Tie-rod Type Hydraulic Cylinder

50 19 50 25 9 73 17 M10 x 1.5 20 M16 x 1.5 10 9 53 20 13 16 11 28 22 3/8 17 30 26 43 112 5 63 21 55 28 8 80 17 M10 x 1.5 22 M18 x 1.5 12 10 60 22.4 13 16 11 30 25 3/8 17 30 26 47 116 5 80 26 65 M12 x 1.75 32 8 100 20 26 M22 x 1.5 16 13 75 28 15 19 11 32 29 1/2 22 35 30 57 127 5 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 19 27 20 16 90 35.5 16 21 12 35 34 1/2 27 35 32 66 137 8 125 34 80 M14 x

CY1

CY1B40L 0.95 CY1B50H 3.12 50 CY1B50L 1.83 CY1B63H 5.07 63 CY1B63L 3.09 Contact SMC before using fittings which exceed the above weights. 5 Series CY1B 6 Series CY1B Magnetic Rodless Cylinder Basic Type Dimensions Basic type CY1B6, 10, 15 (mm) MM x J M3 x 0.5 x 4.5 M3 x 0.5 x 4.5 M4 x 0.7 x 6 D 7.6 12 17 B 17 25 35 F 9 9 10 G 5 5 5.5 H 14 12.5 13 K 5 4 11 L 35 38 57 N 10 11 11 NA 14 14 17

CNA

D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL D-G5/K59/G59F D-G5W/K59W D-G5NTL/G5BAL D-G39/K39 D-G39C, D-K39C D-P5DWL 40 63 80 100 34 50 34 34 34 35 38.5 47 10.5 9.5 9 7 8 38 MLGP 41 63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011

CNA

0 u @5 i !5 !1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !

Battery-less

5 r t w q y !6 !

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

HRX-OM-X084

Standard setting menu . 5-8 5.3.6 Alarm Setting Menu . 5-9 5.3.7 Communication setting menu . 5-10 5.3.8 Reset menu . 5-11 5.3.9 Information Monitor Setting Menu . 5-11 5.4 Basic setting mode . 5-12 5.4.1 Screen configuration . 5-12 5.4.2 Main menu . 5-12 5.4.3 Alarm display menu . 5-14 5.4.4 Notice for maintenance Menu . 5-15 5.5 Advanced setting mode . 5-17 5.5.1 Switch to advanced setting

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

CLA

14 113 21 30 72 80 750 20-750 23 17 M12X1 .75 11 M22X 1. 5 100 -750 20750 37 40 11 6 140 V 'I.. 92 30 52 14 124 21 31 76 25 19 M12X 1.75 11 M26X1 .5 IBore Size (mm) MM X1US N Without Boot With BootLZ H ZZ ee f h !

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

CM2

12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 and @7 20 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P523010-5 Seal kit P391070-5 11-9-20 21 Rotary Table Series MSQ Dimensions: Size 10, 20, 30, 50 WB effective depth WC XB effective depth XC Basic type: MSQBA 8-WD depth WE (Circumference: 8 equivalents) XA 2 WA 2 4-JJ depth 8 45 2-J through JA counterbore depth JB 22.5 CRB2 BE CRBU2 CRB1 WF 2-M5 x 0.8 Piping port (Plugged)

PF2A/PF2W

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Proposals for Energy Saving

8 @4 #3#0 #4$0#9@5#2w @6 @3ue !6!5 !1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

-5-2 11-5-3 3 Series MSU Precautions Be sure to read before handling.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

5 D-X 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 20Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Data CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Usable range 10 5 5 Usable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance

Support Guide/11-LEFG Series

307 478 11-LEFG40-S-350 554 357 528 8 3 450 11-LEFG40-S-400 604 407 578 11-LEFG40-S-450 654 457 628 11-LEFG40-S-500 704 507 678 10 4 600 11-LEFG40-S-550 754 557 728 11-LEFG40-S-600 804 607 778 Model L A B n D E 11-LEFG40-S-650 854 657 828 12 5 750 11-LEFG40-S-700 904 707 878 11-LEFG40-S-750 954 757 928 11-LEFG40-S-800 1004 807 978 14 6 900 11-LEFG40-S-850 1054 857 1028 11-LEFG40-S-900 1104

MXQ

Rubber stopper (P. 8-5-40) Metal stopper (P. 8-5-43) Basic style 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 3 11 Max. 12 (Retraction end adjuster) 12 I J 5.5 11 5.5 11 Adjuster at extension end N-M5 x 0.8 thread depth 6 36.5 (Adjuster at extension end) 11 5.5 5H9 depth 5 +0.030 0 Retraction end adjuster 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

JXCx-OMU0004

1600 15000 14 900 17500 1800 17500 15 1000 20 2000 20 62 No.JXC-OMU0004-A 11. 11.1 [5m ] A B-1 2 A A-1 1 LE-CP-1 L B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 S B B-6 9 B A-6 8 3 14.2 2 1 8 14) B1 A1 17.7 6 5 2 1 18 B6 A6 16 15 L 11 30.7 11.2 [820m] A B-1 2 A A-1 1 LE-CP-1 L B B-2 6 B A-2 5 8 8m*

VM

6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective