Escapements Series MIW/MIS

Auto Switch Internal Circuits Auto Switch Weights Unit: g D-F8N D-F8N D-F8P D-F8B Model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 32 32 Main switch circuit Main switch circuit Main switch circuit OUT Black 5 52 52 52 DC () Blue Auto Switch Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting thread M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC

15

3 mm or more.

OMU0023

Controller ID: 1 Function code: 05h Start address: Y30 Data value to be written: "FF00h" (i) Request Example 1 Start code 2 ID 0 Controller ID: 1 3 1 4 Function code 0 Function code: 05h 5 5 6 0 Address No. of 7 0 contact to be Start address: Y30 8 3 written 9 0 Data 10 F 11 F Data value to be Data value to be written: "FF00h" written Note 1) 12 0 13 0 Calculated 14 value Checksum(LRC) 15

15

M3E = 1/3 x FE x Y = 1/3 x 188.7 x 25/1000 = 1.6 [Nm] 3B = M3E/M3max = 1.6/17.1 = 0.09 M3 Refer to [3] Calculation for Overall Center of Gravity in the Y-axis on front matter 7.

SYJ300/500/700

Bracket AC (50/60 Hz) Nil: Without bracket F: With bracket 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 3 port For type W, DC voltage is only available.

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

332 332 344 356 69 81 93 77 89 101 83 95 107 VVX21 VVX22 VVX23 Manifold composition 2 stns. x 1 3 stns. x 1 2 stns. x 2 2 stns. + 3 stns. 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 (mm) V DIN terminal Electrical entry A B C D E F H J N R Grommet T Conduit W Conduit terminal Model Q 49 62 66.5 S 41.5 54 59 U 58 62 64.5 X 63 66 68 Y 94.5 97.5

MXW

(2) 3 (3) 4 (3) 6 (4) Interference Note) Figures in parentheses are the case for D-M9, D-M9V switch types.

LFE-OMY0008

HYS WIN ACCUMU PLS 2. 2. 2. 2. 2_P/2_N(37 ) 3. 3. 3. 3. Add/dEC P1AH/n2AH P1dH/n1dH (39 ) P2L/n2L P2H/n2H/H2 (38 ) P_2/n_2/H_2 (38 ) 4. 4. 4. 4. [F 2] OUT2 36 No.LFE*-OMY0008 1. 1. 1. 1. [F 2] [oUt2] OUT2 [-] 2. 2. 2. 2. (ON-OFF ) 37 No.LFE*-OMY0008 3. 3. 3. 3. a. ([n_2]) 4. 4. 4. 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. 4. 4. 4.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22

KJ

16 10.4 10 1 4 1 8 1 4 3 16 11.4 19.5 3.5 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 Connection thread 97 55 59 55.5 55 55.5 54.5 52 52.5 1 4 17.46 3 8 1 2 3 8 25.5 7 17.9 21 17 22.23 64 64 1 4 9 17.46 54 3 8 1 2 21.7 28 22 9.6 59 17 1 2 100 56 22.23 Reference dimensions after Uni thread installation. 15-4-34 5 Inch-size Uni One-touch Fittings Series

VP300/500/700

N.O. 112 (55) (X port) (Rc1/8) (R port) Rc 1/2 40 (For mounting) 2-8.5 24 162.2 52 V100 (32) 3(R) 3(R) 3(R) 3(R) 48 86 1(P) 1(P) 1(P) 1(P) MAX.10 D: 173.4 Y: 172.9 SY 162.2 MAX.10 173.4 163 52 (P port) Rc 1/2 SYJ VK (Pitch) 300 Pg9 119.7 129.7 Pg9 Y: 131.7 148.7 (Non-locking) Manual override 41 37 (Lead wire length) 8 L2 129.2 139.2 124.2 134.2 D: 129.7 146.7 L1 VZ Applicable lead wire O.D

Compact Hydraulic Cylinder

5 V 3-wire (NPN equiv.)

HRX-OM-M090

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(-F) M plug connector (M): 10-SYJ5123-M-M5(-F) DIN terminal (D, Y): 10-SYJ5123-M5(-F) M8 connector (WO): 10-SYJ5123-WO-M5(-F) D Y Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] 63.2 [65.4] 82.1 83 72.1 3 3 58.2 64.7 3 3 42.2 19.5 19.5 19.5 11 11 11 19.5 11 2 x 2.6

Series VQ Base Mounted Metal Seal/Rubber Seal

position closed center VK 3 VZ Note) LO type valve is used for F, P, T, and S kits.

0.4

Note 2) : Stations 02 to 24 Note 3) For S/P/F/L kits Replacement Parts No. Part no. Description Material Quantity VVQ1000-80A-1 VVQ1000-80A-2 VVQ1000-80A-3 VVQ1000-80A-4 o !0 !1 !

Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !