Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

CRBU

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

5 Port Solenoid Valve Series SV1000/2000/3000/4000

D side U side Stations 7 6 5 4 3 2 1 n [Communication connector D-sub] (DIN rail clamping screw) BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 20.5 (7.5) One-touch fitting [1(P), 3(R) port] 13.4 56.9 Applicable tube O.D.

MY1

orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) m is a mass movable by thrust.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Free 150/30 Dust proof 3 Position closed center 3 Position closed center B A B A P R R P R 3 Position exhaust center 3 Position exhaust center B A B A Solenoid Specifications P R R Grommet(G)/(H), L type plug connector(L), M type plug connector(M) P R Electrical entry 3 Position pressure center 3 Position pressure center DC AC50/60Hz 24,12,6,5,3 100, 110 , 200, 220 10% rated voltage 0.5(

15

Dimensions: Motor Top/Parallel LEY25, 32, 63 ZZ Y2 Motor flange Motor LEF Rod operating range Note 1) (Stroke + G mm) H thread depth C LEJ T U M LEL EV J LEM D 4 x O1 thread depth R K Note 2) LEY Y1 B + Stroke L S M 4 x O1 M EH thread depth R LES XA H9 depth XA 6 x MO thread depth MR LEPY LEPS Section XX details MH LER LEH MD MC ML + Stroke Section XX XB XA H9 XA LEY -X5 L MA 11LEFS IP65

ZP3

UM e Connection thread (Male thread) Width across flats D M5 x 0.8 A5 M5 x 0.8 B 3 A Model A B C2 D Vacuum inlet direction q Pad dia.

VZ3000

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

SYJ300/500/700

258-9200-www.stevenengineering.com G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6 [50.8] VT VP (Light/Surge voltage suppressor) VG 41.5 [48.5] + M5 x 0.8 (X port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Rubber seal 5 Port Solenoid Valve Series SYJ5000

P R R P R A B A B A B A B A B 67.1 [69.3] 49 4-4.5 (For mounting) 1/8 (P, R port) Manual override M5 x 0.8 (A, B port) L1 L2 9 Built-in one-touch fitting (Station n) (Station 1) (Light/surge voltage suppressor) 48.6 [55.6] + + + + + 20 (3.2) 52.8 L plug connector (L) M plug connector (M) M8 connector (W0) DIN terminal (D) Approx. 300 (Lead wire length) 0.6 141.2 Max. 10 125.2 86.1 Pg7 Applicable

Hydraulic

5D (M) 100D (M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M) x 165l 100D (M) 100D (M) M5 x 75l x 80l x 85l M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x 170l

AS

M5 x 0.8, R threads after installation.

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

Basic type / Direct mount type Series CY3B/CY3R

Model CYV15 CYV32 1 5 (Nm) M1 0.3 3 M1 M2 M2 0.6 4 M3 0.3 3 Model CYV15 CYV32 m m Moment generated by the workpiece weight even when the cylinder is stopped Static Moment M Pitch moment M1 = m x g x (L + B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) A 16.5 27.0 B 25.5 48.0 Model CYV15 CYV32 L B L B L A M1, 2, 3: Moment [Nm] m: Load mass [kg

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(PT)1/8 P port 0 1 0 1 DIN connector (Y): VQZ212 (R)wYwC4, C6, M5 L plug connector (L): VQZ212 (R)wLwC4, C6, M5 Indicator light 97.5 <98.5> 300 (Lead wire length) 67.5 <68.5> Pg.7 32 <35.5> Applicable cord 101.5 MAX.10 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23mm2 < >: AC 61.5 54 0 1 M plug connector (M): VQZ212 (R)wMwC4, C6, M5 36 37.5 <42.5> 300 (Lead wire length)

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

Rotary Actuator/Vane Style Series CRB2

Single vane type/Double vane type With angle adjuster CRB2BWU40-S/D (mm) h 6 x M5 x 0.8 depth 10 Keyway dimensions b l l b (h9) h (h9) Model CRB2BWU404 0 0.030 4 20 0 0.030 56 63 A port B port 25h9 0 0.052 10g6 0.005 0.014 11.5 4 0 0.030 2 20 2 x M5 x 0.8 45 30 6.5 Rotary actuator 35 A port B port 36.3 5.1 Angle adjuster Cap B W R 4 0 C SMC R R O O T A T A R U Y T C A 66 Series CRB2BWU Rotary