REA/REB

3.5 3 3 3 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

Air Cylinder

D-X Technical Data 315 CG1W Series With Mounting Bracket Axial foot: CG1WLl LH B 15 LT LZ LX 2 LC (Knock pin position) W X Y Z LS + Stroke X M Y W 4 x LD (mm) Bore size Stroke range B LC LD LH LS LT LX LZ M W X Y Z 20 Up to 1500 34 4 6 20 53 3 32 44 3 10 15 7 47 25 Up to 1500 38.5 4 6 22 53 3 36 49 3.5 10 15 7 52 32 Up to 1500 45 4 7 25 53 3 44 58 3.5 10 16 8 53 40 Up to 1500 54.5 4 7 30

VM

Push button (Flush) VM220-02-33 VM230-02-33 JIS Symbol 2 port 3 port Panel mounting hole EXH port (3 port only) 0.5 MPa supply 4.9 mm P.T. 52 N F.O.F. 2-5.5 mounting hole 1.6 mm O.T. 6.5 mm T.T.

Rotary Clamp Cylinders

0 @5 w e @0 @3 !3 @9 #0 MK240 to 63 Head end flange (G) !

CG1

The rod is retracted in case of the spring extend style With Mounting Bracket Axial foot (mm) Axial foot/CG1LN Stroke range (mm) 20 25 32 40 Bore Z Y X W LZ LX LT LH LD LC M B (mm) Up to 125 47 52 53 63.5 7 7 8 8.5 15 15 16 16.5 10 10 10 10 44 49 58 71 32 36 44 54 3 3 3 3 20 22 25 30 6 6 6.6 6.6 4 4 4 4 3 3.5 3.5 4 34 38.5 45 54.5 Up to 200 Up to 200 Up to 200 LS 1 to 50st 51 to 100st 101

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

Large Size Vacuum Module: Series ZR

Example) ZR100-K15MZ-EC (-Q) . 1 pc. 3 L 38 ZS VJ10-20-4A-6 . 3 pcs.

CM2

SCM220A, #12, #3, #19 CM2L25SCM225A, #12 SCM225A, #12, #3 SCM225A, #12, #3, #19 CM2L32SCM232A, #12 SCM232A, #12, #3 SCM232A, #12, #3, #19 CM2L40SCM240A, #12 SCM240A, #12, #3 SCM240A, #12, #3, #19 Basic Foot Built-in One-touch fitting Spring extend CM2L20SCM220A, #11 SCM220A, #11, #3 SCM220A, #11, #3, #19 CM2L25SCM225A, #11 SCM225A, #11, #3 SCM225A, #11, #3, #19 CM2L32SCM232A, #11 SCM232A,

C92

3 No. !4 !5 !6 !7 !8 !

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: D (Fork Lever-type Fitting S), External Scale Plate: None, LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 2 (NPT1/4 - M20x1.5), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: H (w/External Scale Plate), LCD Window: None, Connection, Air - Electric: 1 (NPT1/4 - G1/2), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: Fork Lever-type Fitting S, External Scale Plate: None, LCD Window: Body w/LCD Window, Connection, Air - Electric: NPT1/4 - M20x1.5, ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: None (Standard), External Scale Plate: w/External Scale Plate, LCD Window: None, Connection, Air - Electric: NPT1/4 - G1/2, ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Table of Contents

Refer to page 3-8-52 for details.

LEC-OM02704CN

PC461(A97) 3. (RYn1)ON(RXnC)RYn1 4. RY(n2)0RY(N2)13.6.2(3) 5. *1 *2 *3 1 3 1 1 2 3 1 1 1 2 3 1 2 0 2 0 3 1 1 3 0 6. PD26RXn1PC35 7.

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

JXCx-OMT0023

Servo-on SON DICOM (Note 3) ALM Trouble RA DOCOM 3 3 3.

LEC-OM07605CN

(b)(SW1) 164( (3)(c)) (SW1) 8 7 6 9 A 5 B 4 C 3 D 2 1 0 F E (c) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D

TABLE OF CONTENTS

50 50 40 150 125 75 45 50 30 25 1/32 3/64 1/16 1/16 3/32 1/16 3/32 1/32 3/64 1/16 3/32 3/32 1/8 1/8 .020 .048 .075 .075 .156 .075 .156 .022 .055 .075 .156 .156 .230 .230 ** MODEL E55 3 Way Directional Control E55GG8XCCM E55HH8XCCM E55JJ8XCCM E55KJ8XCCM E55KK8XCCM E55NJ8XCCM E55NK8XCCM 300 200 100 75 75 65 45 200 100 50 25 40 20 20 1/32* 3/64* 1/16* 3/32* 3/32* 1/8* 1/8* 1/32 3/64 1/16 1/16

VQZ1000/2000/3000

(A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.