ISO/VDMA Cylinder: Standard Type Double Acting, Single/Double Rod Series C95 ø32, ø40, ø50, ø63, ø80, ø100

switch No Grommet Diagnostic indication (2-color) Z76 Z73 Z80 F59 F5P J51 J59 F59W F5PW J59W F5BAL 5 V IC IC 3-wire Yes 12 V 5 V, 12 V AC 100 100 V or less Relay, PLC No PLC 24 V 2-wire Terminal conduit 12 V Yes 100 V, 200 V Relay, PLC DIN terminal 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC 24 V 100 V, 200 V 2-wire 12 V 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Diagnostic indication (

ML1C

indication (2-color indicator) 2-wire 3-wire (PNP) 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V,12 V 3-wire IC circuit E76A 5 V (NPN equivalent) Yes Grommet E73A E80A 24 V 12 V 5 V,12 V 100 V 2-wire Relay, PLC IC circuit N0 100 V or less Lead wire length symbols: 0.5 mNil (Example) M5BW 3 m L (Example) M5BWL 5 m Z (Example) M5BWZ Solid state auto switches marked with are produced

HRX-OM-I051

Contact signal Table 8-12 Contact Signal Item Specification Connector No.

Model Selection 1

/N.O./ Double acting 0 to 0.5 Pilot pressure: 0.3 to 0.5 LVA1/2/3/4/5 2, 4, 8, 12, 20 1/8 to 3/4 Single unit Direct operated Threaded type 17-5-17 0 to 0.5 Pilot pressure: 0.3 to 0.5 N.C./N.O./ Double acting 1/4 to 3/4 4, 8, 12, 20 LLA2/3/4/5A Manifold 1/8 to 1/2 LVH2/3/40 N.C. Single unit Direct operated Manually operated 17-5-27 0 to 0.5 4, 8, 12 LLH2/3/4A 1/4 to 1/2 N.C.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 to 1000 to 1000 to 1000 Rear flange type (G) 4-FD FY B FX FT ZZ + Stroke FZ (mm) Stroke range Bore size (mm) B FT FD FX FY FZ ZZ 40 50 63 12 16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 190 211 237 to 1000 to 1000 to 1000 4 Series MGZ Construction Parts list Description Material Aluminum alloy Aluminum alloy Aluminum alloy

e-Rodless Actuator

Yes 5 V A93V A93 Grommet 12 V 100 V Relay PLC 24 V 2-wire IC circuit A90V A90 5 V,12 V 100 V or less M9NV M9N 3-wire (NPN) IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V 2-wire Relay PLC Yes Grommet 24 V F9NWV F9NW 3-wire (NPN) Diagnostic indication 2-color display IC circuit 5 V 12 V F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire 12 V . . .

HRL

to the Parts Description on page 5. 3 Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series Dimensions HRL300-A-40 Ventilation air inlet Ventilation air inlet Ventilation air outlet 850 40 or less 1079 330 10 1839 A 1145 1109 4 x 12 700 750 Anchor bolt mounting position (View A) For piping port sizes, refer to the Parts Description on page 5. 4 HRL Series Dual Channel

PFxx-OMY0005

KPa, kgf/cm2, bar, psi Temp. oC, oF 0 to 2100 L/min 0 to 1050 L/min Instantaneous flow 12 (Displays 0 when the value is below 20 L/min.) (Displays 0 when the value is below 10 L/min.)

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 5 V, 12 V 24 V Diagnostic indication (2-color indication) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V, 12 V Lead wire length symbols: 0.5 mNil (Example) E76A 3 mL (Example) E76AL 5 mZ (Example) M5NTZ Solid state switches marked with are produced upon receipt of order.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 5 V, 12 V 24 V Diagnostic indication (2-color indication) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V, 12 V Lead wire length symbols: 0.5 mNil (Example) E76A 3 mL (Example) E76AL 5 mZ (Example) M5NTZ Solid state switches marked with are produced upon receipt of order.

20

ONumber of pages from 12 to 16. QR Edition F Revision history OBest Pneumatics No.1 (Pages 1889 to 1899) extracted. NS Edition C OAdded the KK130 series S coupler and one-touch fitting type. ONumber of pages from 16 to 12.

energy saving effect

HEB Anchor bolt fixing position A Anchor bolt fixing position B HED 1100 (Dimension of anchor bolt fixing bracket) 756 136 1020 (Dimension of anchor bolt fixing bracket) HEA 12 x 12 670 43 670 138 8 x 12 IDH (850) (Thermo-chiller dimension) 700 (715) (Thermo-chiller dimension) 627 43 617 752 50 (954) (Thermo-chiller dimension) 19 76 984 19 (1035) (Thermo-chiller dimension) 1064 View A-A View

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 5 V, 12 V 24 V Diagnostic indication (2-color indication) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V, 12 V Lead wire length symbols: 0.5 mNil (Example) E76A 3 mL (Example) E76AL 5 mZ (Example) M5NTZ Solid state switches marked with are produced upon receipt of order.

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

K39 Solid state auto switch 5 V, 12 V 3-wire (NPN) 5 V, 12 V M9NW V V V v v IC circuit 3-wire (PNP) M9PW V V V v v 2-wire 12 V M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC Yes 3-wire (NPN) 5 V, 12 V M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PA*1 v v V v v 2-wire 12 V M9BA*1 v v V v v 24 V Water resistant (2-color indicator) Grommet With diagnostic output (

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire (NPN) IC Terminal conduit Solid state switch 12 V M9NW M9PW M9BW M9NA M9PA M9BA F59F 5 V, 12 V IC Diagnosis indication (2-color) Relay, PLC Yes 12 V 24 V 5 V, 12 V IC Water resistant (2-color) Grommet IC 12 V 5 V, 12 V Diagnosis output (2-color) 2-wire (Nonpolar type) 3-wire (Equiv. to NPN) Strong magnetic

Mechanically Jointed Hy-rodless Cylinder with Brake ML1C Series ø 25, ø 32, ø 40

indication (2-color indicator) 2-wire 3-wire (PNP) 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V,12 V 3-wire IC circuit 5 V E76A (NPN equivalent) Yes Grommet E73A E80A 24 V 12 V 5 V,12 V 100 V 2-wire Relay, PLC IC circuit N0 100 V or less Lead wire length symbols: 0.5 mNil (Example) M5BW 3 m L (Example) M5BWL 5 m Z (Example) M5BWZ Solid state auto switches marked with are

CYP

12-CY1R Features 2 Clean Room Rodless Cylinder Series CYP How to Order CYP 15 Z73 200 Number of auto switches Clean room rodless cylinder 2 pcs. 1 pc.

CYPSeries

12-CY1R 3 Series CYP Clean Room Rodless Cylinder How to Order CYP 15 Z73 200 Number of auto switches Clean room rodless cylinder 2 pcs. 1 pc.

CYPSeries

12-CY1R 3 Series CYP Clean Room Rodless Cylinder How to Order CYP 15 Z73 200 Number of auto switches Clean room rodless cylinder 2 pcs. 1 pc.

25

12 14 16 18 20 30 Hz Discharge time (s) Discharge time (s) 1 Hz 30 Hz 1 Hz 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) Supply pressure: 0.3 MPa (17.6 L/min [ANR] per cartridge) Supply pressure: 0.3 MPa (8.6 L/min [ANR] per cartridge) 12 12 10 10 Discharge time (s) Discharge time (s) 8 8 6 6 30 Hz 1 Hz 30 Hz 1 Hz 4 4 2 2 0 0 0 500