Air Cylinder Series MB

+0.30 +0.10 +0.30 +0.10 0.10 0.30 +0.30 +0.10 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 40 14 19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2.0 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14

4/5 Port Solenoid Valve

] 94.2 86.8 80.3 22 22 22 22 64.3 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 3.2 3.2 3.2 3.2 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to back page 11 for dimentions with connector cable. 55 Series SYJ7000 2 Position Double [ ]: AC G H 01 02 Grommet (G), (H): SYJ724022 12 G: Approx. 300 H: Approx. 600 (Lead wire length) 63 107.4 [111.8] B A With interface regulator 27 A B

AC Servo Motor Driver (Pulse input type/Positioning type ）

MBR, DB, or ALM is assigned to the CN1-22 pin, CN1-23 pin, or CN124 pin. ACD2 (CN1-22) Variable gain selection CDPS CDPS turns on during gain switching. DO1 Absolute position undetermined ABSV ABSV turns on when the absolute position is undetermined. DO1 ABS transmission data bit 0 ABSB0 (CN1-22) This is used to output ABS transmission data bit 0.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Nil TN TF Rc NPT 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 1/8 Relief type Vacuum suction type 25, 50, 75,

KR

18 17 17 10 29.5 29.5 21 24 14 T 1 2 KAH10-U04 22 14 28 22 16 22 Connection thread 1 4 3 8 KAH12-U02 KAH12-U03 24.5 19.5 30.5 25.5 19 VMG 19 12 46.1 46.1 22 1 2 KAH12-U04 24.5 16.5 22 28 Reference dimensions after Uni thread installation.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25-50 13-/22-MXS25-75 13-/22-MXS25-100 13-/22-MXS25-125 13-/22-MXS25-150 795 MXS 1322Air Slide Table Dimensions: MXS25 1322Axial piping

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

306 13-/22-MXQ2010 13-/22-MXQ2020 13-/22-MXQ2030 13-/22-MXQ2040 13-/22-MXQ2050 13-/22-MXQ2075 13-/22-MXQ20-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50. 817 MXQ 1322Air Slide Table Dimensions: MXQ20 1322Axial piping (20): MXQ20-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

CQ2

Rc(PT)3/8 66 6 21 22 25 20 98 77 43 250, 300 100 M20 X 2.5 132.5 M12 X 1.75 23 67.5 26 22 97.5 156 Rc(PT)3/8 75.5 6.5 27 27 30 22 117 94 59 Note 1) All the 125 to 200mm stroke types are in 25mm increments.

KJ

9 17 1 2 22 3 8 KQ2L13-03S 33.5 21.7 38.5 36 62 28 17 9.6 1 2 KQ2L13-04S 37.5 40 22 Reference dimensions after R thread installation.

5-Port Solenoid Valve

D-sub connector cable assembly terminal numbers Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 COM.

JIS Standard Hydraulic Cylinder

22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 65 80 25 to 1800 100 39 15 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 80 100 25 to 1800 Rod series Tolerance (mm) B-series rod C-series rod Bore size (mm) Bore size (mm) LH LX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 66 220 0.025 0.064 0.15 0.18 40 40 40 36

Table of Contents

16 24 43 45 39 80 62 80 H M 14 8 18.5 14 42 A 17 L 54.3 47.3 49.3 60.5 54.5 17 10 24 21 22 19 22 12 34 22 Connection thread Reference dimensions of R thread after installation.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For auto switch mounting position and its mounting height, refer to page 7-6-22.

10

22 29.5 43 45 45 50 21 22.5 22.5 25 61 (67) 74.5 (82.5) 79 (87) 85.5 30 35 40 40 9.5 10.5 10.5 14 20 22 24.5 24.5 3 Flat terminal Electrical entry Port size P Size Conduit Q 47.5 50 52.5 52.5 R 36 (41.5) 47 (55) 51.5 (59.5) 55 Q 23 25.5 28 28 R 42 (47.5) 53.5 (61.5) 57.5 (65.5) 61 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 3 ( ): Denotes the Normally Open (N.O.) dimensions. 33 Series VX21/22/23

5 Port Solenoid Valve Series SY3000/5000/7000/9000

1 49.5 55.1 (Lead wire length) Approx. 300 37.6 61.7 [68.7] Pg7 105.8 86 [88.2] 94.9 87.5 81 18 18 18 18 18 18 18 18 28 4.3 28 28 28 4.3 9.5 9.5 4.3 4.3 9.5 9.5 22 22 22 22 Note) Refer to page 340 for dimensions of connector types. 135 Series SY3000/5000/7000/9000 Dimensions: Series SY5000 [ ]: AC 2 position double Grommet (G), (H): SY5240(R)-02 G H (A, B port) 1/4 18 9.5 (Light/surge voltage

Air Cylinder Series CA2

M8 x 1.25 7 18 M18 x 1.5 30 3/8 63 0.032 0.059 18 98 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 M18 x 1.5 31 3/8 80 0.040 0.073 25 116 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 M22 x 1.5 37 1/2 100 0.040 0.073 25 126 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26 M26 x 1.5 40 1/2 Bore size (mm) TT TX TY TZ H Z ZZ 22 85 62 117 51 93 140 40 50 22 95 74 127 58 103 154 63 28 110 90

CA2

26 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 22 22 28 34 40 117 127 148 192 214 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 15 15 18 25 25 94 100 108 126 136 98 108 112 134 140 84 90 98 116 126 93 103 107 129 135 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-8-37 38 Series CA2Q Minimum Auto Switch Mounting Stroke n: Number

AC Servo Motor Driver (Network card type ）

Setting range: 1 to 16777215 1 5 22 5.

Compact 5-Port Solenoid Valve

solenoids available) Lead wire length (L1/L2/L3) 24 24 stations 22 22 stations Symbol Type 1 0.6 m 2 1.5 m 3 3 m SI unit output polarity, End plate type (S6m) Refer to page 63.

Proposals for Energy Saving

(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..