Vacuum Pad

5AU-4-X83 [Weight: 1.6 g] 2 M-5AU-6-X83 [Weight: 1.8 g] 2 M-5AU-2 [Weight: 1.5 g] 2 ZP3-T10UM;-A12-02 ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

Compact Manifold Regulator Series ARM5

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at handle locked) 55 (at handle locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side

VCL

Class 3 v v v Class 2 v v Port size 1/8 ( 6A) 1/4 ( 8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 v v v v Symbol 01 02 03 04 06 VCA VCB VCL Electrical entry Orifice diameter G Grommet C Conduit VCS Class 3 v v v v v Class 2 v v v v Orifice dia. (mm) 2 3 4 5 7 10 Class 4 v v v v v Symbol 2 3 4 5 7 10 VCW Refer to the below table for orifice and port size combinations.

Hydraulic

G TT GA Air release GA M Width across flats G 4-J V V MM MM R (max.)

•

> Width eCioss . ~ Width across flats 8 1 M5XO.8 flats 13 ~ '-J M6xO.75 M4XO.5 V Width across flats 12 Width aclOSS flat:s9 ~~ Ml0Xl Width across Width ac('()$s "'-.j M14 Xl lIats 14 r '; 1 U flalS 19 ~ 9 I I !I '" ~ 1 Width across M5XO.B flats 8 "l t w Width across M8X 1.25 flats 12 t= II >:, 0 ] ", ) W >:loJ " ~ ~ Flat with rib Flat with rib !ll. M ,8 , ~ iiI ,.

VFR

x 1 m A Series VFR2000 Rc1 8 Thread type T0604 x 1 m B Plug-in VFR2000 LP 02 Nil F G Rc Non plug-in VFS2000 LS 02 T0806 x 1 m C N NPT T NPTF T1075 x 1 m D Series VFR2000 Rc1 4 Plug-in VFR2000 LP B 02 T1209 x 1 m E Non plug-in VFS2000 LS B 02 Piping port (P, A, B port) Note) Mounting bolts and gaskets are not attached. 01 02 1 8 1 4 1 8 EA, EB port: Rc 3-5-11

125

Pilot Solenoid Valve Specifications Internal pilot solenoid / External pilot solenoid Model VEX3121, VEX3221, VEX3321, VEX3421 VEX3122, VEX3222, VEX3322, VEX3422 Pilot valve V114, V115 Symbol Electrical entry Grommet (G), L plug connector (L), M plug connector (M), DIN terminal (D) Rated coil voltage [V] AC (50/60 Hz) 100 V, 110 V, 200 V, 220 V DC 3 V, 5 V, 6 V, 12 V, 24 V Allowable voltage

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Property 65 or less Cable length (L) Conductor resistance /km, 20C AXT100-MC26-015 AXT100-MC26-030 AXT100-MC26-050 1.5 m 3 m 5 m Cable 25-core x 24AWG 10 Voltage limit V, 1 minute, AC 1000 Cannot be used for transfer wiring.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Property 65 or less Cable length (L) Conductor resistance /km, 20C AXT100-MC26-015 AXT100-MC26-030 AXT100-MC26-050 1.5 m 3 m 5 m Cable 25-core x 24AWG 10 Voltage limit V, 1 minute, AC 1000 Cannot be used for transfer wiring.

2-Color Display Digital Flow Switch Series PFM

(2 m) Z Without lead wire with connector W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) ZS-33-F S 1 2 ZS-33-D S 1 2 ZS-33-D IN IN Lead wire length 2 m Lead wire length 2 m Option 2 R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) T Panel mount adapter (For without flow adjustment valve) Nil None ZS-33-J ZS-33-M

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: 02 (Rc1/4), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option

LEC-OM071xx

Description Parameter Monitor Signal Unit Remarks n.00 [Pn007 Factory Setting] Motor rotating speed 1 V/1000 min-1 n.01 Speed reference 1 V/1000 min-1 n.02 [Pn006 Factory Setting] Torque reference 1 V/100% rated torque n.03 Position error 0.05 V/1 reference unit 0 V at speed/torque control n.04 Position amplifier error 0.05 V/1 encoder pulse unit Position error after electronic gear conversion

Direct Solenoid

T Optlonal Nvs 4 Ll 1 4Type of acluallon E = 44" Elecrrical L6ads M = hlerla@ speed conlrol P = Di. quS-inConnecior P1 = Din Top $lh light lnor ailable clas 2-5) P5 = Din w/6ll. prewned cord P6 = Oln Top w^ighi and 6 tt. prewned cord +Fl : sPF0101 Si.gle InlerlEe R9.

7.5

Direction Horizontal, Upward, Downward (Using elbow fittings for upward or downward) C6, C8, N7, N9 (Inch size elbow fitting is not available.) 1(P), 3/5(E) port Port size C2, C4, N1, N3, M3 SJ2000 4(A), 2(B) port C2, C4, C6, N1, N3, N7, M5 SJ3000 Weight W (g) Note 2) W = 51n + m + 133 n: Number of SUP/EXH blocks m: Weight of DIN rail Note 1) When many valves are operated simultaneously,

VXA21/22

Applicable Fluids Standard Option (1) Water (Standard, Up to 40C) Air (Standard, dry), Turbine oil Vacuum (Up to 1 Torr) Carbon dioxide (CO2), Nitrogen gas(N2) Freon11, 113, 114 Vacuum (Up to 103 Torr) (V, M) Non-leak (105 atm cc/sec or less) (V, M) Symbol N.C.

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

ITV

Use 0 V as the baseline for the power supplied to this product for output, control and input. +24 V +24 V Output power Output power 0 V 0 V Control/Input power Control/Input power 24 V +24 V 4. Each product needs to be powered by one power supply unit.

Fieldbus System

SS5Y5 12S NA 05 N M U Refer to page 23 for Type 12/ Top ported dimensions. q w e r y t u Mixed Mounting Type It is possible to mount SY3000 size valves on all stations.

Electric Actuators

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.