CM2

(Atlanta) 1440 Lakes Parkway, Suite 600 Lawrenceville, GA 30043 Tel: (770) 624-1940 FAX: (770) 624-1943 16850 W. Victor Road New Berlin. Wl 53151 Tel: (414) 827-0080 FAX: (414) 827-OO92 5377 Glen Alden Drive Richmond, VA 23231 Tel: (804) 222-2762 FAX: (80a) 222-5221 SMC Pneumatics Inc.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, IP8000/8100 1/4" NPT, INSTRUMENTATION, IP8000/8100 POSITIONER, DB, IP8000/8100 1/4" NPT, 5.09818 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, IP8000/8100 1/4" NPT, INSTRUMENTATION, IP8000/8100 POSITIONER, DB, IP8000/8100 1/4" NPT, 5.09818 lb

SFOD-OMT0005CN

W-AREA1 (-) (+) WAREA ON (mm) W 1W 2 WAREA ON *W 1W 2 PARA W 1=W 2=0 WAREA OFF) W-AREA2 W-AREA2 (-) (+) ORG Correct Link Offset () Sensor type Sensor type () Option 1 Option 1 () Undefine No. 11 Undefine No. 11 () Undefine No. 12 Undefine No. 12 () *1 -45- 10.3 () ORIG direction ORIG direction 12 1CW [CW] 2CCW [CCW] ORIG mode Return to origin mode 12 1[] 2[SW]

ZP

Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component

Single Axis Electric Actuator Series LJ1H

Nil W Axial Right Left Top Bottom F R L T B Cable length Motor specification 2m 3m 4m 5m 2 3 4 5 Motor output Standard motor Matsushita Electric Industrial Co., Ltd.

VXP21/22/23

23 25.5 25.5 35 40 40 12 14 14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

15

Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

VFS

Refer to page 3-8-52 for details.

Integrated Controller

/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2 0 0 Speed: V [mm/s] 200

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

HRX-OM-M090

HRX-OM-M090-f Operation Manual InstallationOperation Original Instructions Thermo chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRS012-A-10HRS012-W-10HRS018-A-10HRS018-W-10HRS012-A-20HRS012-W-20HRS018-A-20HRS018-W-20HRS024-A-20HRS024-W-20Keep this manual available whenever necessary 2021 SMC CORPORATION All Rights Reserved To the users Thank you for purchasing SMCs

MHZ

Weight (g) End boss type (Symbol) Model W K M E 70 70 70 70 MHZJ2-10 165 165 165 165 MHZJ2-16 290 290 290 290 MHZJ2-20 525 525 525 525 MHZJ2-25 12-2-52 52 Auto Switch Series MHZ Auto Switch Hysteresis Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc.

MHZ

Weight (g) End boss type (Symbol) Model W K M E 70 70 70 70 MHZJ2-10 165 165 165 165 MHZJ2-16 290 290 290 290 MHZJ2-20 525 525 525 525 MHZJ2-25 12-2-52 52 Auto Switch Series MHZ Auto Switch Hysteresis Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc.

SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 1-5-78. 1-5-52 53 5 Port Solenoid Valve Rubber Seal Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) q t r w y e q t r w (B) 2 (A) 4 (A) 4 (B) 2 SV i SZ i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) SY SYJ u 3 position closed center/exhaust center/pressure center SX

Table of Contents

Description Housing Outside tube Body Flower fin tube assembly Material Note SGP, SS400 STK FC200 C1220T Flower fin Flower fin q w e r q w e r Water chamber cover FC200 t AFF AM Replacement Parts Replacement Parts Misc. HAW22 HAW55 HAW75 HAW37 HAW110 No. Description HAW2 HAW7 Material No.

MXS

San=a1+a2+a31 3.11-10 Air Slide Table Series MXS Allowable load: W (N) Fig.1 Overhang: Ln (mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Dynamic moment L1 A1 L3 A5 L2 A3 CL W Mp Mr My W W MLGC L3 A6 W L1 A2 L2 A4 CNA W Mey Mep CB L2 A4 CV/MVG A2 L3 Work mounting coefficient: K Fig.3 CXW Table mounting CXS