5 Port Solenoid Valve SY Series

10.2 Manual override 22.2 (For manifold mounting) 21.4 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 69.4 [71.6] (35) (27) (For mounting) 23.2 (3.2) (Light/surge voltage suppressor) C6:33.6 N7:37.4 7.5 (3.2) N7: 37.4 C6: 33.6 (35.5) (32) + 25 18.5 10 0.8 16.9 13.1 SY3120-M5(-F2) G H 22.5 28.5 [35.5] A, B port M5 x 0.8 28.5 [35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Hv Auto Switch Proper Mounting Position Solid state auto switch Bore size (mm) 2-color indication solid state auto switch Reed auto switch B C A B Hv A B C A B Hv A B Hv A B C D-A9 D-A9V D-M9 D-M9V D-F8 D-M9W A B Hv D-M9WV A 36 25 16 36 25 15 32 21 20 32 21 17.5 18 7 25 32 21 20 32 21 17.5 8 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

MXS

X 0.8 4H9 3.5 deep +0.030 0 2-M4 X 0.7 thread 5 deep MGP MGQ HA GA 4H9 3.5 deep +0.030 0 NN-M5 X 0.8 thread 10 deep A B MGG 5 MGC 1 20 MGF 9 9 8.5 4.2 CY1 A B 18.5 8.5 8.5 18.5 H MY1 (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 50 35 55 65 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Dimensions A B VQD A VQZ1000 VQZ2000 VQZ3000 67 81 93 35 43 52 VZS VFS Individual EXH spacer VVQZ1000-R-5-M5 VVQZ2000-R-5-01 VVQZ3000-R-5-02 VS M5: VQZ1000 Rc(PT)1/8: VQZ2000 Rc(PT)1/4: VQZ3000 VS7 B Used to form a separate exhaust port for an interior manifold station or stations.

CNG

B A B CL 26 33 CL1 D-H7, D-H7W D-H7NF, D-H7BAL D-C73C, D-C80C MLGC HS HS Auto switch Auto switch 8.5 8.5 CNG 16 16 MNB A B A B 29 (36) 36.7 CNA ( ): denotes the values of D-H7LF .

Cylinder with Lock Series CNG

HS Auto switch 8.5 12 24.5 16 A B A B 26 33 D-H7, D-H7W D-H7F, D-H7BA D-C73C, D-C80C Approx. HS Approx. HS Auto switch Auto switch 8.5 8.5 16 16 A B A B 29 (36) 36.7 Numbers inside ( ) are for type D-H7LF. D-H7C D-B5, D-B6, D-B59W Approx. HS Approx.

SYJA3000

-M3 X 0.5 (Piping port) 33 36 (Non-locking) Manual override B P R R 7 7 SlA 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 VlA 13 1 (Bleed port) 11 10 4 15 10 10 5-M5 X 0.8 (Piping port) 8.2 14 14 15 Bracket VM/VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2-M3 X 0.5 (Pilot port) 10 1.8 4 A B (Mounting holes) 3.2 21.5 1.5 22 7 8.2 2.5 (Mounting holes for manifold

MHF2

depth 4 Attachment mounting thread Mounting thread 20 43 Groove for auto switch mounting 2-3H9 +0.025 0 depth 3 2.2 18 5.5 18 5.5 4 4.6 2-M5 x 0.8 thread depth 5.5 3 Mounting thread Groove for auto switch mounting 20 74 16 Series MHF2 Dimensions MHF2-16D2 Scale: 50% 4H9 +0.030 0 depth 3 36 36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port

Modular Design with Uniform Body Style

drain cock C2SL-36-A With bowl guard C2SL-36C-A C3SL-36-A C4SL-36-A Nylon Drain cock with barb fitting With bowl guard C3SL-36W-A C4SL-36W-A Metal Without drain cock C2SL-2-A C3SL-2-A C4SL-2-A With level gauge C3LL-8-A C4LL-8-A With drain cock C2SL-23-A C3SL-23-A C4SL-23-A With level gauge C3LL-38-A C4LL-38-A *1 The bowl assembly comes with a bowl seal.

Compact Manifold Regulator Series ARM5

Tightening torque recommended (M5: 1.5 to 2 Nm, R1/8: 7 to 9 Nm) For sealing, use a pipe tape.

ITV

M5 x 0.8 hole Built-in regulator EXH Built-in regulator EXH Solenoid valve EXH 1/4 (Rc, NPT) Port 3 (Exhaust port) 38.5 24 72 41 24 Port 3 (Exhaust port) 58 39 Port 2 (Output port) Port 1 (Supply port) 1/4, 3/8 (Rc, NPT) Port 1 (Supply port) 1/4, 3/8 (Rc, NPT) Port 2 (Output port) 36 36 4 x M5 x 0.8 depth 11 Bracket mounting hole Do not block three EXH ports on this product.

180° Angular Style Air Gripper Series MHY2/MHW2

Air Gripper Cam Style MHY2-20D 2 x M5 x 0.8 thread depth 8 Pin hole positioning (Mounting thread) 14 5 19 42 4H9 + 0.030 depth 4 0 4 x M4 x 0.7 through (Thread for mounting attachment) 8 4 x M5 x 0.8 thread depth 10 10 0.005 0.025 (Mounting thread) 5 9 2 x 5.5 through (Mounting hole) 2 x M5 x 0.8 thread depth 10 18 (Mounting thread) (Limted area for mounting attachment) 38 48 36 36 37 25

Speed Controller with One-touch Fitting

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E Body size 1 KE AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

W Z MA MXP10-10B 32 6.5 52.4 20 20 21 10 44 40 60 6 MXP10-20B 50 7.5 82.4 36 36 39 20 74 65 90 18 8-8-17 17 Series MXP Dimensions: MXP12 2-M4 x 0.7, depth 6 2-M3 x 0.5, depth 4 Z 3 Metal stopper V K 5 4 G Max. 4 M Max. 3 7.5 20 Stroke: S MXP12-15 A Piping port 2-M5 x 0.8 (Plug: M-5P) 8 Width across flats 2 Width across flats 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Air Slide Table Series MXP

Stroke: S MXQ 2 x M4 x 0.7, depth 6 2 x M5 x 0.8, depth 8 MXP16-20 MXF A Width across flats 8 Width across flats 3 H Piping port 4 x M5 x 0.8, depth 7 17 11 26.7 (Plug: M-5P) 2 x M5 x 0.8 M6 x 1 10.5 MXW 5 MXJ 5.5 MXP 35 34 MXY 8.5 MTS 4 x M6 x 1 4H9 0 +0.030 , depth 4 4H9 0 +0.030 , depth 4 A Pilot hole diameter 5.1 19 6.5 320.05 0.50.05 30 D B 2 x M5 x 0.8 Piping port W 47 46 13 4H9 0 +

VQ5000

U side (FU) 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc3/8, 1/2 (ports A, B) B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side (FU) 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc3/8, 1/2 (ports A, B) A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

2 x 9 counterbore M5 x 0.8 effective depth 7 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x M6 x 1.0 effective depth 10 Note 2) 2 x 5.4 through 47 25.5 10 36 1 Flat washer 8 10 7 7 25.5 39.5 + Stroke 4.5 36 44 + Stroke Lead wire minimum bending radius 10 Auto switch 25 19 5.5 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x 9 counterbore M6 x 1.0 effective depth