2/3 Port Valve Note 3) Value on option "V", "M" (Non-leak, vacuum).
Nil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z : Manufactured upon receipt of order. 6-13-4 4 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning Accessory Mounting Accessory, Cylinder Female head side clevis (Corresponds to E accessories) Rod/Head side flange Male head side clevis F D C Bore size (mm) CJ1 CJP Supplied with bolt, safety device
Nil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z : Manufactured upon receipt of order. 6-13-4 4 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning Accessory Mounting Accessory, Cylinder Female head side clevis (Corresponds to E accessories) Rod/Head side flange Male head side clevis F D C Bore size (mm) CJ1 CJP Supplied with bolt, safety device
Operation of the main exhaust When pressure is applied the the actuation port M (7) on model XLD, or the main exhaust solenoid valve (26) is turned ON with port P in a pressurized state on model XLDV, the piston M (8) moves upward opening valve M (13). Port S (10) remains pressurized and valve S (18) remains open.
Operation of the main exhaust When pressure is applied the the actuation port M (7) on model XLD, or the main exhaust solenoid valve (26) is turned ON with port P in a pressurized state on model XLDV, the piston M (8) moves upward opening valve M (13). Port S (10) remains pressurized and valve S (18) remains open.
Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit: Class M1 to M7 U descriptor: Particles diameter smaller than 0.1 m (SI unit) (British
Speed 600 mm/s REAR20 3 1 9 9.5 5.2 22.8 9 6 39 37.5 39 36 38 36 7.5 21 M6 x 1 x 8 REAR25 3 1 8.5 9.5 5.2 27.8 8.5 6 44 42.5 44 41 43 41 6.5 23.5 M6 x 1 x 8 REAR32 3 1.5 10.5 11 6.5 35 10.5 7 55 53.5 55 52 54 51 7 29 M8 x 1.25 x 10 Direct Mount Type REBR REAR40 5 2 10 11 6.5 43 13 7 65 63.5 67 62 66 62 8 36 M8 x 1.25 x 10 LD MM N P PW Q WS Z QW T W X Y K L M Model REAR10 3.5 M3 x 0.5 4.5
Manual release, Lock type While pushing the M/O knob, turn it 90 counterclockwise. The lock is released (and remains in a released state) by aligning the mark on the cap with the OFF mark on the M/O knob. When locking is desired, turn M/O button clockwise 90 while pushing fully, correspond on cap and ON mark on M/O button. The correct position is confirmed by a click sound click.
FV 40 44 5.5 8 54 61 30 to 100 50 49.5 6.6 9 67 67.5 mm 4-FD FT Bore size (mm) FX FZ L L1 M L FX FZ B + Stroke A + Stroke 32 34 17 65 38.5 56 40 40 17 72 38.5 62 Rod end male threads 50 50 18 89 43.5 76 Flange material: Carbon steel Rod end nut L1 Rear flange type Rear flange type/RQG, RDQG mm Bore size (mm) Stroke range (mm) A L L1 20 to 100 32 7 28.5 52 20 to 100 40 59 7 28.5 FV M 30 to
Knuckle Pin (Common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel Material: Carbon steel Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l D d H B C Part no.
Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Applicable load Lead wire length (m) Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 1) Lead wire length symbols: 0.5 mNil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ
Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10
Reduced apparent power 10 VA m 7 VA (Size 1) Normally Closed (N.C.)
Klt (when tactory assembted) XX = No. of Stailons DIMENSIONS A B BBD E G H K M N 3.58 (91) 4.61 ( 1 1 4 2.56 (65) 3.58 r) 1.22 (31) 1.50 (38) 0.26 (5.5) 3.29 (83.5) 3.23 (82) 1,42 (36) 2.05 (52) 't.10 (28) 0.59 05) 'Dlmension if DC Sotenold is Used Mlllimeters In Parentheses MANIFOLD DIMENSIONS I-!
Material: Carbon steel Dd9 d L Part No. m t l 0.040 0.076 CD-S02 CD-S03 20/25 32/40 8 C8 type for pivot 7.6 24.5 19.5 1.6 0.9 0.040 0.076 10 C10 type for pivot 9.6 34 29 1.35 1.15 Applicable bore size 20 25/32 40 Part No.
Release Time Signal/Supply pressure 0.6 MPa Signal/Supply pressure 0.3 MPa VM1 Release time (sec) VM2 Component Parts Piping length (m) Material Note No.
D-F9NW, F9NWV DC (+) Brown Main circuit switch Main circuit switch Auto Switch Weight Table OUT Black Unit: g D-F9NW(V) D-F9PW(V) D-F9BW(V) Model DC () Blue 0.5 7 7 7 Lead wire length (m) 3 34 34 32 5 56 56 52 D-F9PW, F9PWV DC (+) Brown Auto Switch Dimensions OUT Black D-F9W D-F9W D-F9W D-F9W Switch mounting screw M2.5 x 4l Slotted set screw DC () Blue 2 2.7 Indicator light D-F9BW, F9BWV
Piping length [m] Air consumption Q [Nl/min.] 4 3 100 cylinder [mm] 40 50 63 80 2 2 100 100 Stroke [mm] Air consumption Q [Nl/min.]
Weight (g) D-J79C Auto switch model 0.5 m (Nil) 13 3 m (L) Lead wire length Lead wires with a connector indication 52 5 m (Z) 83 Part No. of Lead Wires with Connectors (Applicable only for connector type) Lead wire length Model 0.5 m D-LC05 Dimensions (mm) 3 m D-LC30 5 m D-LC50 3.2 mounting hole Indicator light Most sensitive position 1588 Solid State Auto Switch Tie-rod Mounting Style D-F59
W H T U Pin no. n LEC-CSNA-1 39 37.2 12.7 14 14 773 LECY M U Series Options cable type M LEC Y C 1 Cable length (L) Motor type Y AC servo motor L* 0.2 m J 0.5 m 1 1 m 3 3 m Cable description M MECHATROLINK-2cable U MECHATROLINK-3cable * Not available for the MECHATROLINK2cable. * LEC-CYM-l is JEPMC-W6002-ll-E manufactured by YASKAWA CONTROLS CO., LTD. * LEC-CYU-l is JEPMC-W6012-ll-E manufactured