Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/2, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/2, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): No, Supply Side Connection Type: G, Supply Side, Connection Diameter: 1/2, Flow Direction: [Right] From Left to Right, Control Side Connection Type: G, Control

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, N, "REGULATOR

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, N, "REGULATOR

Type: Connector, Type: Small cross-head / straight-slot combination pan head machine screw (SV3000), Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: M4 × 53, Dimension: -, Applicable valve: -, Pressure reduction port: -, Option: -

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, PRECISION REGULATOR, REGULATOR

Size: 40, Backflow Function: K (Backflow Function), Thread: F (G), Port Size: 04 (1/2), Accessory: None, Specifications: 3 (0.008 to 0.6 MPa Setting)

Size: 1/2, Thread: F [G(PF)], Port Size: 1/2, Accessory: None, Attachment: w/o Attachment, Option 1: Lubricator w/Drain Cock, Option 2: -, Option 3: -

Size: 1/2, Thread: F [G(PF)], Port Size: 1/2, Accessory: None, Attachment: None, Option 1: Lubricator w/Drain Cock, Option 2: -, Option 3: -

Body Size: -, Thread: -, Port Size: -, Mounting: -, Bowl: -, Lubricant Exhaust Port: -, Flow Direction: -, Pressure Unit: -

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: G, Supply Side, Connection Diameter: 1/2, Flow Direction: [Right] From Left to Right, Control Side Connection

Table of Contents

21 22 22 5 32 15.5 2.5 1 8 1 4 3 16 5 32 16 3 1 4 3 16 1 4 16.5 3.5 5 16 1 4 17 4.6 3 8 3 8 5 16 18.5 6 1 2 1 2 3 8 21 7 Applicable tubing Note) D: Max. diameter Plug-in Y: KQ2U Applicable tubing O.D.

2

20.6 50.2 50.2 9 24 3/8 KQ2L16-03P 21 23.8 21 27.1 32.7 37.0 20.6 71 58.9 11 33.8 1/2 KQ2L16-04P 27 23.8 21 27.1 34.7 36.2 20.6 100 58.9 13 59.9 New New Note) D1 is maximum diameter.

One-touch Fittings

1/4 KQ2F08-G02 17 13 30.1 13.9 14.2 26.1 18 6 24 3/8 KQ2F08-G03 21 13 31.6 13.7 14.2 26.1 18 6 32.3 D L1 M L2 10 1/4 KQ2F10-G02 17 15.6 31.1 13.9 15.6 41.5 29.5 7.5 24.1 3/8 KQ2F10-G03 21 15.6 32.6 13.7 15.6 41.5 29.5 7.5 32.6 12 1/4 KQ2F12-G02 19 18.2 32 13.8 17 58.3 46.1 9 33 3/8 KQ2F12-G03 21 18.2 33.5 13.7 17 58.3 46.1 9 34.1 1/2 KQ2F12-G04 27 18.2 38.6 16.9 17 58.3 46.1 9 64.9 16 3/8

4/5 Port Solenoid Valve

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (B) 2 (A) 4 (B) 2 (A) 4 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Fluoropolymer Piping Equipment

LQ1T3A-TT2-R5 Tube 3/8 3/8 1/4 5 20 15 9 18 17 14 37.6 36.6 36.6 24 23 16.5 3.6 LQ1T4A-TT1-R1 1/2 Tube 3/8 1/2 24 24 21 21 34 38 34 24 28 28 6.3 LQ1T4A-TT1-R7 3/8 Tube 3/8 1/2 20 24 17 21 34 38 34 24 23 28 5.8 LQ1T4A-TT1-R37 1/2 Tube 3/4 1/2 24 24 21 21 39.5 49 39.5 35 28 28 9 LQ1T5A-TT1-R1 3/4 Tube 1/2 3/4 29 29 26 26 41.9 47.5 41.9 28 39 39 9.5 LQ1T5A-TT1

KQ2

3 8 5 16 18.5 6 1 2 1 2 3 8 21 7 Tube Cap: KQ2C Applicable tubing O.D.

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

F

28 23 21 41.5 1/4 3/8 KQH07-U03 17.46 18.5 12.5 17 4.6 10 14 KQH10-U02 17 28 22 21 41.5 5/16 1/8 KQH09-U01 14.29 25.5 21.5 18.5 6 10 38 KQH10-U03 17 24 18 21 41.5 5/16 1/4 KQH09-U02 14.29 21.5 15.5 18.5 6 10 12 KQH10-U04 22 22 14 21 41.5 5/16 3/8 KQH09-U03 17.46 21 15 18.5 6 12 14 KQH12-U02 19 30.5 24.5 22 58.3 3/8 1/4 KQH11-U02 17.46 28 22 21 7 12 38 KQH12-U03 19 25.5 19.5 22 58.3 3/8 3