Vacuum Module Series ZX K1 A V ZX1 5 Z B D M L 15 C 0X B ZSP1 D L AMJ Applicable nozzle diameter Piping specifications Unit for replacement Nil L Grommet (0.6 m) Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector For ejector system Manifold All ports are equipped with plugs.
port) 4-4.5 (mounting hole) 10 Manual override L2 (Pitch) P = 20.5 13.5 + + 16.5 11.5 22.8 20 9.4 B B B B B 19.5 21 20.5 19 69.8 76 P EA EB P EB EA 16 60 30 21 21 154.2 20 110 141.2 93.8 A A A A A 6-Rc 1/4 (P, EA, EB port) + + + + + Triangle mark 2n2-One-touch fitting (A, B port) Applicable tube O.D.: 8, 10 74.3 (5.5) Stations n 4 5 108.5 88.5 12 272.5 252.5 L1 L2 3 88 68 129 109 6 149.5
SS5Y52, #2 50 Type20P SY7000: SS5Y7-20PStations Note) [ ]: Values for AC Scale: 35% L1 2n1-Rc 1/4 (A, B port) 4-4.5 (mounting hole) 10 Manual override L2 (Pitch) P = 20.5 13.5 + + 16.5 11.5 22.8 20 9.4 B B B B B 19.5 21 20.5 19 69.8 76 P EA EB P EB EA 16 60 30 21 21 154.2 20 110 141.2 93.8 A A A A A 6-Rc 1/4 (P, EA, EB port) + + + + + Triangle mark 2n2-One-touch fitting (A, B port) Applicable
-50 21 KA NA x M5 x 0.8 thread depth 6.5 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 6 B A 5H9 depth 5 +0.030 0 NN x M6 x 1 thread depth 12 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 GA 18 18 19 19 48 73 80 105 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 N 4 4 4 4 6 6 8 10 HA 39 39 48 58 45
With air cushion WW WW WA WB Piping port M5 x 0.8 Cover surface MM NN GA GB F GC Piping port 3-M5 x 0.8 C D LY LB LH A LT X Y NA NB B 0 -0.3 LX S + Stroke H Z + Stroke LZ Head cover port location Axial direction (R) 2-LC Mounting hole (mm) LZ 42 42 LY 25 25 LX 33 33 LT 2.3 2.3 LH 14 14 Y 9 9 NN Z WW WA WB Bore size A M4 x 0.7 D GC B F H MM GB GA C 102.5 101.5 5.5 4.5 20 20 NB LB 21.5 23 S
HP L 4-J Effective thread length E TC MQQ M X F WP WP RHC GW GP QW PW D 4-LD Piping port P Operating direction A MK(2) 7 W K G RS Q G HS CR Piping port P Operating direction B Piping port P (Plug) Operating direction B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction
B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction A MI W S 12.5 19.5 16 CEP1 CE1 Plug CE2 REBR15 REBR15 ML2B (mm) C J G5-S A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15 12 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 CV REBR25 12.5 9.5 5.2 3 1
Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T Z2K Z2L Z2M Z2N Z2P Z2Q Z2R Z2S Z2W Z2T Z3A Z3B Z3C Z3D Z3E Z3F Z3G Z3H Z3V Z3J A B C D E F H J K L M N Nil A B C D E F G H K L Z Nil XB A B D E H J L M Nil A B C D E F G H K L Z Nil XB A B C D E F G H J K L M N P Nil A B C D E F G H K L Z Nil XB A B C D E F M N P Q R S T U V W Y Z1A Z1B Z1C Z1U Z1D Z1E Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T
Applicable shaft types: J, Z Applicable shaft types: X, Z (mm) (mm) X Y Size Size 4 to 19.5 4 to 19.5 50 50 4 to 21 4 to 21 63 63 4 to 23.5 4 to 23.5 80 80 5 to 30 5 to 30 100 100 Symbol: A59 Reverse the assembly of the shaft, and shorten the long shaft.
S) TL/TIL SMC LQ3 C A B SMC B A SMC D U (Max. T) Z (H) View Z LVQm0-S shown.
21 21 21 44.5 44.5 44.5 44.5 Refe page 4-4-61 for dimensions with connector cable. 4-4-23 24 Series SYJ500 Manifold Specifications Manifold Specifications Type 20 Type 40 Type 41 For internal pilot Model Type 21R Type 40R Type 41R For external pilot Single base/B mount Manifold type Common SUP, common EXH P (SUP), R (EXH) 2 to 20 stations Valve stations A port Porting specifications Valve
Z1. 2 Excluded for option Z.
5Fluororubber seal -X16 Page 230 Made to Order/-X6 to -X16 Page 231 DSpecific Product Precautions Page 232 187 Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100 RoHS How to Order B S 50 90 Z CRA1 With auto switch CDRA1 B S 50 90 M9BW Z Built-in magnet Number of auto switches Air cushion Mounting B Basic type L Foot type* Nil None C* With air cushion Nil 2 pcs.
Head Side Trunnion Style Head side trunnion style: CG1TN DZZ 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Bore size (mm) Z ZZ Z ZZ Z ZZ Z Bracket mounting range 20 25 32 40 118 139 143 164 168 189 -X 123 144 148 169 173 194 198 219 2-TD8 (Pin O.D.) 126 150 151 175 176 200 201 225 20143 171 168 196 193 221 218 246 Data Clevis Style Bore size (mm) Stroke range (mm) B CD CZ L RR TE
High corrosive, Oil-free Stainless steel FKM B For VX21: VVX21-3A For VX22: VVX22-3A For VX23: VVX23-3A Table (3) Rated Voltage Electrical Option Seal material Class B Class H Rated voltage S L Z S L Z Nil F E NBR FKM EPDM Voltage symbol Voltage With surge voltage suppressor With surge voltage suppressor With light With light With light and surge voltage suppressor With light and surge voltage
Wn Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 0 mm 5 mm 0.88 kg 65 mm 111 Wb 0 mm 42.5 mm 4.35 kg 150 mm 210 Y Y Wc 111 mm 42.5 mm 0.795 kg 150 mm Wd 210 mm 42.5 mm 0.5 kg 150 mm n = a, b, c, d 3.
Please delete the unnecessary part. 1.4-10 Series CM2 Axial Foot (L) CM2L Bore size Stroke (mm) B LC LH Bore Stroke range K LT LX N NA NN S A B2 D H2 I P 1/8 1/8 1/8 1/4 B1 LD LS LZ X AL F MM Y G Z H ZZ H1 1to400 15.5 13 26 5 8 6.8 102 3.2 M8 X 1.25 M20 X 1.5 131 40 4 25 5 40 15 24 62 18 8 28 55 20 13 8 8 21 41 20 33.5 5.5 M10 X 1.25 1to450 19.5 17 32 6 8 6.8 102 3.2 M26 X 1.5 135 47 4 28
18 (26) 18 (26) 19 (27) 21.5 (30.5) 26 (38) 26 (38) B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) A A A A A HS A HS HS B 15 (22.5) 15
B Counterbore depth.
S E 20 180 S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !