to 10 stations 2 to 10 stations 08 8 stations How to Order Valves 02 2 stations Applicable up to 16 solenoids.

HRX-OM-W058

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

LEC-OM02704CN

AC200230V AC100120V 40 6 AC100120V AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 M5 3.24[Nm] U U CNP3 V CNP3 V W W 11 3 11 11.2 (1) Mini Delta Ribbon(MDR)(3M()) (a) [mm] E D A C Log 39.0 23.8 B 12.7 A B C D E 10126-3000PE 10326-52F0-008 25.8 37.2 14.0 10.0 12.0 AWG2430 (b) M2.6 [mm] E D A C F Log

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Different sides Same side Different sides Same side 50 + 45 (n 2) (n = 2, 3, 4, 5 ) D-C7 D-C8 15 50 10 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) (n = 2, 3, 4, 5 ) 15 60 10 Caution D-C73C D-C80C D-H7C 15 + 50 n 2 2 When operating a cylinder for the first time, make sure to release the air at low pressure.

Mini Free Mount Cylinder

C D UJB F8N Number of auto switches Clean Series Nil 2 pcs. 1 pc.

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

1.3 4.0 0.3 (Note 4) UL Style 2103 AWG20 2 cores Lock cable LE-CSB-RA 2 to 10 LE-CSB-RB 2 to 10 Note 1. d is as shown below. d Conductor Insulation sheath 2.

KB

39.0 38.0 44.5 36.0 42.6 55.0 10.1 11.4 12.2 15.5 19.5 24.0 22.5 27.0 38.5 35.5 34.5 40.0 Body size Different Diameter Module: KBR Weight (g) 2.8 4.3 8.8 A L D Model Body size KBR2-1 KBR3-2 KBR4-3 21.5 25.0 30.5 8.0 10.0 14.0 21.0 28.6 30.4 15-2-116 Piping Module Series KB Plug/Cap 4 Plug: KBP H (width across flats) Weight (g) 11.5 L2 A L1 D Model Bracket mounting thread M6 x 1 x 8 l KBP1