42

w AXT632-17-8 (M3 x 52) 2 q AXT632-17-11 (M3 x 87) 3 For manifold The individual EXH cannot be mounted on the top. w AXT632-17-8 (M3 x 52) 2 Valve + Restrictor (Top) (Bottom) + Individual SUP or Individual EXH (Top) (Bottom) Valve + SUP stop valve (Top) + Individual SUP, Individual EXH or Restrictor (Bottom) q AXT632-17-11 (M3 x 87) 3 For manifold w AXT632-17-8 (M3 x 52) 2 q w Valve + Double

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

REA/REB

ML2B C J G5-S (Refer to page 10-2-52.) Review of operating conditions > 1 CV Determination of load factor () Load weight (W) Static moment (M) Dynamic moment (Me) = + + Max. load weight (Wmax) Allowable static moment (Mmax) Allowable dynamic moment (Memax) MVGQ 1 CC (Refer to data (B) on page 10-2-52.)

REA/REB

ML2B C J G5-S (Refer to page 10-2-52.) Review of operating conditions > 1 CV Determination of load factor () Load weight (W) Static moment (M) Dynamic moment (Me) = + + Max. load weight (Wmax) Allowable static moment (Mmax) Allowable dynamic moment (Memax) MVGQ 1 CC (Refer to data (B) on page 10-2-52.)

VS 8-2/VS 8-4

26 mm 3/5 3/5 95 2 2 2 2 2 2 14 12 41.2 65.4 (60) 4 4 4 4 4 4 39 17 13 1 1 24.5 33.5 64.5 27 (36.5) L2 24.5 33.5 2 x 1/2" 1(P) port 60.5 19 2n x 1/8" 4(A), 2(B) port (Size 18 mm) 2n x 1/4", 3/8" 4(A), 2(B) port (Size 26 mm) 1 2 3 4 Station number n D side U side 5 6 L1 8.5 8.5 (45) 56 52 19 27 Size 18 mm pitch ( ) Size 26 mm pitch ( ) 98 21 118 (Single) 152 (Double dual 3-port) 165 (3-position

VM

fitting 1(P): Male thread 2(A): One-touch fitting 1(P): One-touch fitting 2(A): Male thread 1(P): Male thread 2(A): Male thread 2(A) 2(A) 2(A) 2(A) Applicable tubing O.D.

Air Cylinder

D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM3 D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 CG1 D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) CG3 D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) JMB D-C7 D-C80 5 15

Electric Slide Tables

(Min. screw-in depth) 2 106 A 65 5H9 (+0.030 0 ) depth 2 220 to 250 30 30 44 60 D A 52 7 C x M5 x 0.8 Note 4) 17.8 (C/21) x D 27 2 x M6 x 1 thread depth 12 With lock 340 to 380 Table operating range Note 1) 65 1 [1] Stroke end [Origin] Note 3) Origin Note 2) E [Stroke end] Motor cable (2 x 5) Lock cable (3.5) (L) F 20 19.5 Stroke (2.2) (G1) x H 21 B-B H 5H9 (+0.030 0 ) depth 5 13.7 49 B

CATALOG VC10

WAY NORMALLY CLOSED GROMMET 2-WAY NORMALLY CLOSED CONDUIT SERIES 50MODEL 52 VALVE NUMBER MAX.

VM

Push button (Flush) VM220-02-33 VM230-02-33 JIS Symbol 2 port 3 port Panel mounting hole EXH port (3 port only) 0.5 MPa supply 4.9 mm P.T. 52 N F.O.F. 2-5.5 mounting hole 1.6 mm O.T. 6.5 mm T.T.

Rotary Clamp Cylinders

MK2G20 MK2G25 0 0.043 13 0.15 48 0.1 25.5 39 60 0.15 0.1 0 0.043 15 52 28 42 64 E D Hh9 0.1 100.2 25 G 2 x M5 x 0.8 M8 x 1.25 Effective thread depth 11 12 L F 2 x 5.5 through 2 x 2 x 9 counterbore depth 7 17 (5.5) M6 x 1 G K 2 x 3.3 depth 3 +0.15 +0.05 3 5.5 F B C J + Clamp stroke 4 3 I + 2 x Clamp stroke A Through-hole/Both Ends Tapped Common (Standard) (mm) A Hh9 F G L K J I E D C B Model

CG1

2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 C85 C76 CG1 MB End boss is machined on the flange for E.

KJ

3 8 21.7 17 28 22 9.6 1 2 1 2 Reference dimensions after NPT thread installation.

F

OD ID L D Number of coil winding per tube length Model D I M E N S I O N S P O LY U R E T H A N E C O I L T U B I N G TCU0425B-1 210 18 1 52 1.5 TCU0425B-2 280 4 2.5 2 35 28 TCU0425B-3 265 3 22 1 TCU0604B-1 24 1 54 2 325 TCU0604B-2 2 27 1.5 6 4 37 TCU0604B-3 305 3 17 1 TCU0805B-1 8 5 330 31 1 41 2 Courtesy of Steven Engineering, Inc. !

Large Size Vacuum Module: Series ZR

X, Y, Z directions, for 2 hours each 2% F.S.

MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

CM2

2 !3 !4 !5 !6 !

Table of Contents

2 !

LEC-OM02704CN

* 2 0r/min * 3 ( 7 ) ON OFF ON OFF (RXn1) (RXn2) ON OFF (RXnC) 18 (RX(n 2) 2 RX(n 2)9 ) 1 3 1 ON OFF ( 6 ) ( 6 ) ( 6 ) PC35 PC35 PC35 PC35 P A 11 PA12 P A 11 PA12 P A 11 PA12 15 52 15 1.

LEC-OM07605CN

-T (6) (6) (7) (7) 50.2 [AL. 50.1] 2 50.3 4 8 37 8. 50 1 50.4 (1) LECSS2-T 1 (2) (2) (3) (3) (4) (4) ( ) (5) (5) (6) LECSS2-T (7) (7) (8) (8) 50.5 [AL. 50.4] 2 50.6 4 8 38 8. 51 2 51.1 (1) LECSS2-T 3 (2) (2) UVW (3) (3) (4) (4) (5) (5) (6) (6) 51.2 (1) 3 (2) (2) [AL. 51.1] (3) (4) (5) (6) (7) 8 39 8. 52 52.1 (1) LECSS2-T 1 (2) (2) UVW (3) (3) (4) (4) (5) (5)